公开(公告)号：JP2011155271A

公开(公告)日：2011-08-11

申请号：JP2011044725

申请日：2011-03-02

Applicant: Pyreos Ltd ,  ピレオス リミテッドPyreos Ltd.

Inventor： BRUCHHAUS RAINER ,  PITZER DANA

IPC: H01L21/8246 ,  H01L27/04 ,  H01L21/02 ,  H01L21/316 ,  H01L21/3205 ,  H01L21/822 ,  H01L27/105 ,  H01L27/115 ,  H01L37/02 ,  H01L41/09

CPC classification number: H01L27/11502 ,  H01L28/55

Abstract: PROBLEM TO BE SOLVED: To provide a layer structure including a substrate, a platinum layer, and a ferroelectric layer which has enhanced adhesiveness between the platinum layer and the substrate.
SOLUTION: The layer structure includes a substrate S, a platinum layer PS, and a ferroelectric layer FS formed on the platinum layer PS; a surface OS of the substrate S contains silicon dioxide; and an intermediate layer ZS, formed of amorphous aluminum oxide, is provided between the substrate S and the platinum layer PS. The intermediate layer ZS enhances the morphology of the ferroelectric layer FS and ensures uniformity of the layer structure.
COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供一种层状结构，其包括在铂层和基板之间具有增强的粘合性的基板，铂层和铁电层。 解决方案：层结构包括形成在铂层PS上的衬底S，铂层PS和铁电层FS; 基板S的表面OS包含二氧化硅; 并且在基板S和铂层PS之间设置由非晶态氧化铝形成的中间层ZS。 中间层ZS增强了铁电层FS的形态，并确保了层结构的均匀性。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：DE10058864B4

公开(公告)日：2009-06-25

申请号：DE10058864

申请日：2000-11-27

Applicant: PYREOS LTD

Inventor： RAINER DR ,  KOLB STEFAN ,  PITZER DANA ,  PRIMIG ROBERT ,  SCHREITER MATTHIAS ,  WINKLER BERNHARD

IPC: B81B7/00 ,  B81B3/00 ,  B81C1/00 ,  H01L31/09 ,  H01L37/00