公开(公告)号：US20240426751A1

公开(公告)日：2024-12-26

申请号：US18212036

申请日：2023-06-20

Applicant: Orbotech Ltd.

Inventor： Nir A. Turko ,  Hanina Golan ,  Igor Sakaev

IPC: G01N21/45

Abstract: Systems and methods for characterizing a sample utilizing white light interferometry are disclosed. Such systems and methods may include an optical sub-system. The optical sub-system may include a reference element configured to tilt an optical axis of a reference beam relative to an optical axis of a measurement beam and a sample positioning stage configured to adjust a sample position of a sample along a Z-direction of the sample. Such systems and methods may include receiving an image of the sample. Such systems and methods may include utilizing a filter to demodulate an interference pattern of the image. Such systems and methods may include determining a location of the interference pattern on the image; and directing the focal adjustment based on the location of the interference pattern.

公开(公告)号：US20210102892A1

公开(公告)日：2021-04-08

申请号：US17064212

申请日：2020-10-06

Applicant: Orbotech Ltd.

Inventor： Ram Oron ,  Hanina Golan ,  Ilia Lutsker ,  Gil Tidhar

IPC: G01N21/45 ,  G03H1/04 ,  G03H1/00

Abstract: An optical inspection apparatus includes an interferometer module, which is configured to direct a beam of coherent light toward an area under inspection and to produce a first image of interference fringes of the area. The apparatus also includes a triangulation module configured to project a pattern of structured light onto the area, and at least one image sensor configured to capture the first image of interference fringes and a second image of the pattern that is reflected from the area. Beam combiner optics are configured to direct the beam of coherent light and the projected pattern to impinge on the same location on the area. A processor is configured to process the first and second images in order to generate a 3D map of the area.

公开(公告)号：US20250109934A1

公开(公告)日：2025-04-03

申请号：US18477158

申请日：2023-09-28

Applicant: Orbotech Ltd.

Inventor： Yuri Paskover ,  Hanina Golan ,  Ilia Lutsker ,  Nir Turko ,  Oleg Yermak ,  Saki Hakim

IPC: G01B9/02 ,  G01N21/95

Abstract: In the system, an illumination source emits light, a first beam splitter directs a portion of the light toward a sample and directs another portion of the light toward a reference surface that reflects the light back to the first beam splitter to be recombined with light reflected by the sample, at least one second beam splitter that directs n portions of the light toward n detectors, each of the n portions of the light having a preset phase shift and n≥2, and a processor receives intensities of the n portions of the light. The processor calculates an interferogram envelope based on the intensities measured by the n detectors as the reference surface moves between a plurality of signal collection positions.

公开(公告)号：US11313794B2

公开(公告)日：2022-04-26

申请号：US17064212

申请日：2020-10-06

Applicant: Orbotech Ltd.

Inventor： Ram Oron ,  Hanina Golan ,  Ilia Lutsker ,  Gil Tidhar

IPC: G03H1/00 ,  G01B11/24 ,  G01B11/25 ,  G01B9/023 ,  G01B9/02 ,  G01N21/45 ,  G03H1/04 ,  G03H1/08 ,  G01B9/02015

Abstract: An optical inspection apparatus includes an interferometer module, which is configured to direct a beam of coherent light toward an area under inspection and to produce a first image of interference fringes of the area. The apparatus also includes a triangulation module configured to project a pattern of structured light onto the area, and at least one image sensor configured to capture the first image of interference fringes and a second image of the pattern that is reflected from the area. Beam combiner optics are configured to direct the beam of coherent light and the projected pattern to impinge on the same location on the area. A processor is configured to process the first and second images in order to generate a 3D map of the area.