Abstract:
PROBLEM TO BE SOLVED: To solve an economic problem that can be used for a manufacturing system based on an arc vaporization source.SOLUTION: The invention relates to a method for surface treatment of work pieces in a vacuum treatment system having a first electrode embodied as a target, which is part of the arc vaporization source; by means of the first electrode, an arc is operated with an arc current and vaporizes material from the target that is deposited at least partially and intermittently onto the work pieces and having a second electrode that is embodied as a work piece holder and, together with the work pieces, constitutes a bias electrode; by means of a voltage supply, a bias voltage is applied to the bias electrode, with the bias voltage applied so that it is matched to the arc current such that essentially, no material build-up takes place on the surface.
Abstract:
PROBLEM TO BE SOLVED: To provide an insulation layer deposition method and low temperature coating method.SOLUTION: Energy supply is performed by direct current and pulse or alternative curent at the same time for electrical spark discharge that is fired or actuated on a surface of a target of an arc source. In addition, the present invention is related to an arc source in which the target is connected to a power source that is at least a pulsed high current source (18, 18') and another power source (13', 18''), or a power source (21, 21', 22) that is designed by combinational circuit technology.
Abstract:
The invention relates to a method for operating a pulsed discontinuous spark discharge. The spark is fed via a capacitor. Between the pulses there are switched-off time intervals during which no spark current flows. Within the pulses, that is to say during the switched-on time intervals, the supply of charge is stopped upon a current threshold being reached and is restarted, with the result that subpulses occur within the pulses. The time intervals and subpulses are chosen according to the invention such that when the capacitor is switched on again, the spark discharge readily ignites again.
Abstract:
The present invention relates to a oated body comprising a body (1) with a body surface (3) and a coating system (20) deposited on at least a portion of the body surface (3), said coating system (20) comprising at least one hard friction reducing coating deposited as an outermost layer (9) which exhibits droplets (10) at its surface, characterized in that said outermost layer (9) comprises molybdenum copper nitride and/or molybdenum nitride and copper nitride, and at least some of the droplets (10) consist mainly of copper, preferably most of the largest droplets (10) consist mainly of copper.
Abstract:
The present invention relates to coated sliding parts having coating systems which allow better sliding performance under dry and/or under lubricated conditions. The coating systems according to the present invention being characterized by having an outermost layer which - is a smooth oxide-containing layer in case of sliding applications under lubricated conditions, or - is a self-lubricated layer comprising molybdenum nitride, in case of sliding applications under dry or lubricated conditions. is a self-lubricated layer with a structured surface comprising a multitude of essentially circular recesses with diameters of several micrometers or below, the recesses randomly distributed over the surface.
Abstract:
The invention provides a single or a multilayer PVD coated sharp edged cutting tool, which can at the same time exhibit satisfactory wear and thermochemical resistance as well as resistance to edge chipping. The cutting tool comprises a sintered body made of a cemented carbide, a CBN, a cermet or a ceramic material having a cutting edge with an edge radius Re, a flank and a rake face and a multilayer coating consisting of a PVD coating comprising at least one oxidic PVD layer covering at least parts of the surface of the sintered body. In one embodiment the edge radius Re is smaller than 40 µm, preferably smaller than or equal to 30 µm. The covered parts of the surface preferably comprise at least some parts of the sharp edge of the sintered body.
Abstract:
The invention relates to a method for removing carbon layers, in particular ta-C layers, from substrate surfaces of tools and components. The substrate to be de-coated is accordingly arranged on a substrate support in a vacuum chamber, the vacuum chamber is charged with at least one reactive gas assisting the evacuation of carbon in gaseous form and a low-voltage plasma discharge is created in the vacuum chamber to activate the reactive gas and hence assist the required chemical reaction or reactions to de-coat the coated substrate. The low-voltage plasma discharge is a dc low-volt arc discharge, the substrate surfaces to be de-coated are bombarded substantially exclusively with electrons and oxygen, nitrogen and hydrogen are used as reactive gas.
Abstract:
In order to produce zirconia-based layers on a deposition substrate, wherein reactive spark deposition using pulsed spark current and/or the application of a magnetic field that is perpendicular to the spark target are employed, a mixed target comprising elemental zirconium and at least one stabilizer is used, or a zirconium target comprising elemental zirconium is used, wherein in addition to oxygen, nitrogen is used as the reactive gas. As an alternative, it is also possible, combined with the use of the mixed target, to use nitrogen as the reactive gas in addition to oxygen.
Abstract:
The invention relates to a vacuum process system for surface-treating work pieces (3) using an arc evaporation source (5). Said system comprises a first electrode (5') connected to a DC power source (13) and a second electrode (3, 18, 20), disposed separately from the arc evaporation source (5). The two electrodes (5', 3, 18, 20) are operated while being connected to a single pulsed power supply (16).
Abstract:
The method for manufacturing a hydrogen permeation barrier comprises the steps of a) depositing on a substrate (SUB) a layer system (LS) comprising at least one layer (L1,L2,L3); characterized in that step a) comprises the step of b) depositing at least one hydrogen barrier layer (HPBL) comprising an at least ternary oxide. The apparatus comprises a sealable volume and a wall forming at least a portion of a boundary limiting said volume, wherein said wall comprises a hydrogen permeation barrier comprising a layer system (LS) comprising at least one layer, wherein said layer system comprises at least one hydrogen barrier layer (HPBL) comprising an at least ternary oxide. Preferably, said at least ternary oxide is substantially composed of Al, Cr and 0, and said depositing said at least one hydrogen barrier layer (HPBL) is carried out using a physical vapor deposition method, in particular a cathodic arc evaporation method. Preferably, step a) comprises depositing on said substrate at least one of : an adhesion layer (AdhL), a hydrogen storage layer (HStL), a protective layer (ProtL), in particular a thermal barrier layer (ThBL), a diffusion barrier layer (DBL), an oxidation barrier layer (OxBL), a chemical barrier layer (ChBL), a wear resistance layer (WRL). Excellent hydrogen permeation barrier properties can be achieved, and the layer system can be tailored as required by an envisaged application.