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公开(公告)号：DE69633183D1
公开(公告)日：2004-09-23
申请号：DE69633183
申请日：1996-06-28
Applicant: RADOS TECHNOLOGY OY TURKU
Inventor： OIKARI TIMO , KAHILAINEN JUKKA , HAASLAHTI JUKKA
IPC: H01L21/8247 , H01L27/115 , H01L29/788 , H01L29/792 , H01L31/10 , H01L31/113 , H01L31/12
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公开(公告)号：DE69633183T2
公开(公告)日：2005-08-18
申请号：DE69633183
申请日：1996-06-28
Applicant: RADOS TECHNOLOGY OY TURKU
Inventor： OIKARI TIMO , KAHILAINEN JUKKA , HAASLAHTI JUKKA
IPC: H01L21/8247 , H01L27/115 , H01L29/788 , H01L29/792 , H01L31/10 , H01L31/113 , H01L31/12
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