公开(公告)号：US6361912B2

公开(公告)日：2002-03-26

申请号：US75730601

申请日：2001-01-08

Applicant: PENN STATE RES FOUND

Inventor： FONASH STEPHEN J ,  KALKAN ALI KAAN ,  DETIG ROBERT H

IPC: G03G13/10 ,  G03G13/16 ,  H01L21/302

CPC classification number: H01L21/02532 ,  H01L21/02592 ,  H01L21/02672 ,  H01L27/1277

Abstract: A metal-containing toner is electrostatically printed on a semiconductor surface. Subsequently, this surface is annealed to achieve certain material modifications selectively at the regions where the toner is applied. If the toner contains a crystallization-catalyst metal, such as, Pd, Ni, Pt, and Cr, and is printed on an amorphous semiconductor film, annealing results in conversion of the printed regions to polycrystalline. If the metal-containing toner is printed on a silicon surface (i.e., amorphous/poly-Si layer or Si wafer) the printed regions are selectively converted to a metal-silicide (with the sufficient amount of metal applied on these regions) upon annealing.

Abstract translation: 含金属的调色剂被静电印刷在半导体表面上。 随后，将该表面进行退火，以在施加调色剂的区域选择性地获得某些材料变化。 如果调色剂含有诸如Pd，Ni，Pt和Cr的结晶催化剂金属，并且印刷在非晶半导体膜上，则退火导致印刷区域转化为多晶。 如果将含金属的调色剂印刷在硅表面（即，非晶/多晶硅层或Si晶片）上，则退火后的印刷区域选择性地转化为金属硅化物（在这些区域施加足够量的金属） 。

公开(公告)号：WO0074932A9

公开(公告)日：2002-04-18

申请号：PCT/US0014862

申请日：2000-05-30

Applicant: PENN STATE RES FOUND ,  FONASH STEPHEN J ,  KALKAN ALI KAAN ,  BAE SANGHOON

Inventor： FONASH STEPHEN J ,  KALKAN ALI KAAN ,  BAE SANGHOON

IPC: B81B3/00 ,  B81C1/00 ,  C23C16/24 ,  C23C16/511 ,  G01N21/17 ,  G01N27/12 ,  G01N27/447 ,  H01J49/04 ,  H01J49/16 ,  B32B3/10 ,  C23C10/06 ,  C23C16/06 ,  H05H1/02

CPC classification number: B81C1/0038 ,  B81C1/00047 ,  B81C2201/0115 ,  B81C2201/0139 ,  B81C2201/018 ,  C23C16/24 ,  C23C16/511 ,  G01N21/17 ,  G01N27/121 ,  G01N27/44717 ,  G01N30/6095 ,  H01J49/0418 ,  Y10T428/24174 ,  Y10T428/249953

Abstract: A novel porous film (3) is disclosed comprising a network of silicon columns in a continuous void which may be fabricated using high density plasma deposition at low temperatures, i.e., less than about 250 DEG C. This silicon film is a two-dimensional nano-sized array of rodlike columns. This void-column morphology can be controlled with deposition conditions and the porosity can be varied up to 90 %. The simultaneous use of low temperature deposition and etching in the plasma approach utilized, allows for the unique opportunity of obtaining columnar structure, a continuous void, and polycrystalline column composition at the same time. Unique devices may be fabricated using this porous continuous film by plasma deposition of this film on a glass, metal foil, insulator or plastic substrates (5).

Abstract translation: 公开了一种新颖的多孔膜（3），其包括连续空隙中的硅柱网络，其可以在低温即低于约250℃下使用高密度等离子体沉积来制造。该硅膜是二维纳米 棒状列的尺寸排列。 这种空隙柱形态可以用沉积条件控制，并且孔隙率可以变化高达90％。 在所采用的等离子体方法中同时使用低温沉积和蚀刻允许在同时获得柱状结构，连续空隙和多晶柱组成的独特机会。 可以使用该多孔连续膜通过将该膜等离子体沉积在玻璃，金属箔，绝缘体或塑料基底（5）上来制造独特的装置。

公开(公告)号：EP1254249A4

公开(公告)日：2005-07-06

申请号：EP00986549

申请日：2000-12-19

Applicant: PENN STATE RES FOUND

Inventor： FONASH STEPHEN J ,  BAE SANGHOON ,  HAYES DANIEL J ,  CUIFFI JOSEPH

IPC: G01N27/62 ,  B81B3/00 ,  B81C1/00 ,  C12Q1/02 ,  C12Q1/68 ,  C23C16/24 ,  C23C16/511 ,  G01N1/28 ,  G01N21/17 ,  G01N27/447 ,  G01N30/04 ,  G01N33/48 ,  G01N33/543 ,  G01N33/552 ,  G01N33/68 ,  C12Q1/00 ,  G01N15/06 ,  G01N21/29 ,  G01N21/41 ,  G01N21/47 ,  G01N27/00 ,  G01N33/00 ,  G01N33/53 ,  G01N33/567

CPC classification number: C23C16/511 ,  B81B2201/0214 ,  B81C1/0038 ,  B81C2201/0176 ,  C23C16/24 ,  G01N21/17 ,  G01N27/44717 ,  Y10T436/119163 ,  Y10T436/25 ,  Y10T436/2575

Abstract: The present invention is directed to the use of deposited thin films for chemical or biological analysis. The invention further relates to the use of these thin films in separation adherence and detection of chemical of biological samples. Applications of these thin films include desorption-ionization mass spectroscopy, electrical contacts for organic thin films and molecules, optical coupling of light energy for analysis, biological materials manipulation, chromatographic separation, head space adsorbance media, media for atomic molecular adsorbance or attachment, and substrates for cell attachment.

公开(公告)号：EP1208002A4

公开(公告)日：2006-08-02

申请号：EP00939410

申请日：2000-05-30

Applicant: PENN STATE RES FOUND

Inventor： FONASH STEPHEN J ,  KALKAN ALI KAAN ,  BAE SANGHOON

IPC: B81B3/00 ,  B81C1/00 ,  C23C16/24 ,  C23C16/511 ,  G01N21/17 ,  G01N27/12 ,  G01N27/447 ,  H01J49/04 ,  H01J49/16 ,  B32B3/10 ,  C23C10/06 ,  C23C16/06 ,  H05H1/02

CPC classification number: B81C1/0038 ,  B81C1/00047 ,  B81C2201/0115 ,  B81C2201/0139 ,  B81C2201/018 ,  C23C16/24 ,  C23C16/511 ,  G01N21/17 ,  G01N27/121 ,  G01N27/44717 ,  G01N30/6095 ,  H01J49/0418 ,  Y10T428/24174 ,  Y10T428/249953

Abstract: A novel porous film is disclosed comprising a network of silicon columns in a continuous void which may be fabricated using high density plasma deposition at low temperatures, i.e., less than about 250 ° C. This silicon film is a two-dimensional nano-sized array of rodlike columns. This void-column morphology can be controlled with deposition conditions and the porosity can be varied up to 90%. The simultaneous use of low temperature deposition and etching in the plasma approach utilized, allows for the unique opportunity of obtaining columnar structure, a continuous void, and polycrystalline column composition at the same time. Unique devices may be fabricated using this porous continuous film by plasma deposition of this film on a glass, metal foil, insulator or plastic substrates.

Abstract translation: 公开了一种新颖的多孔膜，其包括在连续空隙中的硅柱网络，其可以在低温即低于约250℃下使用高密度等离子体沉积来制造。该硅膜是二维纳米尺寸阵列 的棒状柱。 这种空隙柱形态可以用沉积条件控制，并且孔隙度可以变化高达90％。 在所采用的等离子体方法中同时使用低温沉积和蚀刻允许在同时获得柱状结构，连续空隙和多晶柱组成的独特机会。 可以使用该多孔连续膜通过将该膜等离子体沉积在玻璃，金属箔，绝缘体或塑料基底上来制造独特的器件。

公开(公告)号：EP1280617A4

公开(公告)日：2005-08-03

申请号：EP01934877

申请日：2001-04-17

Applicant: PENN STATE RES FOUND

Inventor： FONASH STEPHEN J ,  KALKAN ALI KAAN ,  BAE SANGHOON ,  HAYES DAN ,  NAM WOOK JUN ,  CHANG KYUHWAN ,  LEE YOUNGCHUL

IPC: B81B3/00 ,  B81C1/00 ,  C23C16/24 ,  C23C16/511 ,  H01L21/306 ,  H01M8/02 ,  B05D5/12

CPC classification number: B81C1/0038 ,  B81C99/008 ,  B81C2201/0109 ,  B81C2201/0115 ,  B81C2203/0127 ,  C23C16/24 ,  C23C16/511

Abstract: This invention uses large surface to volume ratio materials for separation, release layer, and sacrificial material applications. The invention outlines the material concept, application designs, and fabrication methodologies. The invention is demonstrated using deposited column/void network materials as examples of large surface to volume ratio materials. In a number of the specific applications discussed, it is shown that it is advantageous to create structures on a laminate on a mother substrate and then, using the separation layer material approach, to separate this laminate from the mother substrate using the present separation scheme. It is also shown that the present materials have excellent release layer utility. In a number of applications it is also shown how the approach can be used to uniquely form cavities, channels, air-gaps, and related structures in or on various substrates. Further, it is demonstrated that it also can be possible and advantageous to combine the schemes for cavity formation with the scheme for laminate separation.

公开(公告)号：WO03020946A9

公开(公告)日：2003-09-04

申请号：PCT/US0226009

申请日：2002-08-14

Applicant: PENN STATE RES FOUND

Inventor： FONASH STEPHEN J ,  HAYES DANIEL ,  NAM WOOK JUN ,  CUIFFI JOSEPH D

IPC: B01J19/00 ,  B01L3/00 ,  B81B1/00 ,  F15C5/00 ,  F16K99/00

CPC classification number: B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00819 ,  B01J2219/00835 ,  B01J2219/00837 ,  B01J2219/00853 ,  B01L3/5027 ,  B82Y15/00 ,  F15C5/00 ,  F16K99/0001 ,  F16K99/0003 ,  F16K99/0046 ,  F16K99/0051 ,  F16K2099/0073 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084

Abstract: There is disclosed a method providing micro-scale devices, nano-scale devices, or devices having both nano-scale and micro-scale features. The method of the invention comprises fluidic assembly and various novel devices produced thereby. A variety of nanofluidic and molecular electronic type devices and structures having applications such as filtering and genetic sequencing are provided by the invention

Abstract translation: 公开了一种提供具有纳米尺度和微尺度特征的微尺度装置，纳米级装置或装置的方法。 本发明的方法包括流体组装和由此制造的各种新型装置。 本发明提供了具有诸如过滤和遗传测序等应用的多种纳米流体和分子电子型装置和结构

公开(公告)号：WO02101352A8

公开(公告)日：2003-08-14

申请号：PCT/US0217909

申请日：2002-06-06

Applicant: PENN STATE RES FOUND

Inventor： KALKAN KAAN A ,  FONASH STEPHEN J

IPC: B81B7/04 ,  G01N27/02 ,  H01L51/00 ,  H01L51/30 ,  H01L51/42

CPC classification number: H01L51/4213 ,  H01L51/0038 ,  H01L51/4266 ,  Y02E10/549 ,  Y02P70/521

Abstract: An electronic opto-electronic device or a chemical sensor comprising: an interpenetrating network of a nanostructured high surface area to volume ratio film material and an organic/inorganic material forming a nanocomposite. The high surface area to volume film material is obtained onto an electrode substrate first, such that the nano-scale basic elements comprising this film material are embedded in a void matrix while having electrical connectivity with the elctrode substrate. For example, the film material may comprise an array of nano-protrusions electrically connected to the electrode substrate and separated by a void matrix. The interpenetrating network is formed by introducing an appropriate organic/inorganic material into the void volume of the high surface area to vlume film material. Further electrode(s) are defined onto the film or intra-void material to achieve a certain device. Charge separation, charge injection, charge storage, field effect devices, ohmic contacts, and chemical sensors are possible.

Abstract translation: 一种电子光电器件或化学传感器，包括：纳米结构的高表面积与体积比的薄膜材料的互穿网络和形成纳米复合材料的有机/无机材料。 首先在电极基板上获得高表面积体积膜材料，使得包含该膜材料的纳米级碱性元素嵌入空隙矩阵中，同时与电极基底具有电连接性。 例如，膜材料可以包括电连接到电极基底并由空隙矩阵分开的纳米突起阵列。 通过将适当的有机/无机材料引入高表面积的空隙体积中来形成互穿网络以形成薄膜材料。 另外的电极被限定在膜或孔内材料上以实现某种器件。 电荷分离，电荷注入，电荷存储，场效应器件，欧姆接触和化学传感器是可能的。

公开(公告)号：WO2006014437A3

公开(公告)日：2006-11-16

申请号：PCT/US2005023859

申请日：2005-07-05

Applicant: PENN STATE RES FOUND ,  AL-MURRANI SAMER ,  FONASH STEPHEN J ,  HENRY MATTHEW R ,  KALKAN ALI KAAN ,  KRISSINGER DANIEL ,  RAGER TERRY

Inventor： AL-MURRANI SAMER ,  FONASH STEPHEN J ,  HENRY MATTHEW R ,  KALKAN ALI KAAN ,  KRISSINGER DANIEL ,  RAGER TERRY

IPC: G01N15/06 ,  C12M1/34 ,  C12M3/00 ,  G01N21/64 ,  G01N21/66 ,  G01N33/00 ,  G01N33/48 ,  G01N33/553

CPC classification number: G01N21/658 ,  B82Y15/00 ,  B82Y30/00 ,  G01N21/6428 ,  G01N21/648

Abstract: Methods and systems for utilizing metal nanoparticles to enhance optical (UV, visible, and IR, as appropriate) signals from a reporting entity are presented. The methods and systems of this invention do not require the nanoparticles to be attached or adhered to a surface, assembled in a matrix or coated with a spacer coating.

Abstract translation: 提出了利用金属纳米粒子增强来自报告实体的光学（UV，可视和IR，适当）信号的方法和系统。 本发明的方法和系统不需要将纳米颗粒附着或粘附到表面，组装在基质中或用间隔剂涂层涂覆。

公开(公告)号：WO2008127438A2

公开(公告)日：2008-10-23

申请号：PCT/US2007085630

申请日：2007-11-27

Applicant: PENN STATE RES FOUND ,  FONASH STEPHEN J ,  NAM WOOK JUN ,  LIANG HUINAN

Inventor： FONASH STEPHEN J ,  NAM WOOK JUN ,  LIANG HUINAN

IPC: C12M3/00

CPC classification number: F04B19/006 ,  B01L3/50273 ,  B01L2300/0816 ,  B01L2300/0861 ,  B01L2300/088 ,  B01L2300/0896 ,  B01L2400/0487 ,  B82Y30/00

Abstract: A method of active nanofluidic flow control (parallel flow control-PFC) includes providing a nanofluidic channel and a pressure-driven microfluidic channel connected in parallel and actively controlling flow through the nanofluidic channel by using the pressure-driven microfluidic channel. A method of nanofluidic flow measurement includes providing a nanofluidic channel, a pressure-driven microfluidic channel connected in parallel for flow control, and an additional measurement microfluidic channel connected in series for flow measurement and measuring the nanofluidic flow rate by measuring the filling rate in the measurement microfluidic channel. A method of nano-scale volume fluid manipulation includes providing a nanofluidic channel and a pressure-driven microfluidic channel connected in parallel and manipulating nano-scale volume fluid through the nanofluidic channel by using the pressure-driven microfluidic channel. A method of fabricating a fluidic system is provided. The method includes forming a nanofluidic channel and a pressure-driven microfluidic channel connected to the nanofluidic channel in parallel.

Abstract translation: 主动纳流控流量控制（并流控制-PFC）的方法包括提供并联连接的纳流体通道和压力驱动微流体通道，并通过使用压力驱动的微流体通道主动控制流过纳流体通道的流量。 纳流体流量测量的方法包括提供纳流体通道，并联连接用于流量控制的压力驱动的微流体通道，以及串联连接的另外的测量微流体通道以用于流量测量并且通过测量纳流体流量测量中的填充速率来测量纳流体流速 测量微流体通道。 纳米级体积流体操纵的方法包括提供平行连接的纳米流体通道和压力驱动的微流体通道并且通过使用压力驱动的微流体通道操纵纳米流体通道通过纳米流体通道。 提供了一种制造流体系统的方法。 该方法包括形成并联连接到纳米流体通道的纳米流体通道和压力驱动的微流体通道。

公开(公告)号：WO2005107404A2

公开(公告)日：2005-11-17

申请号：PCT/US2005015344

申请日：2005-05-03

Applicant: PENN STATE RES FOUND ,  AL-MURRANI SAMER ,  FONASH STEPHEN J ,  HENRY MATTHEW R ,  KALKAN ALI KAAN ,  KRISSINGER DANIEL ,  RAGER TERRY

Inventor： AL-MURRANI SAMER ,  FONASH STEPHEN J ,  HENRY MATTHEW R ,  KALKAN ALI KAAN ,  KRISSINGER DANIEL ,  RAGER TERRY

IPC: G01N21/64 ,  G01N21/65 ,  G01N33/543 ,  G01N33/58

CPC classification number: G01N33/587 ,  G01N21/6428 ,  G01N21/658 ,  G01N33/54346 ,  G01N33/54393

Abstract: Methods and systems for utilizing metal nanoparticles to enhance optical (UV, visible, and IR, as appropriate) signals from a reporting entity are presented. The methods and systems of this invention do not require the nanoparticles to be attached or adhered to a surface, assembled in a matrix or coated with a spacer coating.

Abstract translation: 提出了利用金属纳米粒子增强来自报告实体的光学（UV，可视和IR，适当）信号的方法和系统。 本发明的方法和系统不需要将纳米颗粒附着或粘附到表面，组装在基质中或用间隔剂涂层涂覆。