公开(公告)号：US20170259234A1

公开(公告)日：2017-09-14

申请号：US15509047

申请日：2015-08-04

Applicant: ORGANO CORPORATION

Inventor： Yoshifumi HAYASHI ,  Yukinari YAMASHITA ,  Koji YAMANAKA ,  Daisaku YANO

IPC: B01F15/04 ,  H01L21/02 ,  B01F5/04 ,  C11D7/04 ,  B01F15/00 ,  B01F3/08

CPC classification number: B01F15/0408 ,  B01F3/0865 ,  B01F3/088 ,  B01F5/0403 ,  B01F15/00149 ,  B01F15/0022 ,  B01F15/00227 ,  B01F15/00285 ,  B01F15/00344 ,  B01F15/00357 ,  B01F15/0238 ,  B01F15/0416 ,  B01F2003/0896 ,  B01F2005/0028 ,  B01F2215/004 ,  B01F2215/0096 ,  B01F2215/0431 ,  C11D7/04 ,  G05D11/131 ,  H01L21/02052

Abstract: A diluted solution production method of the present invention is a diluted solution production method of producing a diluted solution of a second liquid by adding the second liquid to a first liquid, the method including feeding the first liquid to a first pipe; and controlling pressure in a tank that stores the second liquid to add, through the second pipe that connects the tank to the first pipe, the second liquid to the first liquid in the first pipe. Adding the second liquid includes measuring a flow rate of the first liquid or the diluted solution that flows through the first pipe; measuring a component concentration of the diluted solution; and controlling the pressure in the tank, based on the measured values of the flow rate and the component concentration, so as to adjust the component concentration of the diluted solution to a specified value.

公开(公告)号：US20160361693A1

公开(公告)日：2016-12-15

申请号：US15118992

申请日：2015-01-06

Applicant: ORGANO CORPORATION

Inventor： Yoshifumi HAYASHI ,  Yukinari YAMASHITA ,  Koji YAMANAKA

IPC: B01F3/04 ,  C01B13/11 ,  B01F5/10 ,  C02F1/78 ,  B01F15/00 ,  B01F3/20

CPC classification number: B01F3/04985 ,  B01F3/04439 ,  B01F3/2057 ,  B01F5/106 ,  B01F15/0022 ,  B01F15/00344 ,  B01F15/0408 ,  B01F2003/04886 ,  C01B13/11 ,  C01B2201/64 ,  C01B2201/90 ,  C02F1/78 ,  C02F2103/04 ,  C02F2201/782 ,  C02F2209/23

Abstract: An ozonated water supply method includes: feeding dissolving water contained in a circulation tank to an ozonation device at a given feed rate while feeding ultrapure water to the circulation tank, and returning ozonated water that has not been used at a use point to the circulation tank, dissolving ozone in the dissolving water using the ozonation device to obtain ozonated water, and feeding the ozonated water to the use point; feeding oxygen gas having a nitrogen gas content of 0.01 vol % or less to a discharge-type ozone gas-producer, and feeding the resulting ozone-containing gas to the ozonation device; adjusting the feed rate of the ultrapure water to the circulation tank; and adjusting the dissolved ozone concentration in the ozonated water. The method can reduce or suppress the accumulation of nitric acid in the recirculation system when a discharge-type ozone gas-producer is used as the ozone gas-producer.

Abstract translation: 臭氧水供给方法包括：以给定的进料速率将包含在循环罐中的溶解水加入到臭氧装置中，同时向循环罐供给超纯水，并将循环罐中未使用的臭氧水返回到循环罐 使用臭氧化装置将臭氧溶解在溶解水中，得到臭氧化水，将臭氧水供给到使用点; 向放电型臭氧气体生产器供给氮气含量为0.01体积％以下的氧气，并将得到的含臭氧气体供给到臭氧化装置中; 调节超纯水进入循环罐的进料速度; 并调节臭氧水中溶解的臭氧浓度。 当使用排放型臭氧气体生产者作为臭氧气体生产者时，该方法可以减少或抑制再循环系统中硝酸的积聚。