公开(公告)号：DE60108217D1

公开(公告)日：2005-02-10

申请号：DE60108217

申请日：2001-01-05

Applicant: ROSEMOUNT INC

Inventor： ROMO G ,  RUD E ,  LUTZ A ,  SITTLER C ,  TOY C

IPC: G01L9/12 ,  B81B3/00 ,  B81B7/00 ,  B81C99/00 ,  G01L9/00 ,  H01L29/84

Abstract: A sensor has an electrical interconnect grown in a cavity between first and second layers that are bonded together. Electrically conductive grain growth material is selectively deposited on at least one of two electrically conductive film interconnect regions that face one another across the cavity. The grain growth material is then grown upon predetermined conditions to form the electrical interconnect between the two interconnect regions. A sensor element deposited in the cavity is electrically coupled between the layers by the interconnect. The grain growth material can be tantalum that is heated after the layers are bonded to grow grains that interconnect the electrically conductive films.

公开(公告)号：DE60018611T2

公开(公告)日：2006-01-19

申请号：DE60018611

申请日：2000-12-20

Applicant: ROSEMOUNT INC

Inventor： LUTZ A ,  FRICK L ,  SITTLER C ,  TOY C

IPC: G01L9/12 ,  G01L9/00

Abstract: A pressure sensor integrally formed in the shape of a beam around a central channel. The beam has an integral blind end that is pressurized by the fluid. The beam has an opposite end that is shaped to provide a stepped corner with a gap opening at the base of the stepped corner, where the gap and isolated from the fluid. A sensing film in the channel adjacent the blind end has an electrical parameter that varies with pressure and electrical leads that extend from the channel and out the gap. A seal fills the gap around the leads and the seal fills a portion of the stepped corner. The sensor is preferably formed by direct bonding of single crystal alumina layers. Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.

公开(公告)号：DE60108217T2

公开(公告)日：2005-12-29

申请号：DE60108217

申请日：2001-01-05

Applicant: ROSEMOUNT INC

Inventor： ROMO G ,  RUD E ,  LUTZ A ,  SITTLER C ,  TOY C

IPC: G01L9/12 ,  B81B3/00 ,  B81B7/00 ,  B81C99/00 ,  G01L9/00 ,  H01L29/84

Abstract: A sensor has an electrical interconnect grown in a cavity between first and second layers that are bonded together. Electrically conductive grain growth material is selectively deposited on at least one of two electrically conductive film interconnect regions that face one another across the cavity. The grain growth material is then grown upon predetermined conditions to form the electrical interconnect between the two interconnect regions. A sensor element deposited in the cavity is electrically coupled between the layers by the interconnect. The grain growth material can be tantalum that is heated after the layers are bonded to grow grains that interconnect the electrically conductive films.

公开(公告)号：DE60018611D1

公开(公告)日：2005-04-14

申请号：DE60018611

申请日：2000-12-20

Applicant: ROSEMOUNT INC

Inventor： LUTZ A ,  FRICK L ,  SITTLER C ,  TOY C

IPC: G01L9/12 ,  G01L9/00

Abstract: A pressure sensor integrally formed in the shape of a beam around a central channel. The beam has an integral blind end that is pressurized by the fluid. The beam has an opposite end that is shaped to provide a stepped corner with a gap opening at the base of the stepped corner, where the gap and isolated from the fluid. A sensing film in the channel adjacent the blind end has an electrical parameter that varies with pressure and electrical leads that extend from the channel and out the gap. A seal fills the gap around the leads and the seal fills a portion of the stepped corner. The sensor is preferably formed by direct bonding of single crystal alumina layers. Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.