公开(公告)号：US20240426751A1

公开(公告)日：2024-12-26

申请号：US18212036

申请日：2023-06-20

Applicant: Orbotech Ltd.

Inventor： Nir A. Turko ,  Hanina Golan ,  Igor Sakaev

IPC: G01N21/45

Abstract: Systems and methods for characterizing a sample utilizing white light interferometry are disclosed. Such systems and methods may include an optical sub-system. The optical sub-system may include a reference element configured to tilt an optical axis of a reference beam relative to an optical axis of a measurement beam and a sample positioning stage configured to adjust a sample position of a sample along a Z-direction of the sample. Such systems and methods may include receiving an image of the sample. Such systems and methods may include utilizing a filter to demodulate an interference pattern of the image. Such systems and methods may include determining a location of the interference pattern on the image; and directing the focal adjustment based on the location of the interference pattern.