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公开(公告)号：DE69407927T2
公开(公告)日：1998-08-13
申请号：DE69407927
申请日：1994-10-28
Applicant: NEC CORP
Inventor： KURIYAMA TOSHIHIDE , MAKISHIMA HIDEO
Abstract: It is the object of the invention to provide a field emission cathode apparatus comprising plural electron-emitters which eliminates nonuniformity of electric emission density over an emissive area, controls emission currents by active devices, and improves reliability of the apparatus. A p-type silicon 5 and a n-type silicon 4 are formed on a n -type silicon 6. On n-type silicon 4, an electron-emitter 1 made of Mo is formed, and an electron-emitter 1 is surrounded by a grid electrode 2 and an insulator layer 3. A n-type silicon 4 serves as a channel region of a junction gate field effect transistor, and a current flowing through it is controlled by a voltage applied to a p-type silicon 5. Accordingly, an electron current emitted from an electron-emitter 1 is also controlled by this transistor, and by setting up an operation region of this transistor in a saturation current region, nonuniformity of electron emissions from electron-emitters can be improved. Even when a portion of cathodes are damaged, damages are not magnified to that of a whole apparatus, and a life of a field emission cathode can be prolonged.
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公开(公告)号：DE69709817T2
公开(公告)日：2002-09-05
申请号：DE69709817
申请日：1997-09-29
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO
Abstract: In a field emission cathode type electron gun, a plurality of cathode segments and a plurality of gate control circuits (5-1, 5'-1) are provided. Each of the gate control circuits is connected to one of the cathode segments. Each of the cathode segments includes a cathode electrode, a gate electrode (14-1, 14-2, ...), an insulating layer therebetween, and a plurality of cone-shaped emitters (15) formed within openings perforated in the gate electrode and the insulating layer. Each of the gate control circuits detects a current flowing through one of the cathode segments and controlling a voltage of the gate electrode of the respective cathode segments in accordance with the detected current, so that the detected current is brought close to a definite value.
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公开(公告)号：DE69407927D1
公开(公告)日：1998-02-19
申请号：DE69407927
申请日：1994-10-28
Applicant: NEC CORP
Inventor： KURIYAMA TOSHIHIDE , MAKISHIMA HIDEO
Abstract: It is the object of the invention to provide a field emission cathode apparatus comprising plural electron-emitters which eliminates nonuniformity of electric emission density over an emissive area, controls emission currents by active devices, and improves reliability of the apparatus. A p-type silicon 5 and a n-type silicon 4 are formed on a n -type silicon 6. On n-type silicon 4, an electron-emitter 1 made of Mo is formed, and an electron-emitter 1 is surrounded by a grid electrode 2 and an insulator layer 3. A n-type silicon 4 serves as a channel region of a junction gate field effect transistor, and a current flowing through it is controlled by a voltage applied to a p-type silicon 5. Accordingly, an electron current emitted from an electron-emitter 1 is also controlled by this transistor, and by setting up an operation region of this transistor in a saturation current region, nonuniformity of electron emissions from electron-emitters can be improved. Even when a portion of cathodes are damaged, damages are not magnified to that of a whole apparatus, and a life of a field emission cathode can be prolonged.
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Patent Agency Ranking
公开(公告)号：DE69303101D1
公开(公告)日：1996-07-18
申请号：DE69303101
申请日：1993-03-26
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO , YAMADA KEIZO , IMURA HIRONORI
Abstract: Disclosed is a cold cathode (5) which has an emitter (2) formed in the center portion (6) where ion bombardment is likely to occur, and a gate (4) formed partially thicker, or which has a metal layer with the same potential as the emitter (2) and a high melting point, formed in the center portion (6) of the cathode. Therefore, even bombardment of positive ions at the center portion (6) of the cold cathode (5) will not affect the electron emission, thereby ensuring an always stable cathode current or electron beam. Further, as the cold cathode (5) is designed to prevent the deterioration of the insulation between the emitter (2) and gate (4), abrupt stopping of the electron emission hardly occurs. Therefore, an electron tube using this cold cathode (5) has a stable function and high reliability.
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公开(公告)号：DE69709817D1
公开(公告)日：2002-02-28
申请号：DE69709817
申请日：1997-09-29
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO
Abstract: In a field emission cathode type electron gun, a plurality of cathode segments and a plurality of gate control circuits (5-1, 5'-1) are provided. Each of the gate control circuits is connected to one of the cathode segments. Each of the cathode segments includes a cathode electrode, a gate electrode (14-1, 14-2, ...), an insulating layer therebetween, and a plurality of cone-shaped emitters (15) formed within openings perforated in the gate electrode and the insulating layer. Each of the gate control circuits detects a current flowing through one of the cathode segments and controlling a voltage of the gate electrode of the respective cathode segments in accordance with the detected current, so that the detected current is brought close to a definite value.
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8.发明专利
公开(公告)号：FR2790594A1
公开(公告)日：2000-09-08
申请号：FR0002233
申请日：2000-02-23
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO , KANAMOTO TAKASHI , TAKAHASHI MASAAKI
IPC: H01J23/06 , H01J3/02 , H01J3/20 , H01J23/065 , H01J25/34
Abstract: Electron gun (101) comprises cathode matrix with field emission (1), concentration electrode (3), anode electrode (4), magnetic field emitter (9), and support for cathode (2), holding in place cathode matrix. Emitter is made with magnets (7) and polar parts (8). Support comprises section made with ferromagnetic material.
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公开(公告)号：DE69303101T2
公开(公告)日：1997-01-16
申请号：DE69303101
申请日：1993-03-26
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO , YAMADA KEIZO , IMURA HIRONORI
Abstract: Disclosed is a cold cathode (5) which has an emitter (2) formed in the center portion (6) where ion bombardment is likely to occur, and a gate (4) formed partially thicker, or which has a metal layer with the same potential as the emitter (2) and a high melting point, formed in the center portion (6) of the cathode. Therefore, even bombardment of positive ions at the center portion (6) of the cold cathode (5) will not affect the electron emission, thereby ensuring an always stable cathode current or electron beam. Further, as the cold cathode (5) is designed to prevent the deterioration of the insulation between the emitter (2) and gate (4), abrupt stopping of the electron emission hardly occurs. Therefore, an electron tube using this cold cathode (5) has a stable function and high reliability.
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10.发明专利
公开(公告)号：JPH08171880A
公开(公告)日：1996-07-02
申请号：JP31442394
申请日：1994-12-19
Applicant: NEC CORP
Inventor： MAKISHIMA HIDEO
IPC: G21K5/04 , G03F7/20 , H01J37/073 , H01J37/147 , H01J37/305 , H01L21/027
Abstract: PURPOSE: To shorten exposure time and facilitate structure and control of an electronic optical system and a negative electrode by forming a shape of an electron emission region of a desired cold cathode array by an electron beam sectional shape control means and forming electron beams having rectangular and polygonal sections. CONSTITUTION: When voltages 50V and -50V are applied on a terminal H1 and a terminal V1 respectively, voltage 100V is applied between an emitter 26 and a gate electrode 24 in a part where stripes 22-1 and 24-1 intersect each other and electrons are emitted frame the tip of the emitter 26. In the other parts, voltage between the emitter 26 and the gate electrode 24 is held at 50V so that electrons are not emitted. In the same way, voltages +50V and -50V are applied on the terminals among terminals H1, -H5 and the terminals among terminals V1-V5 respectively, electrons are emitted from a part where electrodes 24, 22 intersect each other in the inside of the electrodes to which selected terminals are connected. A diode 27 is thus connected to among the terminals so that, when an arbitrary electrode is selected, voltage is applied on all the electrodes in its inside and control from the outside is extremely facilitated.
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