公开(公告)号：CA2907804A1

公开(公告)日：2014-10-30

申请号：CA2907804

申请日：2014-04-17

Applicant: PLANSEE SE

Inventor： PERL MATTHIAS ,  POLCIK PETER ,  POLZER CONRAD ,  SCHLICHTHERLE STEFAN ,  STRAUSS GEORG

IPC: H01J37/32 ,  C23C14/32

Abstract: The invention relates to an arc evaporation coating source (1), comprising: a target (2) made of a coating material to be evaporated, a ferromagnetic yoke (3) for influencing the evaporation of the coating material to be evaporated and at least one permanently magnetic body (4) for influencing the evaporation of the coating material to be evaporated. The ferromagnetic yoke (3) is arranged in contact with the target (2). The permanently magnetic body (4) is fastened to the target (2) by means of the ferromagnetic yoke (3).

公开(公告)号：CA2793736C

公开(公告)日：2015-01-06

申请号：CA2793736

申请日：2011-04-12

Applicant: PLANSEE SE

Inventor： POLCIK PETER ,  POLZER CONRAD ,  PERL MATTHIAS ,  SCHLICHTHERLE STEFAN ,  STRAUSS GEORG

IPC: C23C14/22 ,  B22F7/06 ,  H01J37/34

Abstract: A coating source -1- for physical vapor deposition is provided, having at least one component -2-; -7-, which is manufactured in a powder-metallurgical production process from at least one pulverulent starting material, and at least one ferromagnetic region -5a-, -5b-, -6- embedded in the component. The at least one ferromagnetic region -5a-, -5b-, -6- is introduced into the component -2-; -7- and fixedly connected to the component in the powder-metallurgical production process.

公开(公告)号：AT13830U1

公开(公告)日：2014-09-15

申请号：AT1312013

申请日：2013-04-22

Applicant: PLANSEE SE

Inventor： SCHLICHTHERLE STEFAN ,  STRAUSS GEORG ,  PERL MATTHIAS ,  POLCIK PETER ,  POLZER CONRAD

IPC: H01J37/317 ,  C23C14/30 ,  H01J37/34

Abstract: Es wird eine Lichtbogenverdampfungs-Beschichtungsquelle (1) bereitgestellt,mit: einem Target (2) aus einem zu verdampfenden Beschichtungsmaterial,einem ferromagnetischen Joch (3) zum Beeinflussen der Verdampfung des zuverdampfenden Beschichtungsmaterials und zumindest einempermanentmagnetischen Körper (4) zum Beeinflussen der Verdampfung des zuverdampfenden Beschichtungsmaterials. Das ferromagnetische Joch (3) ist inKontakt mit dem Target (2) angeordnet. Der permanentmagnetische Körper (4)ist über das ferromagnetische Joch (3) an dem Target (2) befestigt.

公开(公告)号：RU2564642C2

公开(公告)日：2015-10-10

申请号：RU2012141139

申请日：2011-04-12

Applicant: PLANSEE SE

Inventor： POLCIK PETER ,  POLZER CONRAD ,  PERL MATTHIAS ,  SCHLICHTHERLE STEFAN ,  STRAUSS GEORG

IPC: C23C14/24 ,  B22F3/10

Abstract: Изобретениеотноситсяк источнику(1) длянанесенияпокрытиякатодно-дуговымосаждениемизпаровойфазыи способуизготовленияисточникадлянанесенияпокрытия. Источник (1) содержитпоменьшеймереодинкомпонент (2, 7), изготовленныйизпоменьшеймереодногопорошкообразногоисходногоматериалапосредствомпорошковойметаллургии, ипоменьшеймереоднуферромагнитнуюобласть (5a, 5b, 6), встроеннуюв компонент (2, 7). Упомянутуюферромагнитнуюобласть (5a, 5b, 6) вводятв компонент (2, 7) инеподвижносоединяютс компонентомвовремяпроцессаизготовленияспособомпорошковойметаллургии. Изобретениепозволяетобеспечитьвысокуюплотностьмагнитногополянаповерхностимишениисточникананесенияпокрытия. 2 н. и 9 з.п. ф-лы, 11 ил.

公开(公告)号：CA2793736A1

公开(公告)日：2011-10-20

申请号：CA2793736

申请日：2011-04-12

Applicant: PLANSEE SE

Inventor： POLCIK PETER ,  POLZER CONRAD ,  PERL MATTHIAS ,  SCHLICHTHERLE STEFAN ,  STRAUSS GEORG

IPC: C23C14/32 ,  B22F7/06 ,  C23C14/34 ,  H01J37/34

Abstract: The invention provides a coating source -1- for physical vapour deposition, having at least one component -2-; -7- which has been produced from at least one pulverulent starting material in a powder metallurgy production process, and at least one ferromagnetic region -5a-, -5b-, -6- embedded in the component. The at least one ferromagnetic region -5a-, -5b-, -6- is introduced into the component -2-; -7- and fixedly connected to the component during the powder metallurgy production process.

公开(公告)号：AT12021U1

公开(公告)日：2011-09-15

申请号：AT2392010

申请日：2010-04-14

Applicant: PLANSEE SE

Inventor： SCHLICHTHERLE STEFAN ,  STRAUSS GEORG DR ,  POLCIK PETER DR ,  POLZER CONRAD ,  PERL MATTHIAS

IPC: C23C14/35 ,  H01J37/32 ,  H01J37/34

Abstract: The coating source (1) for physical vapor deposition, comprises a component, which is produced from a pulverulent starting material in a powder metallurgy production process, a ferromagnetic region (5a, 5b) embedded in the component, a target (2), a back plate and a holder firmly connected with the target for a thermal connection at a cooled circulation of a coating plant, where the ferromagnetic region has a permanent-magnetic region and a ferromagnetic body from a ferromagnetic material and is introduced into the component and firmly connected to the component. The coating source (1) for physical vapor deposition, comprises a component, which is produced from a pulverulent starting material in a powder metallurgy production process, a ferromagnetic region (5a, 5b) embedded in the component, a target (2), a back plate and a holder firmly connected with the target for a thermal connection at a cooled circulation of a coating plant, where the ferromagnetic region has a permanent-magnetic region and a ferromagnetic body from a ferromagnetic material and is introduced into the component and firmly connected to the component during the powder metallurgy production process. The ferromagnetic region is arranged into the target, the back plate, and the holder. An independent claim is included for a method for producing a coating source.