公开(公告)号：WO2004023087A1

公开(公告)日：2004-03-18

申请号：PCT/US2003/028051

申请日：2003-09-09

Applicant: ROSEMOUNT AEROSPACE, INC.

Inventor： GUO, Shuwen ,  WIEGELE, Thomas

IPC: G01J5/00

CPC classification number: G01J5/10 ,  G01H11/08 ,  G01J5/02 ,  G01J5/024 ,  G01J5/04 ,  G01J5/046 ,  G01J5/12

Abstract: A detector including a base having a recess formed therein and a diaphragm generally extending across the recess. The detector further includes an infrared sensitive component or a piezoelectric or piezoresistive element located on, above or supported by the diaphragm. The diaphragm includes a material which is generally resistant to liquid chemical etchants and which has a thermal conductivity of less than about 0.005 Wcm -1 K -1 .

Abstract translation: 一种检测器，包括具有形成在其中的凹部的基部和通常延伸穿过凹部的隔膜。 检测器还包括位于隔膜上方或由隔膜支撑的红外敏感元件或压电或压阻元件。 隔膜包括通常耐液体化学蚀刻剂并具有小于约0.005Wcm -1 K -1的热导率的材料。