公开(公告)号：WO03035542A3

公开(公告)日：2003-10-16

申请号：PCT/US0234459

申请日：2002-10-26

Applicant: OPTICNET INC

Inventor： HOPKINS DEAN A JR ,  LIM MARTIN ,  MAO MINYAO

IPC: B81B3/00

CPC classification number: B81C1/0015 ,  B81B2201/033 ,  B81B2203/0315 ,  B81B2203/051 ,  B81C2201/017 ,  H02N1/008

Abstract: A method of fabricating a vertical actuation comb drive first etches a cavity in a semiconductive wafer; then the comb structure is etched, and the fixed part of the structure is deformed by an induced strain, by techniques such as boron doping, by adding a metal layer or a fixed oxide, or a mechanical latch or an additional plate electrode. In a manner known in the art, application of a voltage across the fingers of the comb produces a deflection either tilting or a vertical movement in the moveable portion of the comb drive.

Abstract translation: 制造垂直致动梳状驱动器的方法首先蚀刻半导体晶片中的空腔; 然后蚀刻梳状结构，并且通过诸如硼掺杂的技术，通过添加金属层或固定氧化物，或者机械闩锁或附加平板电极，通过感应应变使结构的固定部分变形。 以本领域已知的方式，在梳齿的指状物上施加电压在梳齿驱动器的可移动部分中产生偏转或者倾斜或者垂直运动。