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1.发明申请SOLID STATE DIFFERENTIAL PRESSURE SENSOR WITH OVERPRESSURE STOP AND FREE EDGE CONSTRUCTION 审中-公开具有超压停止和自由边缘结构的固态差压传感器
公开(公告)号：WO1990004701A1
公开(公告)日：1990-05-03
申请号：PCT/US1989004645
申请日：1989-10-17
Applicant: ROSEMOUNT INC.
Inventor： ROSEMOUNT INC. , KNECHT, Thomas, A. , NAUMAAN, Ahmed , RUD, Stanley, E., Jr.
IPC: F01B19/00
CPC classification number: G01L9/0042 , F01B19/00
Abstract: A solid state pressure sensor (35) utilizes a brittle diaphragm (36) made of a material such as silicon, which is mounted between base plates of glass (37, 38), and which deflects in response to pressure. The base plates (37, 38) of glass can have recesses (37A, 37B) formed therein to receive the diaphragm (36) and provide a full support across the diaphragm (36) under overpressure conditions to prevent overstressing the diaphragm (36), or the diaphragm (36) can have such contoured surfaces (45, 46) for forming overpressure stop surfaces against the facing base plate (37, 38). The diaphragm (36) has grooves (43, 44) defining a central portion (41) that deflects, and whereby the grooves (43, 44) will form webs (42) joining the central portion (41) to an outer rim (40) so that the diaphragm (36) acts similarly to a ''free edge'' diaphragm in its deflection characteristics. The grooves (43, 44) defining the webs (42) can have various configurations for achieving the results desired.
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2.发明授权DIFFERENTIAL PRESSURE SENSOR WITH MEMBRANE HAVING A FREE EDGE CONSTRUCTION 失效与脂膜差压传感器WITH FREE RAND建设
公开(公告)号：EP0439494B1
公开(公告)日：1996-01-10
申请号：EP89911696.6
申请日：1989-10-17
Applicant: ROSEMOUNT INC.
Inventor： KNECHT, Thomas, A. , NAUMAAN, Ahmed , RUD, Stanley, E., Jr.
CPC classification number: G01L9/0042 , F01B19/00
Abstract: A solid state pressure sensor (35) utilizes a brittle diaphragm (36) made of a material such as silicon, which is mounted between base plates of glass (37, 38), and which deflects in response to pressure. The base plates (37, 38) of glass can have recesses (37A, 37B) formed therein to receive the diaphragm (36) and provide a full support across the diaphragm (36) under overpressure conditions to prevent overstressing the diaphragm (36), or the diaphragm (36) can have such contoured surfaces (45, 46) for forming overpressure stop surfaces against the facing base plate (37, 38). The diaphragm (36) has grooves (43, 44) defining a central portion (41) that deflects, and whereby the grooves (43, 44) will form webs (42) joining the central portion (41) to an outer rim (40) so that the diaphragm (36) acts similarly to a ''free edge'' diaphragm in its deflection characteristics. The grooves (43, 44) defining the webs (42) can have various configurations for achieving the results desired.
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