公开(公告)号：WO0177735A3

公开(公告)日：2002-05-16

申请号：PCT/US0111047

申请日：2001-04-04

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  DANEMAN MICHAEL J ,  KIANG MENG-HSIUNG ,  LAU KAM-YIN ,  BEERLING TIMOTHY J

IPC: G02B6/35 ,  G02B26/02 ,  G02B26/08

CPC classification number: G02B6/358 ,  G02B6/3512 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/359

Abstract: Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the "on" or "off" position. Embodiments of the invention have application in devices switches that employ mirrors that move between an "on" or "off" position, wherein they reflect light from an input fiber into an output fiber in the "on" position, and allow the light to pass in the "off" position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the "on" or "off" position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more positions in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.

Abstract translation: 公开了一种用于检测可旋转MEMS元件是处于“开”还是“关”位置的装置和方法。 本发明的实施例可应用于使用在“开”或“关”位置之间移动的反射镜的装置开关中，其中它们将来自输入光纤的光反射到处于“开”位置的输出光纤，并允许光通过 在“关”位置。 电极被定位在设备中，使得反射镜接近并由此电容耦合到不同的电极，这取决于它们是处于“开”还是“关”位置。 本发明对于已经使用用于在一个或多个位置中的反射镜的静电夹持的电极的开关特别有用，因为这些相同的电极可以用于静电夹紧反射镜并感测其位置。 本发明描述的方法包括感测反射镜之间的电容和用于将反射镜夹持在其一个或多个位置中的一个或多个电极，以便检测反射镜被夹住的位置。此外， 可以监控电容以检测不正确的夹紧。

公开(公告)号：AU5098901A

公开(公告)日：2001-10-08

申请号：AU5098901

申请日：2001-03-22

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  LAM KAM Y ,  KIANG MENG-HSIUNG ,  DANEMAN MICHAEL J ,  PANNU SATINDERPALL S

IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00 ,  G02B26/00

公开(公告)号：WO0165300A3

公开(公告)日：2003-01-16

申请号：PCT/US0106961

申请日：2001-03-02

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  LAM KAM Y ,  KIANG MENG-HSIUNG ,  DANEMAN MICHAEL J

IPC: G02B6/35 ,  G02B26/00

CPC classification number: G02B6/3582 ,  G02B6/3512 ,  G02B6/3546

Abstract: An optical crossbar switch having refractive or reflective components for equalizing beam spreading and diffraction in all the connections. The optical fibers or waveguides coupled to the switch are not staggered, but are parallel as in a conventional fiber array. The refractive component is disposed between the switch and the input optical fibers. Preferably, a similar refractive component is disposed between the output optical fibers and the switch. The refractive component can be a stairstep block made of glass, silicon or silica. Light from each input fiber travels through a well-defined thickness of the stairstep block. Since the block has a refractive index greater than the surrounding atmosphere, the wavelength is reduced within the block, and beam spreading and diffraction are reduced. For switch connections that have a long optical path, a long optical path through the block is required. The dimensions of the block must be designed according to the path length differences of the different switch connections. Optionally, a prism is used instead of the stairstep block. In this case, the optical fibers must be aligned at an angle to the switch. Furthermore, a series of small optical deflectors can be used instead of the stairstep structure.

Abstract translation: 具有用于均衡所有连接中的光束扩散和衍射的折射或反射分量的光学交叉开关。 耦合到开关的光纤或波导不是交错的，而是像传统的光纤阵列那样平行。 折射分量设置在开关和输入光纤之间。 优选地，在输出光纤和开关之间设置类似的折射分量。 折射分量可以是由玻璃，硅或二氧化硅制成的稳态块。 来自每个输入光纤的光线穿过明显的厚度的步态块。 由于该块具有大于周围大气的折射率，所以在该块内波长减小，并且光束扩散和衍射减小。 对于具有长光路的开关连接，需要通过该块的长光路。 块的尺寸必须根据不同开关连接的路径长度差设计。 可选地，使用棱镜代替步骤块。 在这种情况下，光纤必须与开关成一定角度对齐。 此外，可以使用一系列小的光学偏转器来代替稳态结构。

公开(公告)号：WO0173937A3

公开(公告)日：2002-01-03

申请号：PCT/US0109611

申请日：2001-03-22

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  LAM KAM Y ,  KIANG MENG-HSIUNG ,  DANEMAN MICHAEL J ,  PANNU SATINDERPALL S

IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00 ,  G02B26/02

CPC classification number: G02B6/357 ,  G02B6/3518 ,  G02B6/3556 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the iner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.

Abstract translation: 二维扫描器由可旋转的万向架结构与垂直静电梳状驱动致动器和传感器组成。 扫描仪的两个旋转轴可以通过激活两组垂直梳齿驱动执行器来独立控制。 第一组垂直梳齿驱动致动器定位在万向架结构的外框架和基座之间，第二组垂直梳驱动致动器定位在万向架结构的中间部分和外框之间 万向架结构。 万向节结构的内部可以包括反射表面，并且该装置可以用作反射镜。 此外，可以测量垂直梳状驱动器的电容以监视反射镜的角度位置，并且可以使用电容位置监视信号来实现镜角的闭环反馈控制。 二维扫描器可以在半导体工艺中制造。 二维扫描仪可用于生产光纤交换机。

公开(公告)号：WO0167159A2

公开(公告)日：2001-09-13

申请号：PCT/US0107002

申请日：2001-03-02

Applicant: ONIX MICROSYSTEMS INC

Inventor： KIANG MENG-HSIUNG ,  LAM KAM Y ,  BEHIN BEHRANG ,  DANEMAN MICHAEL J

IPC: G02B26/08 ,  G02B6/35 ,  H04B10/02 ,  H04J14/00 ,  H04J14/02 ,  G02B26/00

CPC classification number: G02B6/3546 ,  G02B6/3512 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582

Abstract: An optical switch module having a movable mirror (312) disposed between two fixed mirrors (310, 314). All three mirrors are aligned parallel to each other in a linear array to form a crossbar switch. The movable mirror (312) moves between a first position and a second position to selectively couple optical signals between two inputs and two outputs. The basic switch module may be scaled up to form an apparatus that incorporates N movable mirrors and N+1 fixed mirrors, where N is an integer greater than zero. Such an apparatus can accommodate 2N fiber inputs and 2N fiber outputs, e.g., in an optical add/drop multiplexer (OADM). The parallel configuration of the switch module takes advantage of existing lens array and fiber V-groove technology to facilitate integration of the fibers and collimators in the module, thereby reducing the difficulty and cost associated with alignment, assembly, and packaging.

Abstract translation: 一种具有设置在两个固定镜（310,314）之间的可移动镜（312）的光学开关模块。 所有三个反射镜以线性阵列彼此平行排列以形成交叉开关。 可移动镜312在第一位置和第二位置之间移动，以选择性地耦合两个输入和两个输出之间的光信号。 基本开关模块可以按比例扩大以形成一个装有N个可移动镜和N + 1个固定镜的装置，其中N是大于零的整数。 这种装置可以容纳2N个光纤输入和2N个光纤输出，例如在光分插复用器（OADM）中。 开关模块的并联配置利用了现有的透镜阵列和光纤V槽技术，便于将光纤和准直器集成在模块中，从而降低与对准，组装和封装相关的难度和成本。

公开(公告)号：AU6804101A

公开(公告)日：2001-10-23

申请号：AU6804101

申请日：2001-04-04

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  DANEMAN MICHAEL J ,  KIANG MENG-HSIUNG ,  LAU KAM-YIN ,  BEERLING TIMOTHY J

IPC: G02B6/35 ,  G02B26/02

Abstract: Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the "on" or "off" position. Embodiments of the invention have application in devices switches that employ mirrors that move between an "on" or "off" position, wherein they reflect light from an input fiber into an output fiber in the "on" position, and allow the light to pass in the "off" position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the "on" or "off" position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more position in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.

公开(公告)号：AU5315901A

公开(公告)日：2001-10-23

申请号：AU5315901

申请日：2001-04-04

Applicant: ONIX MICROSYSTEMS INC

Inventor： DANEMAN MICHAEL J ,  BEHIN BEHRANG ,  KIANG MENG-HSIUNG

IPC: B81B3/00 ,  G02B26/08

Abstract: A device having a landing pad structure on an underside of a device and method for fabricating same. The device is formed from a device layer with at least one landing pad protruding from an underside thereof. The landing pad is attached to the device layer by a plug passing through an opening in the device layer. The device may be attached to the device layer by one or more compliant flexures, which allow the device to rotate in and out of a plane defined by the device layer. The landing pads are fabricated by forming one or more vias through the device layer. An underlying sacrificial layer is then partially etched to form one or more depressions at locations corresponding to locations of the vias in the device layer. The vias and depressions are then filled with a landing pad material to form a structure having one or more landing pads protruding from an underside of the device layer. The sacrificial layer is subsequently removed to release the device. Particular embodiments of both methods may be applied to fabricating microelectromechanical systems (MEMS) especially MEMS mirrors. The various embodiments are well suited to use with silicon on insulator (SOI) substrates.

公开(公告)号：AU5079901A

公开(公告)日：2001-09-17

申请号：AU5079901

申请日：2001-03-02

Applicant: ONIX MICROSYSTEMS INC

Inventor： KIANG MENG-HSIUNG ,  LAM KAM Y ,  BEHIN BEHRANG ,  DANEMAN MICHAEL J

IPC: G02B26/08 ,  G02B6/35 ,  H04B10/02 ,  H04J14/00 ,  H04J14/02 ,  G02B26/00

Abstract: An optical switch module having a movable mirror disposed between two fixed mirrors. All three mirrors are aligned parallel to each other in a linear array to form a crossbar switch. The movable mirror moves between a first position and a second position to selectively couple optical signals between two inputs and two outputs. The basic switch module may be scaled up to form an apparatus that incorporates N movable mirrors and N+1 fixed mirrors, where N is an integer greater than zero. Such an apparatus can accommodate 2N fiber inputs and 2N fiber outputs, e.g., in an optical add/drop multiplexer (OADM). The parallel configuration of the switch module takes advantage of existing lens array and fiber V-groove technology to facilitate integration of the fibers and collimators in the module, thereby reducing the difficulty and cost associated with alignment, assembly, and packaging.

公开(公告)号：AU6291701A

公开(公告)日：2001-09-12

申请号：AU6291701

申请日：2001-03-02

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  LAM KAM Y ,  KIANG MENG-HSIUNG ,  DANEMAN MICHAEL J

IPC: G02B6/35 ,  G02B26/00

Abstract: An optical crossbar switch having refractive or reflective components for equalizing beam spreading and diffraction in all the connections. The optical fibers or waveguides coupled to the switch are not staggered, but are parallel as in a conventional fiber array. The refractive component is disposed between the switch and the input optical fibers. Preferably, a similar refractive component is disposed between the output optical fibers and the switch. The refractive component can be a stairstep block made of glass, silicon or silica. Light from each input fiber travels through a well-defined thickness of the stairstep block. Since the block has a refractive index greater than the surrounding atmosphere, the wavelength in reduced within the block, and beam spreading and diffraction are reduced.