公开(公告)号：WO2004072705A1

公开(公告)日：2004-08-26

申请号：PCT/US2003/035890

申请日：2003-11-12

Applicant: NORTHROP GRUMMAN CORPORATION

Inventor： STEWART, Robert, E. ,  CHERBETTCHIAN, Agop, H. ,  FERSHT, Samuel ,  HALL, David, B.

IPC: G02B6/35

CPC classification number: G02B6/358 ,  B81B3/0024 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/051 ,  B81B2203/053 ,  G02B6/3512 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/3576 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/0866 ,  H01H2001/0042

Abstract: A bi-stable micro-actuator is formed from a first and a second silicon-on-insulator wafer fused together at an electrical contact layer. A cover with a V-groove defines an optical axis. A collimated optical signal source in the V-groove couples an optical signal to an optical port in the V-groove. A mirror surface on a transfer member blocks or reflects the optical signal. The transfer member has a point of support at the first and second end. An expandable structure applies a compressive force between the first and second point of support of the transfer member along a compressive axis to hold the transfer member in a bowed first state or a bowed second state. A control signal applied to a heating element in the expandable structure reduces the compressive force, switching the transfer member to a second state.

Abstract translation: 双稳态微致动器由在电接触层处熔合在一起的第一和第二绝缘体上硅晶片形成。 具有V形槽的盖子定义了光轴。 V沟槽中的准直光信号源将光信号耦合到V沟槽中的光端口。 转印部件上的镜面阻挡或反射光信号。 传送构件在第一和第二端具有支撑点。 可膨胀结构沿着压缩轴线在转移构件的第一和第二支撑点之间施加压缩力，以将转移构件保持在弯曲的第一状态或弓形的第二状态。 施加到可膨胀结构中的加热元件的控制信号减小了压缩力，将转印构件切换到第二状态。

公开(公告)号：WO2003083912A3

公开(公告)日：2003-10-09

申请号：PCT/US2003/009169

申请日：2003-03-25

Applicant: NORTHROP GRUMMAN CORPORATION

Inventor： STEWART, Robert, E.

IPC: H01L21/18

Abstract: A method of field-assisted fusion bonding produces multiple-layer devices. Contacts (301, 303, 305, 307, 309) are placed at various points along different surfaces of a combination of two or more wafers (201, 203, 205, 501, 503, 505, 801, 803). An electric field is applied to the contacts (301, 303, 305, 307, 309), thereby creating an electrostatic attractive force between the wafers (201, 203, 205, 501, 503, 505, 801, 803). The temperature of the wafer combination is elevated to a fusion bonding temperature while the electric field is applied.

公开(公告)号：WO2003103048A1

公开(公告)日：2003-12-11

申请号：PCT/US2003/016136

申请日：2003-05-21

Applicant: NORTHROP GRUMMAN CORPORATION

Inventor： STEWART, Robert, E.

IPC: H01L25/065

CPC classification number: B81C1/00238 ,  B81B7/0054 ,  B81B2207/07 ,  B81C2203/0792 ,  H01L23/3114 ,  H01L23/49816 ,  H01L23/49827 ,  H01L23/4985 ,  H01L2924/0002 ,  H01L2924/1433 ,  H01L2924/00

Abstract: An apparatus in one example includes a die (102) such as a micro-electro-mechanical-system (MEMS) with at least first and second the first portion of the die mechanically and electrically circuit board (310). The apparatus includes an integrated circuit component (1220) mechanically and electrically connected with the second portion of the die. Upon operation the die servers to generate one or more electrical signals that are passed to the integrated circuit component.

Abstract translation: 在一个示例中的装置包括具有至少第一和第二模具机械和电路板（310）的第一部分的微机电系统（MEMS）的管芯（102）。 该装置包括与模具的第二部分机械地和电连接的集成电路部件（1220）。 在操作模具服务器以产生传递到集成电路部件的一个或多个电信号。

公开(公告)号：WO2003029754A1

公开(公告)日：2003-04-10

申请号：PCT/US2002/019579

申请日：2002-06-20

Applicant: NORTHROP GRUMMAN CORPORATION

Inventor： STEWART, Robert, E. ,  WYSE, Stanley, F.

IPC: G01C19/56

CPC classification number: G01P15/125 ,  G01C19/5747 ,  G01P15/097

Abstract: An integrated rate and accelerometer sensor includes two counter vibrating tuned accelerometers formed in a single substantially planar silicon body to form the sensing element. The two vibrating accelerometers are interleaved in a manner that places their respective centers of mass in the same line parallel to the direction of the vibration and has the centers of percussion of the two (pendulum) proof masses coincident. A phase insensitive quadrature nulling method is utilized for each of the two vibrating accelerometers. The sensor structure utilizes Pyrex for the top and bottom covers. Metalized electrodes, feedthrus and contact pads are also utilized for the sensing element, instead of interlayer wire bonds.

Abstract translation: 集成速率和加速度传感器包括形成在单个基本上平面的硅体中的两个计数器振动调谐加速度计，以形成感测元件。 两个振动加速度计的交错方式是将它们各自的质量中心放置在平行于振动方向的相同的线上，并且两个（摆锤）的质量块的冲击中心一致。 对于两个振动加速度计中的每一个使用相位不敏感的正交归零方法。 传感器结构采用Pyrex作为顶盖和底盖。 金属化电极，馈料和接触垫也用于感测元件，而不是层间引线接合。

公开(公告)号：WO2005069016A1

公开(公告)日：2005-07-28

申请号：PCT/US2004/041853

申请日：2004-12-13

Applicant: NORTHROP GRUMMAN CORPORATION ,  STEWART, Robert, E.

Inventor： STEWART, Robert, E.

IPC: G01P15/00

CPC classification number: G01P15/18 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828 ,  G01P2015/0831

Abstract: An apparatus in one example comprises a first proofmass employable to sense a first acceleration along a first input axis; a second proofmass employable to sense a second acceleration along a second input axis; and a third proofmass employable to sense a third acceleration along a third input axis. The first input axis, the second input axis, and the third input axis are substantially orthogonal. The first proofmass, the second proofmass, and the third proofmass are substantially coplanar. Cavities in the proofmasses serve to locate the center of gravity. The input axes may be located such that they intersect at a common point and are orthogonal to each other.

Abstract translation: 一个示例中的装置包括可用于感测沿着第一输入轴的第一加速度的第一校正; 第二校正可用于感测沿着第二输入轴的第二加速度; 以及可用于感测沿着第三输入轴的第三加速度的第三校对。 第一输入轴，第二输入轴和第三输入轴基本上是正交的。 第一个校对，第二个校对和第三个校对是基本共面的。 证据中的穴位用于确定重心。 输入轴可以被定位成使得它们在公共点处相交并且彼此正交。

公开(公告)号：WO2004094951A1

公开(公告)日：2004-11-04

申请号：PCT/US2004/012496

申请日：2004-04-21

Applicant: NORTHROP GRUMMAN CORPORATION ,  STEWART, Robert, E.

Inventor： STEWART, Robert, E.

IPC: G01C19/56

CPC classification number: G01C19/5656

Abstract: A drive component that comprises a drive axis, a pendulous sensor component that comprises a center of mass, and a hinge component that comprises a rotation axis of an electromechanical system. The drive component makes a determination of a drive direction. Upon the determination of the drive direction, the drive component determines an alignment of a pendulous axis, that intersects the center of mass of the pendulous sensor component and the rotation axis of the hinge component, with the drive axis of the drive component. The drive component and the pendulous sensor component are coupled with the hinge component. A location of the hinge component causes the alignment of the pendulous axis to be substantially parallel with the drive direction of the drive component.

公开(公告)号：WO2003100856A1

公开(公告)日：2003-12-04

申请号：PCT/US2003/016137

申请日：2003-05-21

Applicant: NORTHROP GRUMMAN CORPORATION

Inventor： STEWART, Robert, E.

IPC: H01L23/48

CPC classification number: H01L23/49827 ,  H01L2924/0002 ,  Y10S73/04 ,  Y10T29/49004 ,  Y10T29/49128 ,  Y10T29/49139 ,  Y10T29/49144 ,  Y10T29/49165 ,  Y10T29/49222 ,  H01L2924/00

Abstract: An apparatus (100) in one example includes a compliant component (104, 106, 108, 110, 112, 114, 116, 118) for supporting an electrical interface component (120, 122, 124, 126, 128, 130, 132, 134) that serves to electrically and mechanically couple a die (102) with a separate layer. In one example, the compliant component, (104, 106, 108, 110, 112, 114, 116, 118) upon relative movement between the die (102) and the separate layer, serves to promote a decrease in stress in one or more of the die and the separate layer. The apparatus (100) in another example includes a compliant component (104, 106, 108, 110, 112, 114, 116, 118) for supporting an electrical interface component (120, 122, 124, 126, 128, 130, 132, 134) that serves to create an electrical connection between a die (102) and a separate layer. The compliant component (104, 106, 108, 110, 112, 114, 116, 118), upon relative movement between the die (102) and the separate layer, serves to promote maintenance of the electrical connection.

Abstract translation: 一个示例中的装置（100）包括用于支撑电接口部件（120,122,124,126,128,130,132,128）的柔性部件（104,106,108,110,112,114,116,118） 134），其用于将模具（102）与单独的层电连接和机械耦合。 在一个示例中，柔性部件（104,106,108,110,112,114,116,118）在模具（102）和分离层之间的相对运动时用于促进一个或多个 的模具和单独的层。 另一示例中的装置（100）包括用于支撑电接口部件（120,122,124,126,128,130,132,128）的柔性部件（104,106,108,110,112,114,116,118） 134），其用于在管芯（102）和单独层之间形成电连接。 当柔性部件（104,106,108,110,112,114,116,118）在模具（102）和分开的层之间相对运动时，用于促进电连接的维护。

公开(公告)号：WO2003010492A1

公开(公告)日：2003-02-06

申请号：PCT/US2002/022073

申请日：2002-06-04

Applicant: NORTHROP GRUMMAN CORPORATION

Inventor： STEWART, Robert, E. ,  WYSE, Stanley, F.

IPC: G01C19/56

CPC classification number: G01C19/5705 ,  G01C19/5755 ,  G01P15/14

Abstract: Quadrature error occurs in Corolis based vibrating rate sensors because of manufacturing flaws that permit the sensing element to oscillate either linearly along or angularly about an axis that is not orthogonal to the output axis. This create an oscillation along or about the output axis that is a component of the sensing element's vibration acceleration. This output axis oscillation is in phase with the driven acceleration of the sensing element and is called quadrature error since it is ninety degrees out of phase with the angular rate induced Coriolis acceleration. Rather than applying forces that reorient the axis of the driven vibration to be orthogonal to the output axis to eliminate the output axis oscillation, the present invention applies sinusoidal forces to the sensing element by means of a quadrature servo to cancel the output oscillation. In order to avoid the phase uncertainty associated with electronic modulation, the quadrature servo feeds back a DC signal that is modulated mechanically by means of an interdigitated variable area electrostatic forcer.

Abstract translation: 由于制造缺陷使得传感元件沿着或不沿着与输出轴正交的轴线呈线性或有角度地振荡，因此在Corolis基振动速率传感器中发生正交误差。 这将沿着或围绕作为感测元件的振动加速度的分量的输出轴产生振荡。 该输出轴振荡与传感元件的驱动加速度相同，称为正交误差，因为它与角速度引导的科里奥利加速度相差90度。 本发明不是施加使驱动振动轴正交于与输出轴正交以消除输出轴振动的力，而是通过正交伺服将正弦力施加到感测元件以消除输出振荡。 为了避免与电子调制相关的相位不确定性，正交伺服器通过交叉指向的可变区域静电激励器反馈被机械调制的DC信号。

公开(公告)号：EP1512176B1

公开(公告)日：2010-07-07

申请号：EP03756194.1

申请日：2003-05-21

Applicant: NORTHROP GRUMMAN CORPORATION

Inventor： STEWART, Robert, E.

IPC: H01L25/065 ,  H01L23/498

CPC classification number: B81C1/00238 ,  B81B7/0054 ,  B81B2207/07 ,  B81C2203/0792 ,  H01L23/3114 ,  H01L23/49816 ,  H01L23/49827 ,  H01L23/4985 ,  H01L2924/0002 ,  H01L2924/1433 ,  H01L2924/00

公开(公告)号：EP1636546A1

公开(公告)日：2006-03-22

申请号：EP04755362.3

申请日：2004-06-17

Applicant: NORTHROP GRUMMAN CORPORATION

Inventor： STEWART, Robert, E. ,  HEEG, Suzanne, J. Northrop Grumman Corporation

IPC: G01C19/56

CPC classification number: G01C19/5719

Abstract: An apparatus comprising one or more heating elements or one ore more electrostatic elements and one or more elongated beams. The heating element or the electrostatic element is coupled with the elongated beam and induces a time-varying thermal gradient in or a time-varying voltage that creates an electrostatic force on the elongated beam to cause one or more oscillations of one or more of the one or more elongated beams.