1.
    发明专利
    未知

    公开(公告)号:DE60235263D1

    公开(公告)日:2010-03-18

    申请号:DE60235263

    申请日:2002-11-26

    Applicant: PANASONIC CORP

    Abstract: The mirror structure includes substrate (1) and several small mirrors (20). Drive units of the mirrors, have fixed electrodes (5-7) and movable electrodes (13-15), which are connected to mirrors. Displacement of the mirrors with respect to substrate, is performed by the electrostatic force generated by electric potential difference between the movable and fixed electrodes. An independent claim is included for light controller.

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