公开(公告)号：EP0406030A2

公开(公告)日：1991-01-02

申请号：EP90400529.5

申请日：1990-02-26

Applicant: QC OPTICS, INC.

Inventor： Johnson, Carly E. ,  Ormsby, Jay L. ,  Chase, Eric T. ,  Quackenbos, George S. ,  Broude, Sergey V. ,  Boudour, Abdu

IPC: G01N21/88

CPC classification number: G01N21/95607 ,  G01N2021/4714 ,  G01N2021/95676 ,  G01N2201/1085

Abstract: An optical inspection system and method for detecting flaws on a diffractive surface such as a reticle or wafer, includes illuminating a surface to be inspected to generate a first scattered energy angular distribution in response to a flaw on the surface and a second scattered energy angular distribution in response to an unflawed surface; the first and second energy distributions are sensed and the minimum energy detection energy level is established; determining whether the minimum detected energy level is in a first or second predetermined energy range and indicating that no flaw is present when the minimum detected energy level is in the first range and a flaw is present when the minimum detected energy level is in the second range.

Abstract translation: 为具有衍射表面检测的缺陷的光学检查系统和方法：诸如掩模版或晶片，包括：照明表面，以进行检查，以产生响应的第一散射能量角分布到一个缺陷的表面上以及第二散射能量的角分布 响应于在无缺陷表面上; 所述第一和第二能量分布进行感测和最小能量检测能量水平被建立; 确定性采矿无论最小检测的能量电平是在第一或第二预定能量范围和表示没有无缺陷是存在当最小检测的能量电平是在第一范围和一个缺陷是存在当最小检测的能量电平是在所述第二范围 ，

公开(公告)号：EP0290227A2

公开(公告)日：1988-11-09

申请号：EP88304001.6

申请日：1988-05-03

Applicant: QC OPTICS, INC.

Inventor： Quackenbos, George S. ,  Ormsby, Jay L. ,  Nishine, Koichi ,  Chase, Eric T. ,  Broude, Sergey V.

IPC: G01N21/88

CPC classification number: G01N21/88 ,  G01N21/9506

Abstract: An apparatus and method for uniquely detecting pits on a smooth surface by irradiating an area of the surface; separately sensing radiation scattered from the surface in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw and producing signals representative thereof; normalizing the near-specular signal with respect to the far-specular signal to indicate a pit; and discriminating the near-specular components of the normalized signal representative of surface pits.

Abstract translation: 一种用于通过照射表面的区域来在光滑表面上唯一地检测凹坑的装置和方法; 单独地感测从指示凹坑的近镜面区域中的表面散射的辐射和指示缺陷的远镜面区域并产生表示其的信号; 将近似镜面信号相对于远镜面信号归一化以指示凹坑; 并识别代表表面凹坑的归一化信号的近似镜面分量。

公开(公告)号：EP0290228B1

公开(公告)日：1992-12-09

申请号：EP88304004.0

申请日：1988-05-03

Applicant: QC OPTICS, INC.

Inventor： Quackenbos, George S. ,  Ormsby, Jay L. ,  Nishine, Koichi ,  Chase, Eric T. ,  Broude, Sergey V.

IPC: G01N21/88

CPC classification number: G01N21/88 ,  G01N21/9506

公开(公告)号：EP0290227B1

公开(公告)日：1992-07-22

申请号：EP88304001.6

申请日：1988-05-03

Applicant: QC OPTICS, INC.

Inventor： Quackenbos, George S. ,  Ormsby, Jay L. ,  Nishine, Koichi ,  Chase, Eric T. ,  Broude, Sergey V.

IPC: G01N21/88

CPC classification number: G01N21/88 ,  G01N21/9506

公开(公告)号：EP0406030A3

公开(公告)日：1991-10-23

申请号：EP90400529.5

申请日：1990-02-26

Applicant: QC OPTICS, INC.

Inventor： Johnson, Carly E. ,  Ormsby, Jay L. ,  Chase, Eric T. ,  Quackenbos, George S. ,  Broude, Sergey V. ,  Boudour, Abdu

IPC: G01N21/88

CPC classification number: G01N21/95607 ,  G01N2021/4714 ,  G01N2021/95676 ,  G01N2201/1085

Abstract: An optical inspection system and method for detecting flaws on a diffractive surface such as a reticle or wafer, includes illuminating a surface to be inspected to generate a first scattered energy angular distribution in response to a flaw on the surface and a second scattered energy angular distribution in response to an unflawed surface; the first and second energy distributions are sensed and the minimum energy detection energy level is established; determining whether the minimum detected energy level is in a first or second predetermined energy range and indicating that no flaw is present when the minimum detected energy level is in the first range and a flaw is present when the minimum detected energy level is in the second range.

公开(公告)号：EP0290228A2

公开(公告)日：1988-11-09

申请号：EP88304004.0

申请日：1988-05-03

Applicant: QC OPTICS, INC.

Inventor： Quackenbos, George S. ,  Ormsby, Jay L. ,  Nishine, Koichi ,  Chase, Eric T. ,  Broude, Sergey V.

IPC: G01N21/88

CPC classification number: G01N21/88 ,  G01N21/9506

Abstract: A surface inspection defect detection and confirmation technique in which a beam of radiation is directed at the surface to be inspected; the radiation scattered from the surface is separately sensed in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw, the near-specular region signal and far-specular region signal are normalized, the near-specular component is discriminated, and the flaw signal is indicated as being a defect and not contamination when there is coincidence between the pit signal and flaw signal.

Abstract translation: 表面检查缺陷检测和确认技术，其中辐射束指向待检查的表面; 从表面散射的辐射在指示凹坑的近似镜面区域和在指示缺陷的远镜面区域中被单独感测，近镜面区域信号和远镜面区域信号被归一化，近似镜面 鉴别出分量，并且当凹坑信号和缺陷信号之间存在一致时，缺陷信号被表示为缺陷，而不是污染。

公开(公告)号：EP0406030B1

公开(公告)日：1995-05-03

申请号：EP90400529.5

申请日：1990-02-26

Applicant: QC OPTICS, INC.

Inventor： Johnson, Carly E. ,  Ormsby, Jay L. ,  Chase, Eric T. ,  Quackenbos, George S. ,  Broude, Sergey V. ,  Boudour, Abdu

IPC: G01N21/88

CPC classification number: G01N21/95607 ,  G01N2021/4714 ,  G01N2021/95676 ,  G01N2201/1085

公开(公告)号：EP0290227A3

公开(公告)日：1990-03-14

申请号：EP88304001.6

申请日：1988-05-03

Applicant: QC OPTICS, INC.

Inventor： Quackenbos, George S. ,  Ormsby, Jay L. ,  Nishine, Koichi ,  Chase, Eric T. ,  Broude, Sergey V.

IPC: G01N21/88

CPC classification number: G01N21/88 ,  G01N21/9506

Abstract: An apparatus and method for uniquely detecting pits on a smooth surface by irradiating an area of the surface; separately sensing radiation scattered from the surface in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw and producing signals representative thereof; normalizing the near-specular signal with respect to the far-specular signal to indicate a pit; and discriminating the near-specular components of the normalized signal representative of surface pits.

公开(公告)号：EP0290228A3

公开(公告)日：1989-06-21

申请号：EP88304004.0

申请日：1988-05-03

Applicant: QC OPTICS, INC.

Inventor： Quackenbos, George S. ,  Ormsby, Jay L. ,  Nishine, Koichi ,  Chase, Eric T. ,  Broude, Sergey V.

IPC: G01N21/88

CPC classification number: G01N21/88 ,  G01N21/9506

Abstract: A surface inspection defect detection and confirmation technique in which a beam of radiation is directed at the surface to be inspected; the radiation scattered from the surface is separately sensed in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw, the near-specular region signal and far-specular region signal are normalized, the near-specular component is discriminated, and the flaw signal is indicated as being a defect and not contamination when there is coincidence between the pit signal and flaw signal.