公开(公告)号：US20190212130A1

公开(公告)日：2019-07-11

申请号：US16328309

申请日：2017-06-01

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Qinghua WANG ,  Shien RI ,  Hiroshi TSUDA

IPC: G01B11/16 ,  G01J9/02 ,  G01B11/25

CPC classification number: G01B11/161 ,  G01B11/16 ,  G01B11/25 ,  G01B11/254 ,  G01J9/02 ,  G01J2009/0234 ,  G01N21/45

Abstract: In a conventional moiré method, achieving both measurement accuracy and dynamic measurement and balancing field of view and measurement accuracy have been difficult. The present invention makes it possible to handle conventional moiré fringes as a grating for generating phase-shifted second-order moiré fringes, use a spatial phase shift method algorithm to accurately analyze the phases of the second-order moiré fringes before and after deformation, and determine shape from the phase differences between gratings projected onto the surface of an object of measurement and a reference surface and determine deformation and strain from the phase differences between the second-order moiré fringes, before and after deformation, of a repeating pattern on the object surface or a produced grating. As a result, it is possible to measure the three-dimensional shape and deformation distribution of an object accurately and with a wide field of view or dynamically and with a high degree of accuracy.

公开(公告)号：US20160161249A1

公开(公告)日：2016-06-09

申请号：US14904890

申请日：2013-12-05

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Shien RI ,  Hiroshi TSUDA

IPC: G01B11/16 ,  G01M5/00

CPC classification number: G01B11/165 ,  G01B11/16 ,  G01M5/0041 ,  G01M5/0058 ,  G01M5/0091 ,  G01N3/068

Abstract: In the present invention, conventional problems that the scheme is not suitable for nano/micro materials or large structures, and that if the scheme is applied to a regular pattern with two or more cycles of arbitrary repetition, a large error is generated are solved by using a higher order frequency of moire fringes generated using an arbitrary regular pattern having one-dimensional or two-dimensional repetition artificially produced on a surface of an object or previously present on the surface of the object, or phase information in a plurality of frequency components, and improvement of measurement precision and a dramatic increase in a limit of a measurement scale are achieved.

Abstract translation: 在本发明中，该方案不适用于纳米/微观材料或大型结构的常规问题，并且如果将该方案应用于具有两个或更多个任意重复循环的规则图案，则产生大的误差由 使用在对象的表面上人工产生的或先前存在于对象的表面上的具有一维或二维重复的任意规则图案产生的莫尔条纹的更高阶频率，或多个频率分量中的相位信息 ，并且实现了测量精度的提高和测量尺度极限的显着增加。