公开(公告)号：WO2013096660A1

公开(公告)日：2013-06-27

申请号：PCT/US2012/071030

申请日：2012-12-20

Applicant: RUDOLPH TECHNOLOGIES, INC.

Inventor： OHREN, Dennis L. ,  VOGES, Christopher J. ,  ROTERING, Andrew E.

IPC: G01B11/00 ,  G01N21/88 ,  G01C5/00

CPC classification number: G02B7/28 ,  G01B11/00 ,  G01B11/026 ,  G01B11/0608 ,  G01N21/84 ,  G01N21/9501 ,  G01N2201/127 ,  H04N5/23212

Abstract: A focus height sensor in an optical system for inspection of semiconductor devices includes a sensor beam source that emits a beam of electromagnetic radiation. A reflector receives the beam of electromagnetic radiation from the sensor beam source and directs the beam toward a surface of a semiconductor device positioned within a field of view of the optical system. The reflector is positioned to receive at least a portion of the beam back from the surface of the semiconductor device to direct the returned beam to a sensor. The sensor receives the returned beam and outputs a signal correlating to a position of the surface within the field of view along an optical axis of the optical system.

Abstract translation: 用于检查半导体器件的光学系统中的焦点高度传感器包括发射电磁辐射束的传感器光束源。 反射器接收来自传感器光束源的电磁辐射束，并将光束引向位于光学系统的视野内的半导体器件的表面。 反射器定位成从半导体器件的表面接收光束的至少一部分，以将返回的光束引导到传感器。 传感器接收返回的光束，并沿着光学系统的光轴输出与视场内的表面的位置相关的信号。