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    METHOD FOR MANIPULATING MICROSCOPIC PARTICLES AND ANALYZING THE COMPOSITION THEREOF
    2.
    发明申请
    METHOD FOR MANIPULATING MICROSCOPIC PARTICLES AND ANALYZING THE COMPOSITION THEREOF 审中-公开
    操作微波颗粒的方法和分析其组成

    公开(公告)号：WO2005123227A3

    公开(公告)日：2006-12-14

    申请号：PCT/US2004018206

    申请日：2004-06-08

    Applicant: OMNIPROBE INC ,  MOORE THOMAS M ,  ANTHONY JOHN M

    Inventor： MOORE THOMAS M ,  ANTHONY JOHN M

    IPC: G01N23/22 ,  B01D59/44 ,  G01N1/28 ,  G02B21/32

    CPC classification number: G01N23/2204 ,  G02B21/32 ,  H01J2237/31745

    Abstract: Disclosed is a method for analyzing the composition of a microscopic particle (100) resting on a first sample surface (110). The method comprises positioning a micro-manipulator probe (120) near the particle; attaching the particle to the probe (120); moving the probe (120) and the attached particle (100) away from the first sample surface (110); positioning the particle on a second sample surface (150); and, analyzing the composition of the particle on the second sample surface (150) by energy-dispersive X-ray analysis or detection of Auger electrons. The second surface (150) has a reduced or non-interfering background signal during analysis relative to the background signal of the first surface (110). Also disclosed are methods for adjusting potentials after its transfer and relocation to the second sample surface (150).

    Abstract translation: 公开了一种用于分析搁置在第一样品表面（110）上的微观颗粒（100）的组成的方法。 该方法包括在微粒附近定位微机械手探针（120）; 将所述颗粒附着到所述探针（120）上; 将探针（120）和附着的颗粒（100）移离第一样品表面（110）; 将颗粒定位在第二样品表面（150）上; 以及通过能量色散X射线分析或俄歇电子的检测来分析第二样品表面（150）上的颗粒的组成。 第二表面（150）在分析期间相对于第一表面（110）的背景信号具有减小的或非干扰的背景信号。 还公开了用于在其转移和重新定位到第二样品表面（150）之后调节电位的方法。

    APPARATUS AND METHOD OF DETECTING PROBE TIP CONTACT WITH A SURFACE
    3.
    发明申请
    APPARATUS AND METHOD OF DETECTING PROBE TIP CONTACT WITH A SURFACE 审中-公开
    检测探头与表面接触的装置和方法

    公开(公告)号：WO2006050494A3

    公开(公告)日：2006-12-14

    申请号：PCT/US2005039940

    申请日：2005-11-03

    Applicant: OMNIPROBE INC ,  MOORE THOMAS M ,  ZAYKOVA-FELDMAN LYUDMILA

    Inventor： MOORE THOMAS M ,  ZAYKOVA-FELDMAN LYUDMILA

    IPC: G01J1/04 ,  H01J3/14

    CPC classification number: H01J37/22 ,  B82Y35/00 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2482 ,  H01J2237/28 ,  H01J2237/31745

    Abstract: We disclose an apparatus and method for detecting probe-tip (120) contact with a surface, generally inside a focused ion-beam instrument, where the probe tip (120) is attached to a capsule (130), and the capsule (130) is movably secured in a probe shaft (140). There is a fiber-optic cable (150) having a first end and a second end; a beam splitter (115) having first and second output ports; and a light source (100) connected to the beam splitter (115). The first output port of the beam splitter (115) is connected to the first end of the fiber-optic cable (150), and the second output port of the beam splitter (115) is connected to a photodiode (110). The second end of the fiber-optic cable (150) has a mirror (155) for reflecting incident light at approximately a ninety-degree angle to the axis of the optical path in the fiber-optic cable (150) and onto the capsule (130), so that the intensity of the light reflected back from the capsule (130) through the fiber-optic cable (150) is proportional to the deflection of the capsule (130) as the probe tip (120) makes contact with the surface.

    Abstract translation: 我们公开了一种用于检测探针尖端（120）与通常在聚焦离子束仪器内部的表面接触的装置和方法，其中探针尖端（120）连接到胶囊（130），并且胶囊（130） 可移动地固定在探针轴（140）中。 存在具有第一端和第二端的光纤电缆（150） 分束器（115），其具有第一和第二输出端口; 和连接到分束器（115）的光源（100）。 分束器（115）的第一输出端口连接到光缆（150）的第一端，分束器（115）的第二输出端口连接到光电二极管（110）。 光纤电缆（150）的第二端具有反射镜（155），用于以大约90度的角度将入射光反射到光纤电缆（150）中的光路的轴线上并且反射到胶囊上 从而当探针尖端（120）与表面（130）接触时，从胶囊（130）通过光纤电缆（150）反射回来的光的强度与胶囊（130）的偏转成比例 。

    METHOD AND APPARATUS FOR THE AUTOMATED PROCESS OF IN-SITU LIFT-OUT
    7.
    发明申请
    METHOD AND APPARATUS FOR THE AUTOMATED PROCESS OF IN-SITU LIFT-OUT 审中-公开
    用于自动提升自动化过程的方法和装置

    公开(公告)号：WO2006050495A3

    公开(公告)日：2008-08-14

    申请号：PCT/US2005039942

    申请日：2005-11-03

    Applicant: OMNIPROBE INC ,  MOORE THOMAS M ,  ZAYKOVA-FELDMAN LYUDMILA

    Inventor： MOORE THOMAS M ,  ZAYKOVA-FELDMAN LYUDMILA

    IPC: H01J37/26 ,  H01J37/304

    CPC classification number: H01J37/302 ,  B82Y15/00 ,  G01N1/32 ,  H01J37/20 ,  H01J37/22 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2482 ,  H01J2237/28 ,  H01J2237/30411 ,  H01J2237/30472 ,  H01J2237/31745

    Abstract: An apparatus for performing automated in-situ lift-out of a sample (150) from a specimen (125) includes a computer (100) having a memory with computer-readable instructions, a stage (120) for a specimen (125) and a nano-manipulator (130). The stage (120) and the nano-manipulator (130) are controlled by motion controllers (110) connected to the computer (100). The nano-manipulator (130) has a probe tip (140) for attachment to samples (150) excised from the specimen (125). The computer-readable instructions include instructions to cause the stage motion controllers (110) and the nano-manipulator motion controllers (110), as well as an ion-beam source (170), to automatically perform in-situ lift-out of a sample (150) from the specimen (125).

    Abstract translation: 用于从样本（125）进行样品（150）的自动原位取出的设备包括具有计算机可读指令的存储器的计算机（100），用于样本（125）的级（120）和 纳米操纵器（130）。 舞台（120）和纳米机械手（130）由连接到计算机（100）的运动控制器（110）控制。 纳米操纵器（130）具有用于附接到从样本（125）切除的样品（150）的探针尖端（140）。 所述计算机可读指令包括使所述载物台运动控制器（110）和所述纳米机械手运动控制器（110）以及离子束源（170）自动执行原位取出的指令 来自样品（125）的样品（150）。

    APPARATUS AND METHOD FOR AUTOMATED STRESS TESTING OF FLIP-CHIP PACKAGES
    8.
    发明申请
    APPARATUS AND METHOD FOR AUTOMATED STRESS TESTING OF FLIP-CHIP PACKAGES 审中-公开
    用于自动应力测试的芯片包装的装置和方法

    公开(公告)号：WO2006096549A3

    公开(公告)日：2007-04-19

    申请号：PCT/US2006007700

    申请日：2006-03-03

    Applicant: OMNIPROBE INC ,  ZAYKOVA-FELDMAN LYUDMILA ,  MOORE THOMAS M

    Inventor： ZAYKOVA-FELDMAN LYUDMILA ,  MOORE THOMAS M

    IPC: G01N27/82 ,  G01N11/00 ,  G01R33/09 ,  G01R33/12

    CPC classification number: G01R31/2881 ,  G01M7/08 ,  G01N3/00 ,  G01N3/307 ,  G01N3/313 ,  G01N2203/0044 ,  G01N2203/005 ,  G01N2203/0057 ,  G01N2203/0296 ,  G01N2203/0676 ,  G01R31/2868 ,  H01L21/67011

    Abstract: An apparatus for testing flip-chip packages has a programmed computer (100), a test-engine stage (130) for applying an impact to at least one package (110) under test, and a monitoring stage (140). The test-engine stage (130) causes an impact on the package (110) on the side opposite its ball-grid array. The test-engine stage (130) has actuators connected to the test-engine stage (130) and the computer (100), for moving and aligning the test-engine stage (130). The monitoring stage (140) has a digital camera (300) connected to the computer (100) for transmitting digital images from the ball-grid array side of the package (110) to the computer (100). A microscope (290) is preferably connected to the digital camera (300). A sample stage (120) located between the test-engine stage (130) and the monitoring stage (140) holds the package (110 under test. The sample stage (120) has an acoustic transducer (190) capable of being removably connected to the package (110) under test. The acoustic transducer (190) is connected to the computer (100) for transmitting signals from the acoustic transducer (190) to the computer (100).

    Abstract translation: 用于测试倒装芯片封装的装置具有编程计算机（100），用于对被测试的至少一个封装（110）施加冲击的测试引擎级（130）和监视级（140）。 测试引擎级（130）在与球栅阵列相对的一侧上引起对包装（110）的冲击。 测试发动机级（130）具有连接到测试引擎级（130）和计算机（100）的致动器，用于移动和对准测试引擎级（130）。 监视级（140）具有连接到计算机（100）的数字照相机（300），用于将数字图像从包装（110）的球栅阵列侧传送到计算机（100）。 显微镜（290）优选地连接到数字照相机（300）。 位于测试引擎级（130）和监控级（140）之间的样品台（120）保持被测试的包装（110）。样品台（120）具有能够可移除地连接到 声学换能器（190）连接到计算机（100），用于将信号从声换能器（190）发送到计算机（100）。

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