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公开(公告)号:US3158512A
公开(公告)日:1964-11-24
申请号:US19446662
申请日:1962-05-14
Applicant: RCA CORP
Inventor: HERBERT NELSON , BENYON JR CARL W
CPC classification number: H01L21/00 , C30B19/061 , H01L21/185 , H01L29/00 , Y10S148/107 , Y10S438/915 , Y10S438/925