SLIDING MATERIAL FOR VACUUM
    1.
    发明专利

    公开(公告)号:JP2002276663A

    公开(公告)日:2002-09-25

    申请号:JP2001076290

    申请日:2001-03-16

    Abstract: PROBLEM TO BE SOLVED: To prevent agglutination and galling of a sliding machine in vacuum by suppressing increase in a friction coefficient in the vacuum and to contribute to energy saving of vacuum related devices by producing super-clean, long-life, and maintenance-free devices. SOLUTION: In the surface processing of a vacuum sliding material, the surface maximum roughness of the sliding material by mechanical or chemical polishing is set to within a range from 70 nm-200 nm.

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