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公开(公告)号：DE60045501D1
公开(公告)日：2011-02-24
申请号：DE60045501
申请日：2000-02-04
Applicant: NXP BV , ST MICROELECTRONICS SA
Inventor： FROMENT BENOIT , GAYET PHILLIPE , VAN DER VEGT ERIK
IPC: H01L21/28 , H01L21/768 , H01L21/285 , H01L21/3205 , H01L23/52 , H01L23/522 , H01L23/532
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