公开(公告)号：US20250109934A1

公开(公告)日：2025-04-03

申请号：US18477158

申请日：2023-09-28

Applicant: Orbotech Ltd.

Inventor： Yuri Paskover ,  Hanina Golan ,  Ilia Lutsker ,  Nir Turko ,  Oleg Yermak ,  Saki Hakim

IPC: G01B9/02 ,  G01N21/95

Abstract: In the system, an illumination source emits light, a first beam splitter directs a portion of the light toward a sample and directs another portion of the light toward a reference surface that reflects the light back to the first beam splitter to be recombined with light reflected by the sample, at least one second beam splitter that directs n portions of the light toward n detectors, each of the n portions of the light having a preset phase shift and n≥2, and a processor receives intensities of the n portions of the light. The processor calculates an interferogram envelope based on the intensities measured by the n detectors as the reference surface moves between a plurality of signal collection positions.