公开(公告)号：WO2014058800A1

公开(公告)日：2014-04-17

申请号：PCT/US2013/063730

申请日：2013-10-07

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.

Inventor： BURNS, David William ,  FELNHOFER, Daniel ,  ELLOWAY, Donald John

IPC: H04M1/60 ,  G06F3/044 ,  G06F3/041

CPC classification number: H04M1/605 ,  G06F3/044 ,  G06F3/0484 ,  G06F3/04883 ,  G06F2203/04103 ,  H04M2250/22

Abstract: A mobile device may include a sensor array. The sensor array may be a touch sensor array, such as a projected capacitive touch (PCT) sensor array. The mobile device may be configured to determine whether one or more sensor signals from the sensor array indicate an ear gesture and/or the presence of an ear. One or more device operations may be invoked according to the determination.

Abstract translation: 移动设备可以包括传感器阵列。 传感器阵列可以是触摸传感器阵列，例如投影电容式触摸（PCT）传感器阵列。 移动设备可以被配置为确定来自传感器阵列的一个或多个传感器信号是否指示耳朵手势和/或耳朵的存在。 可以根据确定来调用一个或多个设备操作。

公开(公告)号：WO2009064679A1

公开(公告)日：2009-05-22

申请号：PCT/US2008/082894

申请日：2008-11-07

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  FELNHOFER, Daniel ,  GOUSEV, Evgeni

Inventor： FELNHOFER, Daniel ,  GOUSEV, Evgeni

IPC: G02B26/08 ,  G02B26/00

CPC classification number: B81B3/0086 ,  B81B2201/045 ,  G02B26/001 ,  G11C23/00

Abstract: A capacitive MEMS device is formed having a material (722) between electrodes (712, 714) that traps and retains charges. The material can be realized in several configurations. It can be a multilayer dielectric stack with regions of different band gap energies or band energy levels. The dielectric materials can be trappy itself, i.e. when defects or trap sites are pre-fabricated in the material. Another configuration involves a thin layer of a conductive material with the energy level in the forbidden gap of the dielectric layer. The device may be programmed (i.e. offset and threshold voltages pre-set) by a method making advantageous use of charge storage in the material (722), wherein the interferometric modulator (12a, 12b) is pre-charged in such a way that the hysteresis curve shifts, and the actuation voltage threshold of the modulator is significantly lowered. During programming phase, charge transfer between the electrodes (712, 714) and the materials (722) can be performed by applying voltage to the electrodes (712, 714) (i.e. applying electrical field across the material) or by UV-illumination and injection of electrical charges over the energy barrier. The interferometric modulator (12a, 12b) may then be retained in an actuated state with a significantly lower actuation voltage, thereby saving power.

Abstract translation: 电容MEMS器件形成为具有陷阱并保持电荷的电极（712,714）之间的材料（722）。 该材料可以在几种配置中实现。 它可以是具有不同带隙能量或带能级的区域的多层电介质叠层。 电介质材料本身可以是歪斜的，即当在材料中预先制造缺陷或捕获位置时。 另一种结构涉及导电材料的薄层，其中电介质层的禁止间隙具有能级。 可以通过有利地使用材料（722）中的电荷存储的方法来对器件进行编程（即，预置的偏移和阈值电压），其中干涉式调制器（12a，12b）以如下方式预充电： 滞后曲线偏移，并且调制器的致动电压阈值显着降低。 在编程阶段期间，电极（712,714）和材料（722）之间的电荷转移可以通过向电极（712,714）施加电压（即，跨过材料施加电场）或通过UV照射和注入 的能量屏障上的电荷。 然后可以将干涉式调制器（12a，12b）保持在具有显着较低的致动电压的致动状态，从而节省功率。

公开(公告)号：WO2013082165A1

公开(公告)日：2013-06-06

申请号：PCT/US2012/066870

申请日：2012-11-28

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.

Inventor： DE GROOT, Wilhelmus A. ,  FELNHOFER, Daniel

IPC: G01L1/10

CPC classification number: G01L1/103 ,  G01D5/28 ,  G01K11/26 ,  G01L5/0047 ,  G01L9/0011 ,  G01L9/002 ,  G01M99/005 ,  G02B26/001 ,  G09G3/006 ,  G09G3/3466

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for testing an electromechanical systems (EMS) device. In one aspect, a laser is directed at a driven EMS device, and the reflected light pattern is analyzed to provide information regarding the characteristics of the driven EMS device. In some aspects, the reflected light pattern is analyzed to determine a resonant frequency of the EMS device or the damping forces acting on the EMS device. The resonant frequency can then be used to determine stresses within the EMS device, or pressure or temperature within a device package encapsulating the EMS device.

Abstract translation: 本公开提供了用于测试机电系统（EMS）设备的系统，方法和装置，包括在计算机存储介质上编码的计算机程序。 在一个方面，激光被引导到被驱动的EMS装置，并且分析反射光图案以提供关于所驱动的EMS装置的特性的信息。 在一些方面，分析反射光图案以确定EMS装置的谐振频率或作用在EMS装置上的阻尼力。 然后谐振频率可用于确定EMS设备内的应力，或者封装EMS设备的设备封装内的压力或温度。

公开(公告)号：WO2012027340A1

公开(公告)日：2012-03-01

申请号：PCT/US2011/048769

申请日：2011-08-23

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  FELNHOFER, Daniel ,  DE GROOT, Wihelmus, A.

Inventor： FELNHOFER, Daniel ,  DE GROOT, Wihelmus, A.

IPC: G01N27/22 ,  B81B3/00

CPC classification number: G01N27/223

Abstract: A system (1200) and method for determining humidity based on determination of an offset voltage shift are disclosed. In one embodiment, a system for determining humidity comprises an electromechanical device )1210) comprising a first layer (1211), a second layer (1212), and a dielectric (1213) between the two layers, wherein the dielectric is spaced apart from at least one of the first and second layers in an unactuated state of the electromechanical device, and wherein the dielectric contacts both the first and second layers in an actuated state of the electromechanical device, a voltage source (1220) configured to apply, between the first and second layers, one or more voltages, and a processor (1230) configured to control the voltage source, to determine an offset voltage shift based on the applied voltages, and to determine information regarding humidity about the device based on the offset voltage shift.

Abstract translation: 公开了一种基于偏移电压偏移的确定来确定湿度的系统（1200）和方法。 在一个实施例中，用于确定湿度的系统包括机电装置1210），其包括在两个层之间的第一层（1211），第二层（1212）和电介质（1213），其中电介质与第二层 在机电装置的未致动状态下的第一和第二层中的至少一个，并且其中电介质在机电装置的致动状态下接触第一和第二层;电压源（1220），被配置为在第一和第二层之间施加第一和第二层 和第二层，一个或多个电压以及被配置为控制电压源的处理器（1230），以基于所施加的电压来确定偏移电压偏移，并且基于偏移电压偏移来确定关于器件的湿度的信息。

公开(公告)号：EP2907294A1

公开(公告)日：2015-08-19

申请号：EP13779493.9

申请日：2013-10-07

Applicant: Qualcomm Mems Technologies, Inc.

Inventor： BURNS, David William ,  FELNHOFER, Daniel ,  ELLOWAY, Donald John

IPC: H04M1/60 ,  G06F3/044 ,  G06F3/041

CPC classification number: H04M1/605 ,  G06F3/044 ,  G06F3/0484 ,  G06F3/04883 ,  G06F2203/04103 ,  H04M2250/22

Abstract: A mobile device may include a sensor array. The sensor array may be a touch sensor array, such as a projected capacitive touch (PCT) sensor array. The mobile device may be configured to determine whether one or more sensor signals from the sensor array indicate an ear gesture and/or the presence of an ear. One or more device operations may be invoked according to the determination.

Abstract translation: 移动设备可以包括传感器阵列。 传感器阵列可以是触摸传感器阵列，例如投影电容式触摸（PCT）传感器阵列。 移动设备可以被配置为确定来自传感器阵列的一个或多个传感器信号是否指示耳朵手势和/或耳朵的存在。 可以根据确定来调用一个或多个设备操作。

公开(公告)号：WO2014116521A1

公开(公告)日：2014-07-31

申请号：PCT/US2014/012091

申请日：2014-01-17

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.

Inventor： ZHONG, Fan ,  SETHI, Guneet ,  FELNHOFER, Daniel ,  TU, Thanh Nghia

IPC: G02B26/08 ,  G09G3/34

CPC classification number: G02B26/002 ,  G02B26/0841 ,  G09G3/3466 ,  G09G2300/0426 ,  G09G2330/04

Abstract: This disclosure provides systems, methods and apparatus for reducing image artifacts that arise when a display is exposed to sunlight over time. Various implementations disclosed herein can be implemented to prevent charge injection from inducing a negative offset voltage shift for display elements in the display. In one aspect, a buffer layer is applied to block electrons from being photoelectrically ejected from a movable reflective layer of a display element and into a stationary optical stack of the display element.

Abstract translation: 本公开提供了用于减少当显示器随时间暴露于阳光下时出现的图像伪像的系统，方法和装置。 可以实现本文公开的各种实现方式，以防止电荷注入对显示器中的显示元件引起负偏移电压偏移。 一方面，施加缓冲层以阻挡电子从显示元件的可移动反射层光电喷射到显示元件的固定光学堆叠中。

公开(公告)号：WO2013074406A1

公开(公告)日：2013-05-23

申请号：PCT/US2012/064382

申请日：2012-11-09

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.

Inventor： DU, Yan ,  DJORDJEV, Kostadin D. ,  ENDISCH, Denis H. ,  DE GROOT, Wilhelmus A. ,  FELNHOFER, Daniel

IPC: G05B23/02 ,  G09G3/34

CPC classification number: G09G3/3466 ,  G05B23/0283 ,  G09G3/006 ,  G09G2320/048 ,  G09G2320/0693

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for estimating the lifetime or remaining lifetime of an electromechanical systems (EMS) device. In one aspect, a parameter of the device, such as a release or actuation voltage, is measured. The parameter measurement is used in conjunction with a model of the aging of the device according to the measured parameter to determine an estimated remaining lifetime of the device.

Abstract translation: 本公开提供了系统，方法和装置，包括在计算机存储介质上编码的计算机程序，用于估计机电系统（EMS）设备的寿命或剩余寿​​命。 在一个方面，测量设备的参数，例如释放或致动电压。 参数测量与设备的老化模型结合使用，根据测量参数确定设备的估计剩余寿命。

公开(公告)号：WO2013059580A1

公开(公告)日：2013-04-25

申请号：PCT/US2012/061005

申请日：2012-10-19

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.

Inventor： FELNHOFER, Daniel ,  ZHANG, Wenyue ,  LAN, Je-Hsiung

IPC: G02B26/08 ,  H01G5/16

CPC classification number: H01G5/16 ,  G02B26/001

Abstract: This disclosure provides systems, methods and apparatus for electromechanical systems variable capacitance devices. In one aspect, an electromechanical systems variable capacitance device includes a substrate with a first metal layer including a first bias electrode overlying the substrate. A member suspended above the first metal layer includes a dielectric beam and a second metal layer including a first radio frequency electrode and a ground electrode. The member and the first metal layer define a first air gap. A third metal layer over the member includes a second bias electrode, and the third metal layer and the member define a second air gap. The member includes a plane of symmetry substantially parallel a plane containing the first bias electrode.

Abstract translation: 本公开提供了用于机电系统可变电容器件的系统，方法和装置。 一方面，机电系统可变静电电容器件包括具有第一金属层的衬底，第一金属层包括覆盖衬底的第一偏置电极。 悬挂在第一金属层上方的构件包括电介质束和包括第一射频电极和接地电极的第二金属层。 构件和第一金属层限定第一气隙。 该构件上的第三金属层包括第二偏置电极，并且第三金属层和构件限定第二气隙。 该构件包括基本平行于包含第一偏置电极的平面的对称平面。

公开(公告)号：WO2013058946A1

公开(公告)日：2013-04-25

申请号：PCT/US2012/057362

申请日：2012-09-26

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.

Inventor： FELNHOFER, Daniel ,  ZHANG, Wenyue ,  LAN, Je-Hsuing

IPC: G01J1/26 ,  G02B26/00 ,  H01G5/18

CPC classification number: G01J1/26 ,  G02B26/001 ,  H01G5/18 ,  Y10T29/43

Abstract: This disclosure provides systems, methods and apparatus for electromechanical systems variable capacitance devices. In one aspect, an electromechanical systems variable capacitance device includes a substrate with a bottom bias electrode on the substrate. A first radio frequency electrode above the bottom bias electrode defines a first air gap. A non-planarized first dielectric layer is between the bottom bias electrode and the first radio frequency electrode. A metal layer above the first radio frequency electrode defines a second air gap. The metal layer includes a top bias electrode and a second radio frequency electrode.

Abstract translation: 本公开提供了用于机电系统可变电容器件的系统，方法和装置。 一方面，机电系统可变静电电容器件包括在衬底上具有底部偏置电极的衬底。 底部偏置电极上方的第一射频电极限定第一气隙。 非平面化的第一介电层位于底部偏置电极和第一射频电极之间。 第一射频电极上方的金属层限定第二气隙。 金属层包括顶部偏置电极和第二射频电极。