公开(公告)号：AU2013274681A1

公开(公告)日：2015-02-05

申请号：AU2013274681

申请日：2013-05-31

Applicant: PURDUE RESEARCH FOUNDATION

Inventor： CLARK JASON V

IPC: B81B7/00 ,  G01C19/56 ,  G01P15/00

Abstract: Methods of measuring displacement of a movable mass in a microelectro- mechanical system (MEMS) include driving the mass against two displacement-stopping surfaces and measuring corresponding differential capacitances of sensing capacitors such as combs. A MEMS device having displacement-stopping surfaces is described. Such a MEMS device can be used in a method of measuring properties of an atomic force microscope (AFM) having a cantilever and a deflection sensor, or in a temperature sensor having a displacement-sensing unit for sensing a movable mass permitted to vibrate along a displacement axis. A motion-measuring device can include pairs of accelerometers and gyroscopes driven 90° out of phase.

公开(公告)号：EP2861524A4

公开(公告)日：2016-07-06

申请号：EP13803842

申请日：2013-05-31

Applicant: PURDUE RESEARCH FOUNDATION

Inventor： CLARK JASON V

IPC: B81C99/00 ,  G01C19/56 ,  G01K11/00 ,  G01P15/08 ,  G01P15/097 ,  G01P15/125 ,  G01P21/00 ,  G01Q40/00

CPC classification number: G01P15/125 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2201/033 ,  B81C99/003 ,  B81C99/0045 ,  G01C19/5755 ,  G01K11/00 ,  G01P15/097 ,  G01P21/00 ,  G01P2015/0871 ,  G01Q20/00 ,  G01Q40/00

Abstract: Methods of measuring displacement of a movable mass in a microelectromechanical system (MEMS) include driving the mass against two displacement-stopping surfaces and measuring corresponding differential capacitances of sensing capacitors such as combs. A MEMS device having displacement-stopping surfaces is described. Such a MEMS device can be used in a method of measuring properties of an atomic force microscope (AFM) having a cantilever and a deflection sensor, or in a temperature sensor having a displacement-sensing unit for sensing a movable mass permitted to vibrate along a displacement axis. A motion-measuring device can include pairs of accelerometers and gyroscopes driven 90° out of phase.

Abstract translation: 在微机电系统（MEMS）中测量可移动质量块的位移的方法包括将驱动质量抵抗两个位移停止表面并测量诸如梳状物之类的感测电容器的对应差分电容。 描述了具有位移停止表面的MEMS器件。 这样的MEMS器件可以用于测量具有悬臂和偏转传感器的原子力显微镜（AFM）的性质的方法中，或者在具有位移感测单元的温度传感器中使用，该位移感测单元用于感测允许沿着 位移轴。 运动测量装置可以包括驱动90°异相的加速度计和陀螺仪对。