公开(公告)号：WO2015148111A1

公开(公告)日：2015-10-01

申请号：PCT/US2015/019777

申请日：2015-03-10

Applicant: PIXTRONIX, INC.

Inventor： NEMCHUK, Nikolay I. ,  DUNN, Tyler A. ,  ANDERSSON, Mark B. ,  WU, Joyce H.

IPC: G02B26/02

CPC classification number: G09G3/346 ,  G02B26/023 ,  G02B26/04

Abstract: This disclosure provides systems, methods and apparatus for shutter-based EMS light modulators controlled by electrode actuators that include a compliant inner beam electrode positioned between a movable beam electrode and a fixed beam electrode. A first voltage is applied to the movable beam electrode, and a sufficiently different voltage is applied to one of the compliant beam electrode and the fixed outer beam electrode. During actuation, the movable beam electrode is drawn towards the compliant inner beam electrode, while the combination of the movable beam electrode and the compliant inner beam electrode are further drawn to the fixed beam electrode.

Abstract translation: 本公开提供了由电极致动器控制的基于快门的EMS光调制器的系统，方法和装置，其包括位于可移动光束电极和固定光束电极之间的柔性内束电极。 向可动束电极施加第一电压，并且向柔性束电极和固定外束电极之一施加足够不同的电压。 在致动过程中，可移动光束电极被拉向柔性内束电极，而可移动光束电极和柔性内束电极的组合被进一步拉到固定光束电极。