METHOD OF FABRICATING CAPILLARY DISCHARGE PLASMA DISPLAY PANEL USING LIFT-OFF PROCESS
    2.
    发明申请
    METHOD OF FABRICATING CAPILLARY DISCHARGE PLASMA DISPLAY PANEL USING LIFT-OFF PROCESS 审中-公开
    利用升降过程制造毛细管放电等离子体显示面板的方法

    公开(公告)号:WO02071433A9

    公开(公告)日:2002-11-28

    申请号:PCT/US0143070

    申请日:2001-11-13

    CPC classification number: H01J11/12 H01J9/02 H01J11/38

    Abstract: A method for fabricating a PDP is disclosed. The method for fabricating a PDP comprising the steps of preparing first and second panels for connecting with each other, forming at least one electrode on the first panel, forming a dielectric layer of PbO on the first panel, sequentially forming Cr and Ni on the PbO layer as a mask material of the PbO layer, performing photolithography and lift-off processes on the Ni/Cr layers to form a mask pattern of Ni/Cr, and etching the PbO layer using the mask pattern of Ni/Cr to form at least one capillary tube within the PbO layer to expose the electrode.

    Abstract translation: 公开了一种用于制造PDP的方法。 制造PDP的方法包括以下步骤:制备用于彼此连接的第一和第二面板,在第一面板上形成至少一个电极,在第一面板上形成PbO介电层,在PbO上依次形成Cr和Ni 层作为PbO层的掩模材料,对Ni / Cr层进行光刻和剥离工艺以形成Ni / Cr的掩模图案,并且使用Ni / Cr的掩模图案对PbO层进行蚀刻以至少形成 一个毛细管在PbO层内以暴露电极。

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