Tunable Cavity Resonator Including A Plurality of MEMS Beams
    1.
    发明申请
    Tunable Cavity Resonator Including A Plurality of MEMS Beams 有权
    包括多个MEMS光束的可调谐腔谐振器

    公开(公告)号:US20140203896A1

    公开(公告)日:2014-07-24

    申请号:US13908201

    申请日:2013-06-03

    CPC classification number: H01P7/065

    Abstract: A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.

    Abstract translation: 可调谐腔谐振器包括基板,盖结构和调谐组件。 盖结构从衬底延伸,并且衬底和帽结构中的至少一个限定谐振器腔。 调谐组件至少部分地位于谐振器腔内。 调谐组件包括多个固定的固定的MEMS光束,其被配置为在激活的位置和去激活位置之间相对于衬底的可控制移动,以调谐可调谐腔谐振器的谐振频率。

    TUNABLE CAVITY RESONATOR
    2.
    发明申请
    TUNABLE CAVITY RESONATOR 有权
    可调节腔谐振器

    公开(公告)号:US20130335173A1

    公开(公告)日:2013-12-19

    申请号:US13907436

    申请日:2013-05-31

    CPC classification number: H01P7/04 B81B7/02 H01P7/06 H01P7/088 H01P7/10

    Abstract: A tunable cavity resonator includes a housing, a post, and a controllably variable capacitive coupling. The housing defines an interior and has at least one side wall, a first end, and a second end. The post is located within the interior and extends from the first end to the second end. The post and the housing define a resonating cavity. The controllably variable capacitive coupling is disposed in the housing.

    Abstract translation: 可调谐腔谐振器包括外壳,支柱和可控制的电容耦合。 壳体限定内部并且具有至少一个侧壁,第一端和第二端。 该柱位于内部并且从第一端延伸到第二端。 柱和壳体定义谐振腔。 可控制的可变电容耦合设置在壳体中。

    Tunable cavity resonator including a plurality of MEMS beams
    4.
    发明授权
    Tunable cavity resonator including a plurality of MEMS beams 有权
    包括多个MEMS光束的可调谐空腔谐振器

    公开(公告)号:US09166271B2

    公开(公告)日:2015-10-20

    申请号:US13908201

    申请日:2013-06-03

    CPC classification number: H01P7/065

    Abstract: A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.

    Abstract translation: 可调谐腔谐振器包括基板,盖结构和调谐组件。 盖结构从衬底延伸,并且衬底和帽结构中的至少一个限定谐振器腔。 调谐组件至少部分地位于谐振器腔内。 调谐组件包括多个固定的固定的MEMS光束,其被配置为在激活的位置和去激活位置之间相对于衬底的可控制移动,以调谐可调谐腔谐振器的谐振频率。

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