公开(公告)号：WO9508716A3

公开(公告)日：1995-05-11

申请号：PCT/US9409319

申请日：1994-08-18

Applicant: ROSEMOUNT ANALYTICAL INC

Inventor： NELSON CYNTHIA R ,  SITTLER FRED C ,  BOSER GREGORY A

IPC: G01N30/16 ,  F15C5/00 ,  F16K99/00

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K99/0005 ,  F16K99/0015 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/0084

Abstract: A valve controlling fluid flow includes a brittle layer (12) of material having a port opening (30, 32) therein and a valve seat (24A-24F) disposed about a perimeter of the port opening (30, 32). The valve seat (24A-24F) is selectively covered to control fluid flow through the port opening (30, 32). A second layer of material (20) is spaced apart from the brittle layer (12) and has a surface facing the valve seat (24A-24F). A flexible sheet of material (18) sandwiched between the brittle layer of material (12) and the second layer of material (20) includes a diaphragm (22A-22F) actuated by a control force to selectively cover the valve seat (24A-24F) to thereby control fluid flow through the port opening (30, 32). The flexible sheet of material (18) includes a moldable material (64) a portion of which conforms to a contour of the valve seat (24A-24F). The moldable material (64) is preferably joined to a flexible organic material (66).

公开(公告)号：WO9512894A3

公开(公告)日：1995-06-22

申请号：PCT/US9410385

申请日：1994-09-14

Applicant: ROSEMOUNT ANALYTICAL INC

Inventor： SITTLER FRED C

IPC: H01J27/26 ,  H01J49/16 ,  H01J49/28

CPC classification number: H01J49/168 ,  H01J27/26 ,  H01J49/0018 ,  H01J49/288

Abstract: A micromachined mass spectrometer (10) includes an ionizer (30), a separation region (32) and a detector (34). The ionizer (30) is formed from an upper electrode (36), a center electrode (38) and a lower electrode (40). Ionization (30) of a sample gas takes place around an edge (48) of the center electrode (38). Accelerating electrodes (54, 56) extract ionized particles from the ionizer (30). Ionized particles are accelerated through the separation region (32). A magnetic field is applied in a direction perpendicular to travel of the ionized particles through the separation region (32) causing the trajectory of the ionized particles to bend. The mass spectrometer (10) is formed using micromachined techniques and is carried on a single substrate (24).

公开(公告)号：CA2169826A1

公开(公告)日：1995-03-30

申请号：CA2169826

申请日：1994-08-18

Applicant: ROSEMOUNT ANALYTICAL INC

Inventor： NELSON CYNTHIA R ,  SITTLER FRED C ,  BOSER GREGORY A

IPC: G01N30/16 ,  F15C5/00 ,  F16K99/00 ,  F15C3/04

Abstract: A valve controlling fluid flow includes a brittle layer of material having a port opening therein and a valve seat disposed about a perimeter of the port opening. The valve seat is selectively covered to control fluid flow through the port opening. A second layer of material is spaced apart from the brittle layer and has a surface facing the valve seat. A flexible sheet of material sandwiched between the brittle layer of material and the second layer of material includes a diaphragm actuated by a control force to selectively cover the valve seat to thereby control fluid flow through the port opening. The flexible sheet of material includes a moldable material a portion of which conforms to a contour of the valve seat. The moldable material is preferably joined to a flexible organic material.