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    DEPOSITED THIN FILMS AND THEIR USE IN SEPARATION AND SARCRIFICIAL LAYER APPLICATIONS
    1.
    发明申请
    DEPOSITED THIN FILMS AND THEIR USE IN SEPARATION AND SARCRIFICIAL LAYER APPLICATIONS 审中-公开
    沉积薄膜及其在分离和绝缘层应用中的应用

    公开(公告)号：WO0180286A3

    公开(公告)日：2002-02-07

    申请号：PCT/US0112281

    申请日：2001-04-17

    Applicant: PENN STATE RES FOUND

    Inventor： FONASH STEPHEN J ,  KALKAN ALI KAAN ,  BAE SANGHOON ,  HAYES DAN ,  NAM WOOK JUN ,  CHANG KYUHWAN ,  LEE YOUNGCHUL

    IPC: B81B3/00 ,  B81C1/00 ,  C23C16/24 ,  C23C16/511 ,  H01L21/306 ,  H01M8/02 ,  B05D5/12

    CPC classification number: B81C1/0038 ,  B81C99/008 ,  B81C2201/0109 ,  B81C2201/0115 ,  B81C2203/0127 ,  C23C16/24 ,  C23C16/511

    Abstract: This invention uses large surface to volume ratio materials for separation, release layer, and sacrificial material applications. The invention outlines the material concept, application designs, and fabrication methodologies. The invention is demonstrated using deposited column/void network materials as examples of large surface to volume ratio materials. In a number of the specific applications discussed, it is shown that it is advantageous to create structures on a laminate on a mother substrate and then, using the separation layer material approach, to separate this laminate from the mother substrate using the present separation scheme. It is also shown that the present materials have excellent release layer utility. In a number of applications it is also shown how the approach can be used to uniquely form cavities, channels, air-gaps, and related structures in or on various substrates. Further, it is demonstrated that it also can be possible and advantageous to combine the schemes for cavity formation with the scheme for laminate separation.

    Abstract translation: 本发明使用大的表面体积比的材料用于分离，剥离层和牺牲材料应用。 本发明概述了材料概念，应用设计和制造方法。 本发明使用沉积柱/空隙网络材料作为大表面积与体积比的材料的实例进行了说明。 在讨论的许多具体应用中，显示了在母基板上的层压体上产生结构，然后使用分离层材料方法，使用本分离方案将该层压体与母基板分开是有利的。 还显示出本发明材料具有优异的脱模层效用。 在许多应用中，还显示了该方法如何用于在各种基底中或其上独特地形成腔，通道，气隙和相关结构。 此外，证明了将空腔形成方案与层压分离方案组合也是有可能和有利的。

    DEPOSITED THIN FILMS AND THEIR USE IN SEPARATION AND SARCRIFICIAL LAYER APPLICATIONS
    4.
    发明专利
    DEPOSITED THIN FILMS AND THEIR USE IN SEPARATION AND SARCRIFICIAL LAYER APPLICATIONS 未知

    公开(公告)号：CA2406214A1

    公开(公告)日：2001-10-25

    申请号：CA2406214

    申请日：2001-04-17

    Applicant: PENN STATE RES FOUND

    Inventor： LEE YOUNGCHUL ,  KALKAN ALI KAAN ,  BAE SANGHOON ,  FONASH STEPHEN J ,  NAM WOOK JUN ,  HAYES DAN ,  CHANG KYUHWAN

    IPC: B81B3/00 ,  B81C1/00 ,  C23C16/24 ,  C23C16/511 ,  H01L21/306 ,  H01M8/02 ,  C23F1/02 ,  B05D1/32 ,  B05D5/12 ,  H01M8/00

    Abstract: This invention uses large surface to volume ratio materials for separation, release layer, and sacrificial material applications. The invention outlines the material concept, application designs, and fabrication methodologies. Th e invention is demonstrated using deposited column/void network materials as examples of large surface to volume ratio materials. In a number of the specific applications discussed, it is shown that it is advantageous to crea te structures on a laminate on a mother substrate and then, using the separatio n layer material approach, to separate this laminate from the mother substrate using the present separation scheme. It is also shown that the present materials have excellent release layer utility. In a number of applications it is also shown how the approach can be used to uniquely form cavities, channels, air-gaps, and related structures in or on various substrates. Further, it is demonstrated that it also can be possible and advantageous to combine the schemes for cavity formation with the scheme for laminate separation.

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