公开(公告)号：WO1989007246A1

公开(公告)日：1989-08-10

申请号：PCT/US1989000382

申请日：1989-02-03

Applicant: RUDOLPH RESEARCH CORPORATION

Inventor： RUDOLPH RESEARCH CORPORATION ,  SPANIER, Richard, F.

IPC: G01J04/04

CPC classification number: G01J4/04 ,  G01N21/031 ,  G01N30/74 ,  G01N21/05

Abstract: An optical amplifier (2) for amplifying optical polarization state change effects comprises an arrangement for passing polarized light through a material (6) a plurality of times such that changes in the polarization state of the polarized light from the respective passes of the light through the material are cumulative. The amplifier (2) can be used in a method for detecting optical polarization state change effects wherein polarized light which is passed through the material (6) is detected. The material (2) may be a liquid sample from a high performance liquid chromatography system (3).

公开(公告)号：WO1996024034A1

公开(公告)日：1996-08-08

申请号：PCT/US1996001495

申请日：1996-02-01

Applicant: RUDOLPH RESEARCH CORPORATION

Inventor： RUDOLPH RESEARCH CORPORATION ,  HALLER, Mitchell, E.

IPC: G01J04/00

CPC classification number: G01N21/211

Abstract: A method and apparatus for optical measurements of rough samples (2) in ellipsometry and reflectometry wherein optical probe beams (A-D) are reflected from the sample (2). The method includes directing an optical probe beam (A-D) so that it is reflected from a sample (2), and directing the optical probe beam reflected (A'-D') from the sample, and wherein at least one of the sample (2) and the probe beam (A-D) is moved during the directing of the probe beam (A-D) so that a relative movement of the sample (2) and the probe beam (A-D) with respect to one another at the surface of the sample (2) from which the probe beam (A-D) is reflected exceeds an amount of roughness scale of the sample (2) so as to produce independent speckle patterns in the reflected beam (A'-D') during the directing. The reflected probe beam (A'-D') is detected with a photodetector (6) which responds to intensity of the reflected optical probe beam (A'-D') averaged over a predetermined time period.

Abstract translation: 用于椭圆测量和反射测量的粗糙样品（2）的光学测量的方法和装置，其中光学探针光束（A-D）从样品（2）反射。 该方法包括引导光学探针光束（AD）使得其从样品（2）反射，并引导来自样品的光学探针光束反射（A'-D'），并且其中至少一个样品 在探测光束（AD）的引导期间，探测光束（AD）被移动，使得样品（2）和探针光束（AD）在样品表面处相对于彼此的相对运动 探测光束（AD）反射的光束（2）超过样品（2）的粗糙度的量，以便在引导期间在反射光束（A'-D'）中产生独立的散斑图案。 反射的探测光束（A'-D'）用一个光电探测器（6）进行检测，光电探测器（6）响应在预定的时间周期内平均的反射光探针光束（A'-D'）的强度。

公开(公告)号：WO1992012404A1

公开(公告)日：1992-07-23

申请号：PCT/US1992000280

申请日：1992-01-10

Applicant: RUDOLPH RESEARCH CORPORATION

Inventor： RUDOLPH RESEARCH CORPORATION ,  SPANIER, Richard, F. ,  WOLF, Robert, G. ,  LOITERMAN, Robert, M. ,  HALLER, Mitchell, E.

IPC: G01J04/04

CPC classification number: G01N21/211 ,  G01B11/065

Abstract: The ellipsometer (1) and method involve directing polarized light for interaction with an optical system (2) under study at different angles of incidence from a single beam of light and detecting the light interacted with the optical system by reflection and/or transmission for each of a plurality of different angles of incidence. The simultaneous illumination of the optical system under study at a whole range of angles of incidence alpha from a single beam of light and the collection a large multiplicity of data from the different angles detected can be accomplished rapidly and easily and with accuracy without scanning and with only one ellipsometer. A lens (7) is used to focus the incoming light to provide the range of different angles of incidence alpha . The range of angles is at least one or two degrees and preferably thirty degrees or more. A second lens (8) refocuses the interacted light to a linear, multi-element detector array (6) which extends in the plane of the incidence. Each of the detector elements (9) detects a narrow range of angles of incidence within the relatively wider range of angles of incidence of the illuminating beam. If the incident illuminating rays are polychromatic and a wavelength dispersing element (10) acts on the reflected rays each detector element of a square array (11) detects a narrow range of wavelengths and angles of incidence.

Abstract translation: 椭偏仪（1）和方法涉及将偏振光引导到与来自单个光束的不同入射角的研究中的光学系统（2）的相互作用，并且通过每个的反射和/或透射来检测与光学系统相互作用的光 具有多个不同的入射角。 在单光束的入射角α的整个范围内同时照射研究的光学系统，并且从检测到的不同角度收集大量数据可以快速且容易地并且准确地实现，而无需扫描和与 只有一个椭偏仪。 透镜（7）用于聚焦入射光，​​以提供不同入射角α的范围。 角度范围为至少一度或二度，优选三十度以上。 第二透镜（8）将相互作用的光重新聚焦到在入射平面中延伸的线性多元件检测器阵列（6）。 每个检测器元件（9）在照明光束的相对较宽的入射角范围内检测入射角的窄范围。 如果入射照明光线是多色的并且波长分散元件（10）作用在反射光线上，则方阵（11）的每个检测器元件检测波长和入射角的窄范围。