公开(公告)号：AU2003263744A1

公开(公告)日：2003-12-22

申请号：AU2003263744

申请日：2003-06-11

Applicant: REFLECTIVITY INC

Inventor： PATEL SATYADEV ,  HUIBERS ANDREW ,  RICHARDS PETER ,  SHI HONGQIN ,  CHIANG STEVE ,  DUBOC ROBERT JR ,  GROBELNY THOMAS ,  DEHLINGER DIETRICH ,  SUN ANTHONY ,  CHEN HUNG NAN

IPC: B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C3/00 ,  B81C99/00 ,  G02B26/08 ,  H01L21/301 ,  H01L21/60 ,  H01L23/02 ,  H01L23/22 ,  H01L23/24 ,  H01L21/00 ,  H01L21/30 ,  H01L21/46 ,  G02B26/00

Abstract: A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.