公开(公告)号：CA2543396A1

公开(公告)日：2005-12-29

申请号：CA2543396

申请日：2004-06-08

Applicant: OMNIPROBE INC

Inventor： MOORE THOMAS M ,  ANTHONY JOHN M

IPC: B01D59/44 ,  G01N23/22 ,  G02B21/32

公开(公告)号：WO2005123227A3

公开(公告)日：2006-12-14

申请号：PCT/US2004018206

申请日：2004-06-08

Applicant: OMNIPROBE INC ,  MOORE THOMAS M ,  ANTHONY JOHN M

Inventor： MOORE THOMAS M ,  ANTHONY JOHN M

IPC: G01N23/22 ,  B01D59/44 ,  G01N1/28 ,  G02B21/32

CPC classification number: G01N23/2204 ,  G02B21/32 ,  H01J2237/31745

Abstract: Disclosed is a method for analyzing the composition of a microscopic particle (100) resting on a first sample surface (110). The method comprises positioning a micro-manipulator probe (120) near the particle; attaching the particle to the probe (120); moving the probe (120) and the attached particle (100) away from the first sample surface (110); positioning the particle on a second sample surface (150); and, analyzing the composition of the particle on the second sample surface (150) by energy-dispersive X-ray analysis or detection of Auger electrons. The second surface (150) has a reduced or non-interfering background signal during analysis relative to the background signal of the first surface (110). Also disclosed are methods for adjusting potentials after its transfer and relocation to the second sample surface (150).

Abstract translation: 公开了一种用于分析搁置在第一样品表面（110）上的微观颗粒（100）的组成的方法。 该方法包括在微粒附近定位微机械手探针（120）; 将所述颗粒附着到所述探针（120）上; 将探针（120）和附着的颗粒（100）移离第一样品表面（110）; 将颗粒定位在第二样品表面（150）上; 以及通过能量色散X射线分析或俄歇电子的检测来分析第二样品表面（150）上的颗粒的组成。 第二表面（150）在分析期间相对于第一表面（110）的背景信号具有减小的或非干扰的背景信号。 还公开了用于在其转移和重新定位到第二样品表面（150）之后调节电位的方法。