Method of and device for realtime measurement of the state of polarization of a quasi-monochromatic light beam
    2.
    发明公开
    Method of and device for realtime measurement of the state of polarization of a quasi-monochromatic light beam 失效
    用于实时测量准单色光束偏振状态的方法和装置

    公开(公告)号:EP0172568A3

    公开(公告)日:1987-09-02

    申请号:EP85110477

    申请日:1985-08-21

    CPC classification number: G01J4/00 G01J9/04

    Abstract: The method and the device are based on interference techniques. Two quasi-monochromatic radiations (2a, 2b; 102a, 102b; 202a, 202b) with slightly different optical frequencies are generated. A radiation is converted into a 45° linearly-polarized radiation, while the other presents the polarization state imposed by a body under test (4, 204). In each radiation, horizontal and vertical polarization components are separated, and then recombined into two different beams (20a, 21a; 34, 35) comprising radiations at both frequencies, respectively polarized in the same plane. Beatings between the two components of each beam are originated and from the two electrical signals in the radio frequency range thus obtained the information is extracted on the relative phase and the amplitude of the two components of the radiation with polarization imposed by the body under test (4, 204).

    FIVE-AXIS/SIX-AXIS LASER MEASURING SYSTEM
    3.
    发明申请
    FIVE-AXIS/SIX-AXIS LASER MEASURING SYSTEM 审中-公开
    五轴/六轴激光测量系统

    公开(公告)号:WO1998007012A1

    公开(公告)日:1998-02-19

    申请号:PCT/US1997014339

    申请日:1997-08-15

    CPC classification number: G01B11/26 G01D5/344 G01J4/00

    Abstract: A 6-axis laser measurement system (300) includes a novel 5-D measurement apparatus and precision laser roll detector system (100). The 5-D system (105) measures pitch, yaw, X, Y, Z displacements with a single setup of a laser head (102) and detection housing (302). The laser roll detector (100) uses a polarizing prism (104) such as a Glan-Thompson prism, and at least two photodetectors (D1, D2, D3, D4). A linearly polarized laser beam enters the prism (104), and the beam is split into two polarized components, the intensities of which vary with roll orientation of the detector (105) relative to the polarized laser beam. The outputs of the two detectors (D1, D2) are connected to the positive and negative inputs, respectively, of a high gain differential amplifier (108) which provides roll output.

    Abstract translation: 6轴激光测量系统(300)包括新型的5-D测量装置和精密激光辊检测器系统(100)。 5-D系统(105)通过激光头(102)和检测壳体(302)的单个设置来测量俯仰,偏航,X,Y,Z位移。 激光辊检测器(100)使用诸如Glan-Thompson棱镜的偏振棱镜(104)和至少两个光电检测器(D1,D2,D3,D4)。 线性偏振激光束进入棱镜(104),并且光束被分成两个偏振分量,其强度随检测器(105)相对于偏振激光束的滚动方向而变化。 两个检测器(D1,D2)的输出分别连接到提供滚动输出的高增益差分放大器(108)的正和负输入端。

    METHOD AND SYSTEM FOR SUPPRESSING UNWANTED REFLECTIONS IN AN OPTICAL SYSTEM
    4.
    发明申请
    METHOD AND SYSTEM FOR SUPPRESSING UNWANTED REFLECTIONS IN AN OPTICAL SYSTEM 审中-公开
    用于抑制光学系统中的无反射的方法和系统

    公开(公告)号:WO1997028429A1

    公开(公告)日:1997-08-07

    申请号:PCT/US1997000994

    申请日:1997-01-22

    CPC classification number: G01N21/95684 G01N21/21 G01N21/95623

    Abstract: A method and system are provided for suppressing or filtering multiple reflections which corrupt photometric or height measurements within optical systems such as imaging systems. The reflections may originate within the instrument (i.e., back reflections) or may be inter-reflections between one or more surfaces in a scene. In one embodiment, a beam of electromagnetic energy generated by a source is polarized in a first rotational sense, is transmitted to a point of interest (i.e., scene) of an object, is reflected and received by a receiver having a polarizer which passes reflected electromagnetic energy having a second rotational sense opposite the first rotational sense. In this way, unwanted reflections from the point of interest having the first rotational sense are suppressed and back-reflections to the source of electromagnetic energy are substantially eliminated. In another embodiment, a detector which normally back-reflects a portion of electromagnetic energy it receives along a first axis, has a surface normal which is maintained in a fixed, non-colinear relation to the first axis and back-reflected electromagnetic energy is prevented from reaching the scene and is not received by any other detector of the imaging system.

    Abstract translation: 提供了一种方法和系统,用于抑制或过滤在诸如成像系统的光学系统内腐蚀光度测量或高度测量的多次反射。 反射可能源于仪器内(即后反射),或可能是场景中一个或多个表面之间的相互反射。 在一个实施例中,由源产生的电磁能量束以第一旋转方向极化,被传送到物体的感兴趣点(即,场景),被具有通过反射的偏振器的接收器反射和接收 具有与第一旋转感觉相反的第二旋转感测的电磁能。 以这种方式,来自具有第一旋转感测的感兴趣点的不需要的反射被抑制,并且基本上消除了对电磁能源的反射。 在另一个实施例中,通常反向反映其沿着第一轴接收的电磁能的一部分的检测器具有表面法线,其保持与第一轴线的固定的非共线关系,并且防止反向反射的电磁能量 不能到达现场并且不被成像系统的任何其他检测器接收。

    METHOD OF EVALUATING AND MEASURING POLARIZATION STATE, POLARIZATION STATE AND POLARIZATION MODE DISPERSION AND APPARATUS THEREFOR
    5.
    发明申请
    METHOD OF EVALUATING AND MEASURING POLARIZATION STATE, POLARIZATION STATE AND POLARIZATION MODE DISPERSION AND APPARATUS THEREFOR 审中-公开
    评估和测量极化状态,极化状态和极化模式分布的方法及其设备

    公开(公告)号:WO1997002476A1

    公开(公告)日:1997-01-23

    申请号:PCT/JP1996001786

    申请日:1996-06-27

    CPC classification number: G01J4/00 G01J4/04 G01M11/336 G01M11/337 G01N21/21

    Abstract: A polarization state and polarization characteristics of a light transmitting medium are evaluated by Jones vectors containing Stokes vectors and Jones matrix. Rays of light of under three kinds of polarized states are applied from an incidence side apparatus (2) to a light transmitting medium (1), and a branched beam of light I on the outgoing side and branched beams of light Q, U and V passing through analyzers in directions of 0 DEG , 90 DEG and 45 DEG are detected as the Stokes vectors by light intensity. The Stokes vectors are normalized such as S1 = Q/I, S2 = U/I and S3 = V/I, and are re-normalized in a unit length such as S1/(S1 + S2 + S3 ) => S1. A polarization evaluation portion (15) actually measures the Jones vector containing the re-normalized Stokes vector as its component and evaluates the polarized state of the light transmitting medium (1). A polarization characteristics evaluation portion (13) actually measures a Jones matrix containing the re-normalized Stokes vector as the components thereof and evaluates the polarization characteristics of the light transmitting medium (1).

    Abstract translation: 通过包含斯托克斯矢量和琼斯矩阵的琼斯矢量评估光透射介质的极化状态和偏振特性。 从入射侧装置(2)向光传输介质(1)施加三种偏振态的光线,并且在出射侧具有分支光束I和分支光束Q,U和V 以0度,90度,45度方向通过分析仪,通过光强检测为斯托克斯矢量。 斯托克斯矢量被归一化,例如S1 = Q / I,S2 = U / I和S3 = V / I,并且以单位长度重新归一化,例如S1 /(S1-2 + S22 + S3 <2>)=> S1。 极化评估部分(15)实际上测量包含重新归一化的斯托克斯矢量的琼斯矢量作为其分量并评估光传输介质(1)的偏振状态。 偏振特性评价部(13)实际上测量包含重归一化斯托克斯矢量的琼斯矩阵作为其分量,并评估光传输介质(1)的极化特性。

    FIBER OPTIC PROBE AND METHOD FOR DETECTING OPTICALLY ACTIVE MATERIALS
    6.
    发明申请
    FIBER OPTIC PROBE AND METHOD FOR DETECTING OPTICALLY ACTIVE MATERIALS 审中-公开
    用于检测光学活性材料的光纤探测器和方法

    公开(公告)号:WO1993005376A1

    公开(公告)日:1993-03-18

    申请号:PCT/US1992006343

    申请日:1992-07-30

    CPC classification number: G01J4/04 G01N21/8507

    Abstract: The presence and concentration of an optical active constituent of a fluid medium (5) is determined in situ by immersing in the fluid medium (5) a probe (1) constructed to pass plane polarized light (34) through the fluid medium (5) in the first and second passes so as to induce an optical rotation (70) to the plane of polarization. The light is analyzed (44, 46) after the second pass in a manner to provide a plurality of light components whose individual intensities are affected by the induced optical rotation (70). A light intensity ratio is determined for the individual light components and compared to light intensity ratios (IA, IB) obtained from like fluid media having known concentrations of the optically active constituent therein to permit determination of the concentration of the optical active constituent (5).

    OPTICAL COMPONENT OF POLARIZING MODULATION, AND ITS USE IN A POLARIMETER OR IN AN ELLIPSOMETER
    7.
    发明申请
    OPTICAL COMPONENT OF POLARIZING MODULATION, AND ITS USE IN A POLARIMETER OR IN AN ELLIPSOMETER 审中-公开
    极化调制的光学元件及其在极化仪中或在偏振仪中的应用

    公开(公告)号:WO1998019142A1

    公开(公告)日:1998-05-07

    申请号:PCT/FR1997001849

    申请日:1997-10-16

    CPC classification number: G01N21/211 G01J4/00 G02F1/0327

    Abstract: The invention concerns an optical component of polarizing modulation, a polarimeter and a Mueller ellipsometer comprising this optical component. The optical component modulates an incident light beam (10) linearly polarized and sends back a modulated beam (11). It comprises a coupled phase modulator (6B) modulating twice successively the incident beam, the two modulations being at the same frequency omega /2 pi and being coupled by a system (61) modifying the state of polarization of the light between the two modulations. The ellipsometer comprises means for sensing a measuring beam sent back by a sample, which receives the modulated beam, and a processing unit. The sensing means include a polarimeter generating n measured quantities representing the states of polarization of the beam and the processing unit generates by Fourier transform m values for each of these quantities, with n x m >/= 16 and m >/= 4, for simultaneously acceding to the sixteen coefficients of the Mueller matrix of the sample.

    Abstract translation: 本发明涉及偏振调制的光学部件,偏振计和包含该光学部件的米勒椭偏仪。 光学部件调制线偏振的入射光束(10)并发送回调制光束(11)。 它包括耦合相位调制器(6B),连续调制入射光束两次,两个调制处于相同的频率ω/2π,并通过修改两个调制之间的光的偏振状态的系统(61)耦合。 椭偏仪包括用于感测由接收调制束的样本发回的测量光束的装置和处理单元。 感测装置包括产生表示光束的极化状态的n个测量量的旋转计,并且处理单元通过用这些量的每一个的傅立叶变换m值产生,其中nxm> = 16和m> / = 4,用于同时加入 到样本的Mueller矩阵的十六个系数。

    ELLIPSOMETRIC MICROSCOPE
    9.
    发明申请

    公开(公告)号:WO1996029583A1

    公开(公告)日:1996-09-26

    申请号:PCT/US1996003852

    申请日:1996-03-20

    CPC classification number: G01B11/065 G01N21/211

    Abstract: The ellipsometric microscope (10) broadly includes a light source (14) for emitting a beam of monochromatic, collimated light, an adjustable support assembly (12) for directing the light beam along an incident path (56) for impingement on a film sample (58) at a predetermined angle for reflectance off of the sample along a reflectance path (60), and a detector (34) for detecting the reflectance beam. A polarizer (20) is positioned along the incident path (56) for elliptically polarizing the incident beam, and a remotely controllable variable retarder (22) is also positioned along the incident path (56) for altering the elliptical polarization of the incident beam. A beam expander (30) is positioned along the reflectance path (60) between the film sample (58) and the detector (34) for expanding the beam of light, and permitting only passage of parallel component of the reflectance beam. An analyser (36) is coupled with the detector (34) for analyzing the reflectance beam for determining the thickness of the film sample (58).

    Abstract translation: 椭圆显微镜(10)广泛地包括用于发射单色准直光束的光源(14),用于沿着入射路径(56)引导光束的可调节支撑组件(12),用于冲击薄膜样品( 58),以及用于检测反射光束的检测器(34),以预定角度对反射路径(60)进行反射。 偏振器(20)沿着入射路径(56)定位,用于对入射光束进行椭圆偏振,并且远程可控可变延迟器(22)也沿入射路径(56)定位,以改变入射光束的椭圆偏振。 光束扩展器(30)沿着膜样本(58)和检测器(34)之间的反射路径(60)定位,用于扩展光束,并且仅允许反射光束的平行分量通过。 分析器(36)与检测器(34)耦合,用于分析反射光束以确定胶片样品(58)的厚度。

    PVC AND PET PLASTIC ARTICLE SORTING APPARATUS AND METHOD
    10.
    发明申请
    PVC AND PET PLASTIC ARTICLE SORTING APPARATUS AND METHOD 审中-公开
    PVC和PET塑料制品分选装置及方法

    公开(公告)号:WO1997026515A1

    公开(公告)日:1997-07-24

    申请号:PCT/US1997000915

    申请日:1997-01-21

    CPC classification number: B07C5/368 B07C5/3422 H04N7/188

    Abstract: A sorting system (10) propels a stream of randomly arranged PET and PVC articles (12, 14) through an inspection zone (20) including a first light polarizer/analyzer combination (24, 26), an article-detecting gap (G), and a second light polarizer/analyzer combination (28, 30). The first and second polarizer/analyzer combinations are oriented to extinguish normally incident light in the absence of articles in the inspection zone and are offset 45 degrees relative to each other such that at least one polarizer/analyzer combination detects a principal axis of birefringence of PET articles. The gap is employed to detect the presence of an article in the inspection zone. A video camera (22) includes first, second, and third CCD arrays (58, 60, 62) positioned to receive respective light arrays (48, 64, 50) from the first light polarizer/analyzer combination, the gap, and the second light polarizer/analyzer combination and to generate first, second, and third video signals representative of the light each receives. A video signal processor (68) processes the second video signal to identify the presence of multiple articles in the inspection zone, processes the first and third video signals to determine whether each of the multiple articles is made from PET, and selectively activates air ejectors (70) to separate the PET articles from the other articles.

    Abstract translation: 分选系统(10)通过包括第一光偏振器/分析仪组合(24,26),物品检测间隙(G)的检查区(20)推动随机布置的PET和PVC制品(12,14)流, ,和第二光偏振器/分析器组合(28,30)。 第一和第二偏振器/分析仪组合被定向以在检查区域中不存在物品的情况下熄灭正常入射的光,并相对于彼此偏移45度,使得至少一个偏振器/分析仪组合检测PET的双折射主轴 文章。 使用间隙来检测检查区中物品的存在。 摄像机(22)包括第一,第二和第三CCD阵列(58,60,62),其定位成从第一光偏振器/分析仪组合接收相应的光阵列(48,64,50),间隙和第二CCD阵列 光偏振器/分析仪组合,并且产生表示每个接收的光的第一,第二和第三视频信号。 视频信号处理器(68)处理第二视频信号以识别检查区域中多个物品的存在,处理第一和第三视频信号以确定多个物品中的每一个是否由PET制成,并且选择性地激活空气喷射器 70)将PET制品与其他物品分开。

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