公开(公告)号：WO2003035542A2

公开(公告)日：2003-05-01

申请号：PCT/US2002/034459

申请日：2002-10-26

Applicant: OPTICNET, INC.

Inventor： HOPKINS, Dean, A., Jr. ,  LIM, Martin ,  MAO, Minyao

IPC: B81B3/00

CPC classification number: B81C1/0015 ,  B81B2201/033 ,  B81B2203/0315 ,  B81B2203/051 ,  B81C2201/017 ,  H02N1/008

Abstract: A method of fabricating a vertical actuation comb drive first etches a cavity in a semiconductive wafer; then the comb structure is etched, and the fixed part of the structure is deformed by an induced strain, by techniques such as boron doping, by adding a metal layer or a fixed oxide, or a mechanical latch or an additional plate electrode. In a manner known in the art, application of a voltage across the fingers of the comb produces a deflection either tilting or a vertical movement in the moveable portion of the comb drive.

Abstract translation: 制造垂直致动梳状驱动器的方法首先蚀刻半导体晶片中的空腔; 然后对梳状结构进行蚀刻，通过添加金属层或固定氧化物的机械闩锁或附加的平板电极，通过诱导应变，硼掺杂等技术使固定部分发生变形。 以本领域已知的方式，跨梳子的手指施加电压产生在梳子驱动器的可移动部分中的倾斜或垂直移动的偏转。