公开(公告)号：US3674334A

公开(公告)日：1972-07-04

申请号：US3674334D

申请日：1971-01-04

Applicant: PERKIN ELMER CORP

Inventor： OFFNER ABE

IPC: G02B17/06 ,  G02B23/02

CPC classification number: G02B17/0636 ,  G02B17/0626 ,  G02B17/0631

Abstract: A CATOPTRIC ANASTIGMATIC AFOCAL OPTICAL SYSTEM IS FORMED BY TWO CONCAVE PARABOLOIDAL REFLECTORS OF DIFFERENT POWERS AND A CONVEX HYPERBOLOIDAL REFLECTOR EACH ADAPTED TO RECEIVE AND FOCUS RADIANT ENERGY. A PARABOLOIDAL REFLECTOR AND THE HYPERBOLOIDAL REFLECTOR HAVE THEIR AXES OPTICALLY COINCIDENT AND ARE POSITIONED WITH THE REAL FOCUS OF THIS PARABOLOIDAL REFLECTOR AT THE VIRTUAL FOCUS OF THE HYPERBOLOIDAL REFLECTOR. THE AXIS OF THE OTHER PARABOLOIDAL REFLECTOR IS OPTICALLY COINCIDENT WITH THE AXIS OF THE HYPERBOLOIDAL REFLECTOR AND ITS REAL FOCUS IS COINCIDENT WITH THE REAL FOCUS OF THE COMBINATION OF THE FIRST PARABOLOIDAL REFLECTOR AND THE HYPERBOLOIDALL REFLECTOR. BY HAVING THE SUM OF THE POWERS OF ALL THE REFLECTOR. BY HAVING THE SUM ORDER ABERRATIONS EXCEPT DISTORTION ARE ZERO, IF THE SUM IS NOT ZERO, THIRD ORDER ABERRATIONS, OTHER THAN FIELD CURVATURE AND DISTORTION, ARE ZERO.

公开(公告)号：CA1017988A

公开(公告)日：1977-09-27

申请号：CA260881

申请日：1976-09-10

Applicant: PERKIN ELMER CORP

Inventor： HEMSTREET HAROLD S ,  MARKLE DAVID A ,  NEWELL WILLIAM H ,  OFFNER ABE

IPC: G03F7/20

公开(公告)号：CA1011979A

公开(公告)日：1977-06-14

申请号：CA194422

申请日：1974-03-08

Applicant: PERKIN ELMER CORP

Inventor： HEMSTREET HAROLD S ,  MARKLE DAVID A ,  NEWELL WILLIAM H ,  OFFNER ABE

IPC: H01L21/30 ,  B23Q1/36 ,  G02B17/06 ,  G02B27/18 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027

公开(公告)号：CA1304613C

公开(公告)日：1992-07-07

申请号：CA551529

申请日：1987-11-10

Applicant: PERKIN ELMER CORP

Inventor： SHAFER DAVID R ,  OFFNER ABE ,  SINGH RAMA

IPC: G02B17/00 ,  G02B17/06 ,  G02B17/08 ,  G03F7/20

Abstract: There is disclosed a ring field relay optical system incorporating concave spherical mirrors and including magnification achieved, at least partially, by a convex spherical-mirror. In-further modifications, aberrations introduced by the convex mirror are controlled by lens groups formed from fused silica. The system is usable from the visible through the deep ultraviolet portion of the spectrum.

公开(公告)号：CH623659A5

公开(公告)日：1981-06-15

申请号：CH1154177

申请日：1977-09-21

Applicant: PERKIN ELMER CORP

Inventor： MARKLE DAVID A ,  OFFNER ABE

IPC: G02B17/00 ,  F21S2/00 ,  G02B17/08 ,  G02B19/00 ,  G02B27/00 ,  G03B27/54 ,  G03F7/20 ,  G02B27/58 ,  H01L21/02

公开(公告)号：FR2372379A1

公开(公告)日：1978-06-23

申请号：FR7728457

申请日：1977-09-21

Applicant: PERKIN ELMER CORP

Inventor： MARKLE DAVID A ,  OFFNER ABE

IPC: G02B17/00 ,  F21S2/00 ,  G02B17/08 ,  G02B19/00 ,  G02B27/00 ,  G03B27/54 ,  G03F7/20 ,  F21S3/00

公开(公告)号：DE2410924A1

公开(公告)日：1974-09-26

申请号：DE2410924

申请日：1974-03-05

Applicant: PERKIN ELMER CORP

Inventor： HEMSTREET HAROLD S ,  MARKLE DAVID A ,  NEWELL WILLIAM H ,  OFFNER ABE

IPC: H01L21/30 ,  B23Q1/36 ,  G02B17/06 ,  G02B27/18 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  G03B27/32 ,  G02B17/02

公开(公告)号：DE2230002A1

公开(公告)日：1973-01-11

申请号：DE2230002

申请日：1972-06-20

Applicant: PERKIN ELMER CORP

Inventor： OFFNER ABE

IPC: G02B17/00 ,  G02B17/06 ,  G02B27/18 ,  G03F7/20

Abstract: A catoptric system for forming in accurate micro detail an image of an object at unit magnification with high resolution is provided by convex and concave spherical mirrors arranged with their centers of curvature coinciding at a single point. The mirrors are arranged to produce at least three reflections within the system and they are used in the system with their axial conjugates at said point and to provide two off axis conjugate areas at unit magnification in a plane which contains the center of curvature, the axis of the system being an axis normal to the latter plane and through said point. This combination is free from spherical aberration, coma and distortion and, when the algebraic sum of the powers of the mirror reflecting surfaces utilized is zero, the image produced is free from third order astigmatism and field curvature.

公开(公告)号：DE3065609D1

公开(公告)日：1983-12-22

申请号：DE3065609

申请日：1980-07-17

Applicant: PERKIN ELMER CORP

Inventor： OFFNER ABE ,  MARKLE DAVID A

IPC: G02B27/02 ,  G02B13/24 ,  G02B27/10 ,  G02B27/18 ,  G02B27/40 ,  G03F7/20 ,  G03G15/04 ,  H01L21/027 ,  H01L21/30 ,  H02G1/00

公开(公告)号：CA1090183A

公开(公告)日：1980-11-25

申请号：CA287089

申请日：1977-09-20

Applicant: PERKIN ELMER CORP

Inventor： MARKLE DAVID A ,  OFFNER ABE

IPC: G02B17/00 ,  F21S2/00 ,  G02B17/08 ,  G02B19/00 ,  G02B27/00 ,  G03B27/54 ,  G03F7/20

Abstract: This invention relates to a system for illuminating an annular field disposed about an axis characterized by an arcuate source of radiation disposed concentrically about the axis, and an annular field imaging system having an axis of symmetry coincident with said axis for forming an image of the arcuate source on the annular field.