公开(公告)号：EP2924411A4

公开(公告)日：2016-07-13

申请号：EP13857007

申请日：2013-11-12

Applicant: NAT INST OF ADVANCED IND SCIEN

Inventor： YOSHIDA HAJIME ,  ARAI KENTA ,  KOBATA TOKIHIKO

IPC: G01M3/02 ,  B81B7/00 ,  G01L27/00 ,  G01M3/00 ,  G01M3/20

CPC classification number: G01L27/002 ,  B81B7/0009 ,  B81B2201/05 ,  G01M3/007 ,  G01M3/207 ,  G01M3/26

Abstract: There is provided a reference leak generating device capable of precisely generating an ultra-fine reference leak. The reference leak generating device adapted to be connected to an upstream side of a measurement chamber includes a chamber connected to the measurement chamber through an orifice or a porous plug having a molecular flow conductance C and a pressure to establish molecular flow conditions which are known in advance, and is characterized in that a pressure p 1 of testing gas to be introduced into the chamber is precisely determined by using a static expansion method once or more times, and a leak rate of a reference leak at the pressure p 1 is obtained in accordance with a product of C and P 1 .