Abstract:
A print head comprises a pressure chamber in fluid communication with a nozzle and an actuator structure in operative communication with the pressure chamber for generating a pressure wave in the pressure chamber. The actuator structure comprises a membrane, wherein a first surface of the membrane forms a flexible wall of the pressure chamber and a piezo actuator, wherein the piezo actuator is arranged on a second surface of the membrane, the second surface being opposite of the first surface, such that the membrane is deformed at the position of the piezo actuator upon actuation of the piezo actuator. In the print head, the membrane is pivotably clamped between a first structure layer and a second structure layer such that the membrane pivots at the location of clamping upon deformation of the membrane due to actuation of the piezo actuator.
Abstract:
A substrate plate is provided for at least one MEMS device to be mounted thereon. The MEMS device has a certain footprint on the substrate plate, and the substrate plate has a pattern of electrically conductive leads to be connected to electric components of the MEMS device. The pattern forms contact pads within the footprint of the MEMS device and includes at least one lead structure that extends on the substrate plate outside of the footprint of the MEMS device and connects a number of the contact pads to an extra contact pad. The lead structure is a shunt bar that interconnects a plurality of contact pads of the MEMS device and is arranged to be removed by means of a dicing cut separating the substrate plate into a plurality of chip-sized units. At least a major part of the extra contact pad is formed within the footprint of one of the MEMS devices.
Abstract:
A droplet ejection device includes a pressure chamber; a nozzle orifice arranged in fluid connection with the pressure chamber; an actuator system for generating a pressure wave in a liquid present in the pressure chamber; and an obstruction member arranged in the pressure chamber in a position opposite to the nozzle orifice. The obstruction member comprises a first surface facing the nozzle orifice and rigidly coupled to a wall of the pressure chamber via a support. The support is arranged near the first surface of the obstruction member. The droplet ejection device according to the present invention may further comprise a structured nozzle inflow means which provides a gradual transition from the hollow shaped liquid passage to the nozzle orifice. The droplet ejection device prevents or at least mitigates air entrapment in dead volumes present in the interior of the droplet ejection device.
Abstract:
A MEMS chip having at least two chip components bonded together by means of an adhesive layer that is applied to at least one of two mating bonding surfaces of the two components, wherein a pattern of finely distributed micro-cavities is formed in at least one of the two mating bonding surfaces, said micro-cavities being arranged to accommodate a major part of the adhesive.
Abstract:
A method of forming a nozzle of a fluid ejection device, the nozzle having a straight mouth portion and a cavity portion, wherein the mouth portion is formed in a bottom surface of the substrate, and, after passivating the walls of the mouth portion, a wet etch process is applied from the bottom surface of the substrate for forming a part of the cavity portion with walls that diverge from the mouth portion, characterized in that a wet etch process is also applied from a top surface of the substrate for forming a part of the cavity portion which diverges towards the bottom surface and merges with the part that is etched from the bottom surface.
Abstract:
An ink jet print head, having a pressure generation chamber arranged for being in communication with a print head nozzle and an actuator membrane for delimiting the pressure generation chamber. The actuator membrane has a substrate and a piezoelectric actuator provided on the substrate, said piezoelectric actuator having a lower electrode, an upper electrode and at least one piezoelectric layer arranged between the lower electrode and the upper electrode; the substrate and the upper electrode are arranged on opposite sides of the piezoelectric layer, and the upper electrode has a Titanium-Tungsten film.