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公开(公告)号：DE60045559D1
公开(公告)日：2011-03-03
申请号：DE60045559
申请日：2000-11-10
Applicant: NAT INST FOR MATERIALS SCIENCE
Inventor： CHIKYO TOYOHIRO , YOSHIMOTO MAMORU
IPC: H01L21/316 , H01L21/8242 , H01L27/10 , H01L27/108 , H01L29/51
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