公开(公告)号：WO0177735A3

公开(公告)日：2002-05-16

申请号：PCT/US0111047

申请日：2001-04-04

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  DANEMAN MICHAEL J ,  KIANG MENG-HSIUNG ,  LAU KAM-YIN ,  BEERLING TIMOTHY J

IPC: G02B6/35 ,  G02B26/02 ,  G02B26/08

CPC classification number: G02B6/358 ,  G02B6/3512 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/359

Abstract: Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the "on" or "off" position. Embodiments of the invention have application in devices switches that employ mirrors that move between an "on" or "off" position, wherein they reflect light from an input fiber into an output fiber in the "on" position, and allow the light to pass in the "off" position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the "on" or "off" position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more positions in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.

Abstract translation: 公开了一种用于检测可旋转MEMS元件是处于“开”还是“关”位置的装置和方法。 本发明的实施例可应用于使用在“开”或“关”位置之间移动的反射镜的装置开关中，其中它们将来自输入光纤的光反射到处于“开”位置的输出光纤，并允许光通过 在“关”位置。 电极被定位在设备中，使得反射镜接近并由此电容耦合到不同的电极，这取决于它们是处于“开”还是“关”位置。 本发明对于已经使用用于在一个或多个位置中的反射镜的静电夹持的电极的开关特别有用，因为这些相同的电极可以用于静电夹紧反射镜并感测其位置。 本发明描述的方法包括感测反射镜之间的电容和用于将反射镜夹持在其一个或多个位置中的一个或多个电极，以便检测反射镜被夹住的位置。此外， 可以监控电容以检测不正确的夹紧。

公开(公告)号：AU6804101A

公开(公告)日：2001-10-23

申请号：AU6804101

申请日：2001-04-04

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  DANEMAN MICHAEL J ,  KIANG MENG-HSIUNG ,  LAU KAM-YIN ,  BEERLING TIMOTHY J

IPC: G02B6/35 ,  G02B26/02

Abstract: Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the "on" or "off" position. Embodiments of the invention have application in devices switches that employ mirrors that move between an "on" or "off" position, wherein they reflect light from an input fiber into an output fiber in the "on" position, and allow the light to pass in the "off" position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the "on" or "off" position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more position in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.