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公开(公告)号:JPS6478255A
公开(公告)日:1989-03-23
申请号:JP23594587
申请日:1987-09-19
Applicant: NISSHA PRINTING
Inventor: ISHIBASHI TATSUO , HIRAMA YOSHINORI , HASHIMOTO TAKAO , MEN RIYOUMEI
IPC: G03C1/00 , G03F1/00 , G03F1/56 , H01L21/027
Abstract: PURPOSE:To obtain a photomask material high in durability, good in edge sharpness, high in resolution, and small in surface reflection by forming a specified thin transparent porous film containing photosensitive silver halide on a transparent support. CONSTITUTION:The 1-20mum thin transparent porous film 2 made of an inorganic oxide containing silver halide is formed by a sol-gel method on the transparent support 1 made of soda glass or the like. The layer 2 is formed by coating the support 1 with an aqueous solution of a compound represented by formula (MOR1)m(OR2)nXpYq, (M is an element, such as Mg, each of R1 and R2 is H or the like, and each of X and Y is H or the like), hydrolyzing it at normal temperature or near it, and then, heating it, thus permitting the obtained photomask material to be high in durability, good in edge sharpness, high in resolution, and small in surface reflection.
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公开(公告)号:JPH02260691A
公开(公告)日:1990-10-23
申请号:JP8325789
申请日:1989-03-31
Applicant: NISSHA PRINTING
Inventor: HIRAMA YOSHINORI , ISHIBASHI TATSUO
IPC: H05K3/18
Abstract: PURPOSE:To improve plating nucleuses in uniform dispersion after chemical reduction so as to enable the formation of a fine pattern by a method wherein an organic metal compound or an organic metal complex of a plating nucleus precursor is dispersed into a solution which contains prepolymer. CONSTITUTION:An organic metal compound or an organic metal complex, a photocuring prepolymer solution, and an organic solvent are mixed to form a photosensitive ink, it is applied onto an insulating board, and a photosensitive ink layer is exposed to light for the formation of a circuit pattern. Not only the non-exposed part of the ink layer is removed by dissolution with a developing solution but also the surface of the exposed part of the ink layer is roughened at the same time. Then, the roughened ink layer is processed with a reluctant to turn the organic metal compound or the organic metal complex dispersed in the ink into plating nucleuses, and a metal layer is formed on the ink layer by dipping the board into electroless plating bath. By this setup, plating nucleuses are high in uniform dispersion, so that a fine pattern can be formed.
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公开(公告)号:JPH0254778A
公开(公告)日:1990-02-23
申请号:JP20656588
申请日:1988-08-19
Applicant: NISSHA PRINTING
Inventor: HIRAMA YOSHINORI , ISHIBASHI TATSUO
Abstract: PURPOSE:To produce an image plate having heat resistance and weatherability by forming a porous inorg. transparent layer on a substrate, providing a resist layer thereon, chemical-plating the surface with a metal nobler than copper, and then removing the metallic-luster part and the resist layer. CONSTITUTION:The inorg. transparent layer 2 of a porous inorg. material is formed on the substrate 1 of glass, ceramic, metal, etc. The layer 2 is obtained by applying a sol of the compd. expressed by the general formula M(OR1)m(OR2)nXpYq [M is Mg, Ca, etc., R1 and R2 are H, each group of alkyl, and acyl, X and Y are H, Cl, and hydroxyl group, and (m)-(q) are an integer of 0-8], and calcining the sol. The resist layer 5 is then formed thereon, and the surface is chemical-plated with a metal nobler than copper such as Au, Ag, Pd, Pt, Rh, or Ru. As a result, the inside of the transparent layer 2 is plated to form a black layer 3. Then, the metallic-luster part 4 and the resist layer 5 are removed. By this method, a high quality image plate having a image such as photograph formed on the substrate 1, consisting of the patterned black layer 3 and having heat resistance and weatherability is obtained.
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公开(公告)号:JPH07117608B2
公开(公告)日:1995-12-18
申请号:JP18479588
申请日:1988-07-25
Applicant: NISSHA PRINTING
Inventor: HIRAMA YOSHINORI , ISHIBASHI TATSUO
IPC: G02B5/20 , G02F1/1335
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公开(公告)号:JPH0234803A
公开(公告)日:1990-02-05
申请号:JP18479588
申请日:1988-07-25
Applicant: NISSHA PRINTING
Inventor: HIRAMA YOSHINORI , ISHIBASHI TATSUO
IPC: G02B5/20 , G02F1/1335
Abstract: PURPOSE:To improve surface smoothness and light shieldability by fixing dyes to an inorg. transparent layer consisting of a porous inorg. material formed on a transparent substrate to form color filters and chemically plating a metal nobler than copper to the spacings between the color filters to form black mask parts. CONSTITUTION:The inorg. transparent layer 2 is formed on the surface of the transparent substrate 1 and the color filters 3 are formed by dyeing the transparent layer 2 with the dyes. Spacings are previously provided between the respective color patterns to allow the formation of the black mask parts 4 in the later stage. The black mask parts 4 are formed at the boundaries of the respective colors of the color filters 3 by chemical plating of the metal nobler than the copper. The color filter which has no steps on the color filter surface and has the excellent smoothness and light shieldability is obtd. in this way.
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公开(公告)号:JP2567626B2
公开(公告)日:1996-12-25
申请号:JP23594587
申请日:1987-09-19
Applicant: NISSHA PRINTING
Inventor: ISHIBASHI TATSUO , HIRAMA YOSHINORI , HASHIMOTO TAKAO , MEN RYOMEI
IPC: G03C1/00 , G03F1/00 , G03F1/56 , H01L21/027 , G03F1/08
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公开(公告)号:JPH0561354B2
公开(公告)日:1993-09-06
申请号:JP20656588
申请日:1988-08-19
Applicant: NISSHA PRINTING
Inventor: HIRAMA YOSHINORI , ISHIBASHI TATSUO
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公开(公告)号:JPH0265728A
公开(公告)日:1990-03-06
申请号:JP21755288
申请日:1988-08-31
Applicant: NISSHA PRINTING
Inventor: HIRAMA YOSHINORI
IPC: A01G1/00
Abstract: PURPOSE:To obtain the subject material capable of readily grow spore plant such as moss or fern without losing quality feeling of supporting body by coating the surface of supporting body with an aqueous solution containing specific compound mixed with organic fine powder larger than granule diameter of spore. CONSTITUTION:An aqueous solution containing a compound expressed by the formula (M is Mg, Ca, Zr, Ti, Hf, Ge, Y, Al, Ga, Sn or Si; R1 and R2 are H, alkyl or acyl; X and Y are H, Cl or OH; m, n, p and q are 0-3; m+n+p+q is equal to valence of M) mixed with organic fine powder larger than granule diameter of spore 4 is coated on the surface of a supporting body 1 and heated, then a porous membrane 2 composed of at least inorganic oxide having fine pores 3 of inner diameter larger than granule diameter of spore is provided on the surface of the supporting body 1 to afford the aimed material. Besides, natural stone, artificial stone, ceramic, heat-resistant resin, glass or metal is preferable as the supporting body1.
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公开(公告)号:JPH01302223A
公开(公告)日:1989-12-06
申请号:JP13221188
申请日:1988-05-30
Applicant: NISSHA PRINTING
Inventor: HIRAMA YOSHINORI , ISHIBASHI TATSUO
IPC: C23C18/08 , C23C18/12 , C23C18/16 , C23C18/31 , C23C18/42 , C23C18/44 , C23C18/52 , G02F1/133 , G02F1/1335 , G03F1/00 , G09F9/00
Abstract: PURPOSE:To obtain a light shielding film having smooth surface and black light shielding zones having high light shielding effect and to provide a process for producing said light shielding film by forming the black zones on specified parts of an inorganic transparent layer consisting of a porous inorganic material formed on a transparent base body by plating chemically with a nobler metal than Cu. CONSTITUTION:A transparent base body 1 having an inorganic transparent layer 2 consisting of a porous inorganic material formed thereon is plated chemically by dipping the base body 1 in a chemical plating bath of a nobler metal than Cu, and black zones 3 are obtd. by removing an area having metallic luster. A sol/gel method is utilized pref. for forming the inorganic transparent layer 2. Namely, the inorganic transparent layer 2 is obtd. by coating a sol formed from a compd. expressed by the formula I, and then calcining. M in the formula I is an element selected from a group consisting of Mg, Ca, Zr, Ti, etc. Each R1 and R2 is an H atom, alkyl group, or acyl group; each X and Y is an H atom, Cl atom, or an OH group; each m, n, p, and q is zero or an integer 1-8 wherein m+n+p+q is equal to a valency of M.
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公开(公告)号:JPH01250948A
公开(公告)日:1989-10-05
申请号:JP7979388
申请日:1988-03-30
Applicant: NISSHA PRINTING
Inventor: MASAKI KENICHI , ISHIBASHI TATSUO , HIRAMA YOSHINORI
IPC: G02B5/20 , G02F1/1335 , G03C5/46
Abstract: PURPOSE:To improve the hardness, the smoothness and the durability of the title plate by mounting a transparent porous thin film composed of an inorg. oxide on a supporting body, and by incorporating an inorg. dye 4 formed by processing a silver image obtd. by photographically developing the image plate, with a red prussiate solution and a transition metal salt solution, in the fine poles of the image plate. CONSTITUTION:The transparent porous thin film 2 composed of the inorg. oxide is mounted on the supporting body 1 according to a sol-gel method, and a silver halide is incorporated in the microfine poles 3 of the porous thin film 2, and steps of exposing, developing, processings with the red prussiate and the transition metal salt solutions in this order, are repeated at (n) times ((n)>=0, (n) is an integer). And then, the inorg. dye 4 formed by the steps of exposure, development, and the processings with the red prussiate and the transition metal salt solutions, and fixing, washing and drying processings in this order, or by the steps of the exposure, developing, and the processings of the red prussiate and the transition metal salt solutions, washing and drying processings in this order is incorporated in the fine poles of the porous thin film. Thus, the surface hardenness, the surface smoothness and the durability of the plate are improved.
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