公开(公告)号：MY176371A

公开(公告)日：2020-08-04

申请号：MYPI2015700577

申请日：2013-08-28

Applicant: PRAXAIR TECHNOLOGY INC

Inventor： SINHA ASHWINI K ,  BROWN LLOYD ANTHONY ,  CAMPEAU SERGE MARIUS

Abstract: A novel composition, system and method thereof for improving beam current during silicon ion implantation are provided. The silicon ion implant process involves utilizing a first silicon-based co-species and a second species. The second species is selected to have an ionization cross-section higher than that of the first silicon-based species at an operating arc voltage of an ion source utilized during generation and implantation of active silicon ions species. The active silicon ions produce an improved beam current characterized by maintaining or increasing the beam current level without incurring degradation of the ion source when compared to a beam current generated solely from SiF4.

公开(公告)号：SG193381A1

公开(公告)日：2013-10-30

申请号：SG2013067970

申请日：2012-02-24

Applicant: PRAXAIR TECHNOLOGY INC

Inventor： SONG XUEMEI ,  BROWN LLOYD ANTHONY ,  SCHULTE THOMAS

IPC: B01F23/10

Abstract: A dynamic gas blending method for adjusting a concentration of an off -spec gas mixture to a target concentration, comprising the steps of : recycling the off -spec gas mixture upstream of a mixer, wherein the off -spec gas mixture includes a gaseous component at an off -spec concentration; regulating a flow rate of an active gas using a first flow control device, wherein the active gas includes the gaseous component at a concentration greater than the off -spec concentration; regulating a flow rate of a balance gas using a second flow control device, and re-blending the off-spec gas mixture with the active and the balance gases to create a resultant mixture at the target concentration.

公开(公告)号：SG10201406244QA

公开(公告)日：2014-10-30

申请号：SG10201406244Q

申请日：2010-09-24

Applicant: PRAXAIR TECHNOLOGY INC

Inventor： SINHA ASHWINI ,  CAMPEAU SERGE MARIUS ,  BROWN LLOYD ANTHONY

公开(公告)号：DE602007009866D1

公开(公告)日：2010-11-25

申请号：DE602007009866

申请日：2007-12-10

Applicant: PRAXAIR TECHNOLOGY INC

Inventor： COOPER SCOTT LAWRENCE ,  BROWN LLOYD ANTHONY ,  HEIDERMAN DOUGLAS CHARLES ,  MEREDITH BRIAN MICHAEL

IPC: F17C7/04 ,  G05D16/06

公开(公告)号：SG11201500684RA

公开(公告)日：2015-04-29

申请号：SG11201500684R

申请日：2013-08-28

Applicant: PRAXAIR TECHNOLOGY INC

Inventor： SINHA ASHWINI K ,  BROWN LLOYD ANTHONY ,  CAMPEAU SERGE MARIUS

IPC: H01J37/317 ,  H01J37/08

Abstract: A novel composition, system and method thereof for improving beam current during silicon ion implantation are provided. The silicon ion implant process involves utilizing a first silicon-based co-species and a second species. The second species is selected to have an ionization cross-section higher than that of the first silicon-based species at an operating arc voltage of an ion source utilized during generation and implantation of active silicon ions species. The active silicon ions produce an improved beam current characterized by maintaining or increasing the beam current level without incurring degradation of the ion source when compared to a beam current generated solely from SiF4.

公开(公告)号：AT484709T

公开(公告)日：2010-10-15

申请号：AT07855050

申请日：2007-12-10

Applicant: PRAXAIR TECHNOLOGY INC

Inventor： COOPER SCOTT LAWRENCE ,  BROWN LLOYD ANTHONY ,  HEIDERMAN DOUGLAS CHARLES ,  MEREDITH BRIAN MICHAEL

IPC: F17C7/04 ,  G05D16/06

Abstract: A high pressure storage and delivery system having a fail-safe vacuum actuated valve is provided. In particular, through the innovative design of the vacuum actuated check valve, the system can accommodate up to three times the volume of product in similar size cylinders.