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1.发明公开
公开(公告)号：EP2213766A4
公开(公告)日：2014-01-22
申请号：EP08841306
申请日：2008-10-22
Applicant: NAT INST FOR MATERIALS SCIENCE
Inventor： MURAKAMI HIDEYUKI , MATSUBARA YUKIO , MORIIZUMI SYUNSUKE , MURAKAMI HIROMICHI , YOSHIDA MIKIYO
CPC classification number: C23C18/54
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