公开(公告)号：US09166271B2

公开(公告)日：2015-10-20

申请号：US13908201

申请日：2013-06-03

Applicant: Purdue Research Foundation

Inventor： Dimitrios Peroulis ,  Adam Fruehling ,  Joshua Azariah Small ,  Xiaoguang Liu ,  Wasim Irshad ,  Muhammad Shoaib Arif

IPC: H01P5/08 ,  H03H7/38 ,  H01P7/06

CPC classification number: H01P7/065

Abstract: A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.

Abstract translation: 可调谐腔谐振器包括基板，盖结构和调谐组件。 盖结构从衬底延伸，并且衬底和帽结构中的至少一个限定谐振器腔。 调谐组件至少部分地位于谐振器腔内。 调谐组件包括多个固定的固定的MEMS光束，其被配置为在激活的位置和去激活位置之间相对于衬底的可控制移动，以调谐可调谐腔谐振器的谐振频率。

公开(公告)号：US20140203896A1

公开(公告)日：2014-07-24

申请号：US13908201

申请日：2013-06-03

Applicant: Purdue Research Foundation

Inventor： Dimitrios Peroulis ,  Adam Fruehling ,  Joshua Azariah Small ,  Xiaoguang Liu ,  Wasim Irshad ,  Muhammad Shoaib Arif

IPC: H01P7/06

CPC classification number: H01P7/065

Abstract: A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.

Abstract translation: 可调谐腔谐振器包括基板，盖结构和调谐组件。 盖结构从衬底延伸，并且衬底和帽结构中的至少一个限定谐振器腔。 调谐组件至少部分地位于谐振器腔内。 调谐组件包括多个固定的固定的MEMS光束，其被配置为在激活的位置和去激活位置之间相对于衬底的可控制移动，以调谐可调谐腔谐振器的谐振频率。