MICROMACHINED VALVE APPARATUS
    1.
    发明专利

    公开(公告)号:CA2169826A1

    公开(公告)日:1995-03-30

    申请号:CA2169826

    申请日:1994-08-18

    Abstract: A valve controlling fluid flow includes a brittle layer of material having a port opening therein and a valve seat disposed about a perimeter of the port opening. The valve seat is selectively covered to control fluid flow through the port opening. A second layer of material is spaced apart from the brittle layer and has a surface facing the valve seat. A flexible sheet of material sandwiched between the brittle layer of material and the second layer of material includes a diaphragm actuated by a control force to selectively cover the valve seat to thereby control fluid flow through the port opening. The flexible sheet of material includes a moldable material a portion of which conforms to a contour of the valve seat. The moldable material is preferably joined to a flexible organic material.

    MICROMACHINED VALVE APPARATUS
    2.
    发明申请

    公开(公告)号:WO9508716A3

    公开(公告)日:1995-05-11

    申请号:PCT/US9409319

    申请日:1994-08-18

    Abstract: A valve controlling fluid flow includes a brittle layer (12) of material having a port opening (30, 32) therein and a valve seat (24A-24F) disposed about a perimeter of the port opening (30, 32). The valve seat (24A-24F) is selectively covered to control fluid flow through the port opening (30, 32). A second layer of material (20) is spaced apart from the brittle layer (12) and has a surface facing the valve seat (24A-24F). A flexible sheet of material (18) sandwiched between the brittle layer of material (12) and the second layer of material (20) includes a diaphragm (22A-22F) actuated by a control force to selectively cover the valve seat (24A-24F) to thereby control fluid flow through the port opening (30, 32). The flexible sheet of material (18) includes a moldable material (64) a portion of which conforms to a contour of the valve seat (24A-24F). The moldable material (64) is preferably joined to a flexible organic material (66).

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