Abstract:
An energy storage device (300), the device (300) comprising a substrate (102), a steric structure (104) formed on and/or in a main surface (106) of the substrate (102), a current collector stack (202) formed on the steric structure (104), and an electric storage stack (302) formed on the current collector stack (202), wherein side walls (108) of the steric structure (104) and the main surface (106) of the substrate (102) enclose an acute angle of more than 80 degrees.
Abstract:
The invention relates to an semiconductor device comprising a first surface and neighboring first and second electric elements arranged on the first surface, in which each of the first and second elements extends from the first surface in a first direction, the first element having a cross section substantially perpendicular to the first direction and a sidewall surface extending at least partially in the first direction, wherein the sidewall surface comprises a first section and a second section adjoining the first section along a line extending substantially parallel to the first direction, wherein the first and second sections are placed at an angle with respect to each other for providing an inner corner wherein the sidewall surface at the inner corner is, at least partially, arranged at a constant distance R from a facing part of the second element for providing a mechanical reinforcement structure at the inner corner.
Abstract:
The present invention relates to a modified rechargeable Li- ion solid- state battery design that is preferably integrated in 3D silicon. The use of photolithography in the manufacture of solid state batteries, such as lithium cells is known, as is the use of various etching techniques such as chemical, ion beam, plasma and sputter etching in the manufacture of such batteries. In particular the use of PVD, CVD and plasma CVD deposition processes and sputter etching to reduce vertical direction stresses during expansion and contraction during charge and discharge is disclosed. Lithium all- so lid- state batteries are based upon the reversible exchange of lithium ions between two electrodes (anode and cathode). These electrodes are separated by a solid-state electrolyte, that allows for lithium ion diffusion-migration and that prevents electron transport.
Abstract:
The present invention relates to an electric low-pass filter, comprising a layer stack formed by a first electrode layer, a first dielectric layer adjacent to the first electrode layer, a second dielectric layer adjacent to the first dielectric layer, and a second electrode layer adjacent to the second dielectric layer. The first dielectric layer is made of a material and has a layer thickness, which in combination allow a tunellingof first charge carriers of a first charge-carrier polarity from the first electrode layer through the first dielectric layer to an interface between the first and second dielectric layers, under application of a first tunneling voltage of a first voltage polarity between the first and second electrode layers, and a tunneling of second charge carriers of an opposite second charge-carrier polarity from the first electrode layer through the first delectric layer to the interface between the first and second dielectric layers under application of a second tunneling voltage of a second voltage polarity between the first and second electrodes, which second voltage polarity is oppsosite to the first voltage polarity. The second charge carriers have a second charge-carrier mobility in the first dielectric material, which is lower than the first charge-carrier mobility of the first charge carriers.
Abstract:
The present invention relates to a method of manufacturing a solid- state battery with a high flexibility. The method comprises the steps of: forming an arrangement of battery cells (2) on a first substrate layer and providing a barrier layer (5) between the battery cells and the first substrate layer, applying on the arrangement of battery cells on the side not covered by the first substrate layer a second substrate layer (13), and removing the first substrate layer completely from the barrier layer, applying on the barrier layer a third substrate layer (14).The present invention further refers to the solid-state battery manufactured according to the method, as well as to a device, including the solid-state battery.
Abstract:
The present invention relates to a modified rechargeable Li- ion solid- state battery design that is integrated in 3D silicon. Currently, several designs of 2D or 3D integrated batteries have already been described and disclosed in the prior art. Novel concepts (3D integration) of all- so lid- state rechargeable thin film Li-ion batteries were previously described in patent WO2005/O27245A2. These energy storage devices can be advantageously used as a power supply for many applications such as OLED devices, presence detection, implantables, smart cards and hearing aids. One of the problems associated with this type of solid-state batteries is the volume expansion/contraction of the active electrodes (anode and cathode) resulting from Lithium intercalation into/from the aforementioned electrodes. This volume change will inevitably cause stress and thus possibly compromise the mechanical stability of the device, resulting in lifetime degradation. Especially in high aspect ratio structures, like trenches, pillar or holes, high-curvature regions will cause problems. To reduce this volume expansion the active materials, comprising the anode and cathode, must be carefully chosen (chemical electrode matching) and their geometries matched (geometric electrode matching).
Abstract:
A charge-pump capacitive DC-DC converter (200) is disclosed, which includes a reconfigurable charge-pump capacitor array. The DC-DC converter is configured to provide a continuously variable ratio between its input voltage (V in ) and its output voltage (V out ), by means of at least one of the at least one charge-pump capacitors (C21, C22) forming the reconfigurable array being a variable capacitor. In the embodiments, the one or more variable capacitors (C21, C22) may be a ferroelectric capacitor, an anti-ferroelectric capacitor, or other ferrioc capacitor. The DC-DC converter (200) may provide a bias circuit to the capacitor or capacitors, and may further provide a control loop (220, 230). Alternatively, the capacitor may provide a degree of self-control.
Abstract:
Therefore, a method of plating wafer via holes in a wafer is provided. A substrate (200) having a first and second side and a plurality of wafer via holes (210) is provided. Each via hole comprises a first and second end extending between the first and second side. A first seed layer (220) is deposited on the first side of the 5 wafer (200). A foil (250) is applied on the first seed layer (220) of the wafer closing the first ends of the plurality of wafer via holes (210). The second side of the wafer (200) is electro-chemically plated and the foil (250) is removed.
Abstract:
A charge-pump capacitive DC-DC converter (200) is disclosed, which includes a reconfigurable charge-pump capacitor array. The DC-DC converter is configured to provide a continuously variable ratio between its input voltage (V in ) and its output voltage (V out ), by means of at least one of the at least one charge-pump capacitors (C21, C22) forming the reconfigurable array being a variable capacitor. In the embodiments, the one or more variable capacitors (C21, C22) may be a ferroelectric capacitor, an anti-ferroelectric capacitor, or other ferrioc capacitor. The DC-DC converter (200) may provide a bias circuit to the capacitor or capacitors, and may further provide a control loop (220, 230). Alternatively, the capacitor may provide a degree of self-control.
Abstract:
The invention relates to an semiconductor device comprising a first surface and neighboring first and second electric elements arranged on the first surface, in which each of the first and second elements extends from the first surface in a first direction, the first element having a cross section substantially perpendicular to the first direction and a sidewall surface extending at least partially in the first direction, wherein the sidewall surface comprises a first section and a second section adjoining the first section along a line extending substantially parallel to the first direction, wherein the first and second sections are placed at an angle with respect to each other for providing an inner corner wherein the sidewall surface at the inner corner is, at least partially, arranged at a constant distance R from a facing part of the second element for providing a mechanical reinforcement structure at the inner corner.