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    METHOD OF FABRICATING CAPILLARY DISCHARGE PLASMA DISPLAY PANEL USING LIFT-OFF PROCESS
    3.
    发明申请
    METHOD OF FABRICATING CAPILLARY DISCHARGE PLASMA DISPLAY PANEL USING LIFT-OFF PROCESS 审中-公开
    利用升降过程制造毛细管放电等离子体显示面板的方法

    公开(公告)号：WO02071433A9

    公开(公告)日：2002-11-28

    申请号：PCT/US0143070

    申请日：2001-11-13

    Applicant: PLASMION DISPLAYS LLC ,  KIM STEVEN ,  YEOM GEUN YOUNG ,  LEE YOUNG-JOON

    Inventor： KIM STEVEN ,  YEOM GEUN YOUNG ,  LEE YOUNG-JOON

    IPC: H01J9/02 ,  H01J11/12 ,  H01J11/38

    CPC classification number: H01J11/12 ,  H01J9/02 ,  H01J11/38

    Abstract: A method for fabricating a PDP is disclosed. The method for fabricating a PDP comprising the steps of preparing first and second panels for connecting with each other, forming at least one electrode on the first panel, forming a dielectric layer of PbO on the first panel, sequentially forming Cr and Ni on the PbO layer as a mask material of the PbO layer, performing photolithography and lift-off processes on the Ni/Cr layers to form a mask pattern of Ni/Cr, and etching the PbO layer using the mask pattern of Ni/Cr to form at least one capillary tube within the PbO layer to expose the electrode.

    Abstract translation: 公开了一种用于制造PDP的方法。 制造PDP的方法包括以下步骤：制备用于彼此连接的第一和第二面板，在第一面板上形成至少一个电极，在第一面板上形成PbO介电层，在PbO上依次形成Cr和Ni 层作为PbO层的掩模材料，对Ni / Cr层进行光刻和剥离工艺以形成Ni / Cr的掩模图案，并且使用Ni / Cr的掩模图案对PbO层进行蚀刻以至少形成 一个毛细管在PbO层内以暴露电极。

    METHOD OF FABRICATING CAPILLARY DISCHARGE PLASMA DISPLAY PANEL USING COMBINATION OF LASER AND WET ETCHINGS
    4.
    发明申请
    METHOD OF FABRICATING CAPILLARY DISCHARGE PLASMA DISPLAY PANEL USING COMBINATION OF LASER AND WET ETCHINGS 审中-公开
    使用激光和湿蚀刻组合制造毛细管放电等离子体显示面板的方法

    公开(公告)号：WO0241351A3

    公开(公告)日：2003-04-17

    申请号：PCT/US0143068

    申请日：2001-11-13

    Applicant: PLASMION DISPLAYS LLC ,  KIM STEVEN ,  PARK SOOHO ,  YEOM GEUN-YOUNG ,  LEE YOUNG-JOON

    Inventor： KIM STEVEN ,  PARK SOOHO ,  YEOM GEUN-YOUNG ,  LEE YOUNG-JOON

    IPC: H01J9/24 ,  H01J9/02 ,  B23K26/38 ,  H01J17/49

    CPC classification number: H01J9/241

    Abstract: A method of fabricating a plasma display panel having a substrate (41) includes the steps of forming an electrode (42) on the substrate (41), forming a dielectric layer (43) on the substrate (41) including the electrode (42), forming at least one capillary (44) in the dielectric layer (43) using dry-etching, wherein the capillary (44) and the electrode (42) are separated apart by a portion of the dielectric layer (43), and sequentially removing the portion of dielectric layer (43) to expose the electrode (42) through the capillary (45).

    Abstract translation: 一种制造具有基板（41）的等离子体显示面板的方法包括在基板（41）上形成电极（42）的步骤，在包括电极（42）的基板（41）上形成电介质层（43） ，使用干蚀刻在所述电介质层（43）中形成至少一个毛细管（44），其中所述毛细管（44）和所述电极（42）被所述介电层（43）的一部分分隔开，并且顺序地移除 电介质层（43）的部分通过毛细管（45）暴露电极（42）。

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