公开(公告)号：JP2005099793A

公开(公告)日：2005-04-14

申请号：JP2004257715

申请日：2004-09-03

Applicant: Reflectivity Inc ,  リフレクティヴィティー, インク.

Inventor： HUIBERS ANDREW G ,  ILKOV FEDOR ,  PATEL SATYADEV ,  RICHARDS PETER W ,  STOCKTON JOHN

IPC: B81B3/00 ,  B81B7/02 ,  B81B7/04 ,  B81C1/00 ,  G02B26/08 ,  G02B27/18 ,  G03B21/00 ,  G03B21/10 ,  H04N3/08 ,  H04N5/74

CPC classification number: G02B26/0841 ,  B81B7/0067 ,  G02B26/0833 ,  G03B21/28 ,  G03F7/70291 ,  H04N5/7458

Abstract: PROBLEM TO BE SOLVED: To minimize diffracted light in a switching direction with respect to a mobile micromirror and a micromirror array in a projection display device or the like. SOLUTION: A micromirror being not rectangular is adopted in order to minimize diffraction of light in the switching direction, namely, diffraction of light to a light receiving cone of a light condensing system. In order to minimize the cost of an irradiation system and the size of a display unit, a light source is arranged perpendicularly to rows (or columns) of an array or perpendicularly to a side of a frame demarcating an effective area of the array. Incident light is not practically perpendicular to side surfaces of individual micromirrors in the array. Perpendicular side surfaces diffract incident light in the direction of micromirror switching. This light diffraction decreases the contrast ratio of the micromirror, and thus an improved and more compact system is obtained. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了使相对于投影显示装置等中的移动微镜和微镜阵列的切换方向的衍射光最小化。 解决方案：采用不是矩形的微镜，以便使切换方向上的光的衍射最小化，即将光衍射到聚光系统的光接收锥。 为了最小化照射系统的成本和显示单元的尺寸，光源垂直于阵列的行（或列）布置或垂直于框架边界排列阵列的有效区域。 入射光实际上并不垂直于阵列中各个微镜的侧表面。 垂直侧面沿微镜切换方向衍射入射光。 该光衍射降低了微反射镜的对比度，从而获得了改进的和更紧凑的系统。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2005122145A

公开(公告)日：2005-05-12

申请号：JP2004272332

申请日：2004-09-17

Applicant: Reflectivity Inc ,  リフレクティヴィティー, インク.

Inventor： HUIBERS ANDREW G ,  ILKOV FEDOR ,  PATEL SATYADEV ,  RICHARDS PETER W ,  STOCKTON JOHN

IPC: B81B3/00 ,  B81B7/02 ,  B81B7/04 ,  B81C1/00 ,  G02B26/08 ,  G02B27/18 ,  G03B21/00 ,  G03B21/10 ,  H04N3/08 ,  H04N5/74

CPC classification number: G02B26/0841 ,  B81B7/0067 ,  G02B26/0833 ,  G03B21/28 ,  G03F7/70291 ,  H04N5/7458

Abstract: PROBLEM TO BE SOLVED: To provide micromirrors to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of a collection optics. SOLUTION: In the present invention, a light source is placed orthogonal to the rows (or columns) of an array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. An incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in minimum light leakage into 'on' state even if the micromirrors are in the 'off' state to thereby improve a contrast ratio. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供微镜以使沿着切换方向的光衍射最小化，更具体地说，是将光衍射最小化到收集光学器件的接收锥中。 解决方案：在本发明中，将光源放置成与阵列的行（或列）正交，和/或将光源正交于限定阵列的有源区域的框架的侧面。 然而，入射光束虽然正交于有源区域的侧面，但是不是与阵列中的各个微镜的任何相当大部分的侧面正交。 正交侧使得入射光沿着微镜切换的方向衍射，即使微镜处于“关”状态，导致最小的光泄漏到“开”状态，从而提高对比度。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2006178447A

公开(公告)日：2006-07-06

申请号：JP2005353848

申请日：2005-12-07

Applicant: Reflectivity Inc ,  リフレクティヴィティー, インク.

Inventor： HUIBERS ANDREW G ,  ILKOV FEDOR ,  PATEL SATYADEV ,  RICHARDS PETER W ,  STOCKTON JOHN

IPC: G02B26/08 ,  B81B3/00 ,  B81B7/02 ,  B81B7/04 ,  B81C1/00 ,  G02B27/18 ,  G03B21/00 ,  G03B21/10 ,  H04N3/08 ,  H04N5/74

CPC classification number: G02B26/0841 ,  B81B7/0067 ,  G02B26/0833 ,  G03B21/28 ,  G03F7/70291 ,  H04N5/7458

Abstract: PROBLEM TO BE SOLVED: To provide micromirrors which are not rectangular to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of a collection optics. SOLUTION: A light source 114 is placed orthogonal to the rows (or columns) of the array, and/or the light source 114 is placed orthogonal to a side of the frame defining the active area 94 of the array. An incident light beam 116, though orthogonal to the sides of the active area, is not substantially orthogonal to any side surface of the individual micromirrors in the array. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供不是矩形的微镜，以使沿着切换方向的光衍射最小化，更具体地说，是将光学衍射更好地聚集到收集光学器件的接收锥体中。 解决方案：将光源114放置成与阵列的行（或列）正交，和/或将光源114正交于限定阵列的有源区域94的框架的侧面。 入射光束116虽然与有源区域的侧面正交，但基本上不与阵列中的各个微镜的任何侧表面正交。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005122146A

公开(公告)日：2005-05-12

申请号：JP2004272333

申请日：2004-09-17

Applicant: Reflectivity Inc ,  リフレクティヴィティー, インク.

Inventor： HUIBERS ANDREW G ,  ILKOV FEDOR ,  PATEL SATYADEV ,  RICHARDS PETER W ,  STOCKTON JOHN

IPC: B81B3/00 ,  B81B7/02 ,  B81B7/04 ,  B81C1/00 ,  G02B26/08 ,  G02B27/18 ,  G03B21/00 ,  G03B21/10 ,  H04N3/08 ,  H04N5/74

CPC classification number: G02B26/0841 ,  B81B7/0067 ,  G02B26/0833 ,  G03B21/28 ,  G03F7/70291 ,  H04N5/7458

Abstract: PROBLEM TO BE SOLVED: To provide micromirrors which are not rectangular to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of a collection optics. SOLUTION: A light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. An incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. This structure and design suppress the light diffraction and improve contrast ratio, and the arrangement of the light source to micromirror array results in a more compact system. The micromirrors pivot in opposite direction to on and off positions, where the movement to the on position is greater than movement to the off position. A package has a window that is not parallel to the substrate upon which the micromirrors are formed. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供不是矩形的微镜，以使沿着切换方向的光衍射最小化，更具体地说，是将光学衍射更好地聚集到收集光学器件的接收锥体中。 解决方案：将光源放置成与阵列的行（或列）正交，和/或将光源正交于限定阵列的有效区域的框架的侧面。 然而，入射光束虽然正交于有源区域的侧面，但是不是与阵列中的各个微镜的任何相当大部分的侧面正交。 这种结构和设计抑制了光衍射并提高了对比度，并且光源与微镜阵列的配置导致了更紧凑的系统。 微反射镜以相对于打开和关闭位置的方向枢转，其中到打开位置的移动大于移动到关闭位置。 封装具有不平行于形成微反射镜的基板的窗口。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：AU9322501A

公开(公告)日：2002-03-13

申请号：AU9322501

申请日：2001-08-28

Applicant: REFLECTIVITY INC

Inventor： PATEL SATYADEV ,  SCHAADT GREGORY P ,  MACDONALD DOUGLAS B ,  MACDONALD NILES K

IPC: H01L21/302 ,  B81B3/00 ,  C03C15/00 ,  C23F1/00 ,  C23F1/08 ,  C23F1/12 ,  C25F3/12 ,  H01L20060101 ,  H01L21/00

Abstract: Processes for the addition or removal of a layer or region from a workpiece material by contact with a process gas in the manufacture of a microstructure are enhanced by the use of recirculation of the process gas. Recirculation is effected by a pump that has no sliding or abrading parts that contact the process gas, nor any wet (such as oil) seals or purge gas in the pump. Improved processing can be achieved by a process chamber that contains a baffle, a perforated plate, or both, appropriately situated in the chamber to deflect the incoming process gas and distribute it over the workpiece surface. In certain embodiments, a diluent gas is added to the recirculation loop and continuously circulated therein, followed by the bleeding of the process gas (such as an etchant gas) into the recirculation loop. Also, cooling of the process gas, etching chamber and/or sample platen can aid the etching process. The method is particularly useful for adding to or removing material from a sample of microscopic dimensions.

公开(公告)号：AU2003263744A1

公开(公告)日：2003-12-22

申请号：AU2003263744

申请日：2003-06-11

Applicant: REFLECTIVITY INC

Inventor： PATEL SATYADEV ,  HUIBERS ANDREW ,  RICHARDS PETER ,  SHI HONGQIN ,  CHIANG STEVE ,  DUBOC ROBERT JR ,  GROBELNY THOMAS ,  DEHLINGER DIETRICH ,  SUN ANTHONY ,  CHEN HUNG NAN

IPC: B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C3/00 ,  B81C99/00 ,  G02B26/08 ,  H01L21/301 ,  H01L21/60 ,  H01L23/02 ,  H01L23/22 ,  H01L23/24 ,  H01L21/00 ,  H01L21/30 ,  H01L21/46 ,  G02B26/00

Abstract: A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.

公开(公告)号：AU8101901A

公开(公告)日：2002-02-18

申请号：AU8101901

申请日：2001-08-03

Applicant: REFLECTIVITY INC

Inventor： HUIBERS ANDREW G ,  ILKOV FEDOR ,  PATEL SATYADEV ,  RICHARDS PETER W ,  STOCKTON JOHN

IPC: B81B3/00 ,  B81B7/02 ,  B81B7/04 ,  B81C1/00 ,  G02B26/08 ,  G02B27/18 ,  G03B21/00 ,  G03B21/10 ,  H04N3/08 ,  H04N5/74

Abstract: A micro-mirror (24) is connected to a substrate (10) via a post (21), a hinge (18c), a post (16c) and metal areas (12a) and an array of the micro-mirrors is disposed in a rectangular shape with a capability of rotation around a switching axis between on and off states corresponding to pixels in a viewed image. Light is directed from a source to the mirrors non-perpendicularly to at least two sides of each mirror, while reflected light is received from collection optics. Independent claims are included for an array of movable micro-mirrors, for a method of positioning an image on a target, for a method of spatially modulating light beams, for an optical micro-mirror element, for a packaged micro-electromechanical device and for a method of making a micro-mirror.

公开(公告)号：WO0212925A3

公开(公告)日：2002-09-06

申请号：PCT/US0124332

申请日：2001-08-03

Applicant: REFLECTIVITY INC ,  HUIBERS ANDREW G ,  ILKOV FEDOR ,  PATEL SATYADEV ,  RICHARDS PETER W ,  STOCKTON JOHN

Inventor： HUIBERS ANDREW G ,  ILKOV FEDOR ,  PATEL SATYADEV ,  RICHARDS PETER W ,  STOCKTON JOHN

IPC: B81B3/00 ,  B81B7/02 ,  B81B7/04 ,  B81C1/00 ,  G02B26/08 ,  G02B27/18 ,  G03B21/00 ,  G03B21/10 ,  H04N3/08 ,  H04N5/74 ,  G02B26/00 ,  G03B21/28

CPC classification number: G02B26/0841 ,  B81B7/0067 ,  G02B26/0833 ,  G03B21/28 ,  G03F7/70291 ,  H04N5/7458

Abstract: Micromirrors are provided which are not rectangular in order to minimize light diffraction along a direction of switching and into the acceptance cone of collection optics (115). A light source (114) is placed orthogonal to rows and columns of an array (94) though not orthogonal to any substantial portion of the sides of the micromirrors in the array. The micromirrors of the present invention result in an improved contrast ratio and the light source position results in a more compact system. The micromirrors have the ability to pivot in opposite direction to on and off positions where the movement to the on position is greater than the movement to the off position.

Abstract translation: 提供微镜，其不是矩形的，以便沿着切换方向和收集光学器件（115）的接收锥体中的光衍射最小化。 光源（114）与阵列（94）的行和列正交地放置，但并非与阵列中的微镜的任何相当部分正交。 本发明的微反射镜导致对比度提高，光源位置导致更紧凑的系统。 微型镜具有相对于打开位置的运动大于移动到关闭位置的打开和关闭位置的相反方向枢转的能力。

公开(公告)号：WO2006001921A3

公开(公告)日：2006-05-11

申请号：PCT/US2005016732

申请日：2005-05-12

Applicant: REFLECTIVITY INC ,  PATEL SATYADEV ,  RICHARDS PETER ,  DOAN JONATHAN ,  TARN TERRY

Inventor： PATEL SATYADEV ,  RICHARDS PETER ,  DOAN JONATHAN ,  TARN TERRY

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  H04N9/3114

Abstract: Disclosed herein a microelectromechanical device having first and second substrates (120 and 122) that are bonded together with a gap formed therebetween. A plurality of functional members is disposed within the gap. The two substrates are bonded with a bonding agent (136) that comprises an electrically conductive adhesive material.

Abstract translation: 本文公开了一种具有第一和第二基板（120和122）的微机电装置，所述第一和第二基板以其间形成的间隙结合在一起。 多个功能构件设置在间隙内。 两个基板与包含导电粘合剂材料的粘合剂（136）粘合。

公开(公告)号：WO2005045889A3

公开(公告)日：2005-12-29

申请号：PCT/US2004033773

申请日：2004-10-12

Applicant: REFLECTIVITY INC ,  HUIBERS ANDREW ,  PATEL SATYADEV

Inventor： HUIBERS ANDREW ,  PATEL SATYADEV

IPC: G02B26/08 ,  G02B26/00

CPC classification number: G02B26/0841

Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.

Abstract translation: 显示系统中使用的空间光调制器的微镜阵列的微镜包括附接到铰链的镜板，所述铰链由形成在基板上的两个柱支撑。 而且，当从顶部看时，镜板可操作成沿着平行于镜板的对角线但偏离镜板的对角线的旋转轴线旋转。 连接两个柱的假想线不平行于镜板的任一对角线。