公开(公告)号：WO2003035542A2

公开(公告)日：2003-05-01

申请号：PCT/US2002/034459

申请日：2002-10-26

Applicant: OPTICNET, INC.

Inventor： HOPKINS, Dean, A., Jr. ,  LIM, Martin ,  MAO, Minyao

IPC: B81B3/00

CPC classification number: B81C1/0015 ,  B81B2201/033 ,  B81B2203/0315 ,  B81B2203/051 ,  B81C2201/017 ,  H02N1/008

Abstract: A method of fabricating a vertical actuation comb drive first etches a cavity in a semiconductive wafer; then the comb structure is etched, and the fixed part of the structure is deformed by an induced strain, by techniques such as boron doping, by adding a metal layer or a fixed oxide, or a mechanical latch or an additional plate electrode. In a manner known in the art, application of a voltage across the fingers of the comb produces a deflection either tilting or a vertical movement in the moveable portion of the comb drive.

Abstract translation: 制造垂直致动梳状驱动器的方法首先蚀刻半导体晶片中的空腔; 然后对梳状结构进行蚀刻，通过添加金属层或固定氧化物的机械闩锁或附加的平板电极，通过诱导应变，硼掺杂等技术使固定部分发生变形。 以本领域已知的方式，跨梳子的手指施加电压产生在梳子驱动器的可移动部分中的倾斜或垂直移动的偏转。

公开(公告)号：WO2004102240A1

公开(公告)日：2004-11-25

申请号：PCT/US2004/012981

申请日：2004-04-28

Applicant: OPTICNET, INC. ,  MAO, Minyao ,  LIM, Martin ,  OSTROM, Robert

Inventor： MAO, Minyao ,  LIM, Martin ,  OSTROM, Robert

IPC: G02B6/26

CPC classification number: G02B6/358 ,  G02B6/3512 ,  G02B6/357

Abstract: Bistable latching actuator for use in optical fiber switching applications having a generally planar mechanism with an arm that carries a mirror for movement in a direction perpendicular to the plane of the mechanism, and a bistable mechanical latch for retaining the mirror in stable positions on opposite sides of the plane without contacting the arm. Movement between the two stable positions is initiated and damped with an electrostatic comb drive.

Abstract translation: 用于光纤切换应用的双稳态闭锁致动器具有大致平面的机构，其具有臂，该臂具有在垂直于机构的平面的方向上运动的反射镜，以及用于将反射镜保持在相对侧的稳定位置的双稳态机械闩锁 不接触手臂。 启动两个稳定位置之间的运动并用静电梳驱动阻尼。